For approximately a decade, imaging ellipsometers have been available commercially. These allow one to measure the properties of graphene flakes, organic layers on amorphous substrates, plasmonic structures, among many other examples. These imaging ellipsometers opened a path to recognize and interpret pattern formations on surfaces or mapping field enhancement. However, for a full understanding of the optical response of patterned substrates, one should be aware that the well-known Fresnel reflection and transmission equations are, strictly speaking, not correct anymore. In this contribution, the ellipsometric response is explained in detail using heuristic physical arguments, hopefully without getting lost in the complexities of numerical computations.
Skip Nav Destination
Article navigation
21 March 2021
Research Article|
March 15 2021
Imaging ellipsometry for structured and plasmonic materials
Special Collection:
Plasmonics: Enabling Functionalities with Novel Materials
Kurt Hingerl
Kurt Hingerl
a)
Center for Surface and Nanoanalytics, Johannes Kepler Universität Linz
, 4040 Linz, Austria
a)Author to whom correspondence should be addressed: kurt.hingerl@jku.at
Search for other works by this author on:
a)Author to whom correspondence should be addressed: kurt.hingerl@jku.at
Note: This paper is part of the Special Topic on Plasmonics: Enabling Functionalities with Novel Materials.
J. Appl. Phys. 129, 113101 (2021)
Article history
Received:
November 30 2020
Accepted:
February 24 2021
Citation
Kurt Hingerl; Imaging ellipsometry for structured and plasmonic materials. J. Appl. Phys. 21 March 2021; 129 (11): 113101. https://doi.org/10.1063/5.0039150
Download citation file:
Sign in
Don't already have an account? Register
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Pay-Per-View Access
$40.00
Citing articles via
Impulse coupling enhancement of aluminum targets under laser irradiation in a soft polymer confined geometry
C. Le Bras, E. Lescoute, et al.
A step-by-step guide to perform x-ray photoelectron spectroscopy
Grzegorz Greczynski, Lars Hultman
GaN-based power devices: Physics, reliability, and perspectives
Matteo Meneghini, Carlo De Santi, et al.
Related Content
Cavity ring-down ellipsometry
J. Chem. Phys. (September 2009)
Extracting the anisotropic optical parameters of chiral plasmonic nanostructured thin films using generalized ellipsometry
Appl. Phys. Lett. (August 2014)
Ultrasensitive broadband infrared 4 × 4 Mueller-matrix ellipsometry for studies of depolarizing and anisotropic thin films
J. Vac. Sci. Technol. B (December 2019)
Mapping spectroscopic micro-ellipsometry with sub-5 microns lateral resolution and simultaneous broadband acquisition at multiple angles
Rev. Sci. Instrum. (February 2023)
In situ layer characterization by spectroscopic ellipsometry at high temperatures
AIP Conference Proceedings (November 1998)