A detailed experimental study of high power impulse magnetron sputtering discharges is performed using time-resolved ground state density mapping of the sputtered neutrals and ions. This Paper deals with the effects related to the plasma-on phase and can be considered as an extension of Paper I being published simultaneously. The influence of plasma pulse duration, pulse energy, gas pressure as well as molecular oxygen admixture on the spatial and temporal particle density evolution is examined. Special attention is given to the temporal evolution of the ionization fraction distribution of the sputtered atoms. In addition, the 2D vector maps reflecting particle propagation, sputtering, and ionization in the discharge volume are also presented and discussed, similarly to the first part of this study [J. Appl. Phys. 128, 043303 (2020)].
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28 July 2020
Research Article|
July 28 2020
Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects Available to Purchase
Jaroslav Hnilica
;
Jaroslav Hnilica
a)
1
Department of Physical Electronics, Masaryk University
, Kotlářská 2, CZ-61137 Brno, Czech Republic
a)Author to whom correspondence should be addressed: [email protected]
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Peter Klein
;
Peter Klein
1
Department of Physical Electronics, Masaryk University
, Kotlářská 2, CZ-61137 Brno, Czech Republic
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Petr Vašina;
Petr Vašina
1
Department of Physical Electronics, Masaryk University
, Kotlářská 2, CZ-61137 Brno, Czech Republic
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Rony Snyders;
Rony Snyders
2
Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons
, 23 Place du Parc, B-7000 Mons, Belgium
3
Materia Nova Research Center, Parc Initialis
, B-7000 Mons, Belgium
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Nikolay Britun
Nikolay Britun
b)
2
Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons
, 23 Place du Parc, B-7000 Mons, Belgium
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Jaroslav Hnilica
1,a)
Peter Klein
1
Petr Vašina
1
Rony Snyders
2,3
Nikolay Britun
2,b)
1
Department of Physical Electronics, Masaryk University
, Kotlářská 2, CZ-61137 Brno, Czech Republic
2
Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons
, 23 Place du Parc, B-7000 Mons, Belgium
3
Materia Nova Research Center, Parc Initialis
, B-7000 Mons, Belgium
a)Author to whom correspondence should be addressed: [email protected]
b)
Present address: Center for Low-temperature Plasma Sciences, Nagoya University, Chikusa-ku, 464-8603 Nagoya, Japan. [email protected]
J. Appl. Phys. 128, 043304 (2020)
Article history
Received:
March 30 2020
Accepted:
July 10 2020
Citation
Jaroslav Hnilica, Peter Klein, Petr Vašina, Rony Snyders, Nikolay Britun; Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects. J. Appl. Phys. 28 July 2020; 128 (4): 043304. https://doi.org/10.1063/5.0009380
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