A detailed experimental study of high power impulse magnetron sputtering processes is performed by time-resolved imaging of the ground state sputtered particles. New details related to the behavior of both neutral and singly ionized atoms are shown, as a result of separate treatment of the plasma-on and plasma-off time phases. In Paper I, the ion/neutral density redistribution in the ionization zone during sputtering is analyzed; the role of main discharge parameters, such as pulse repetition rate, pulse energy, etc., is discussed systematically. The time-resolved evolution of the ground state levels population for both sputtered neutrals and ions is also considered. In addition, propagation of the sputtered particles is analyzed using 2D density gradient diagrams calculated based on the measured particle density distributions. The results of this work are compared, when possible, to the data obtained previously [Britun et al., J. Appl. Phys. 117, 163302 (2015)].
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Revisiting particle dynamics in HiPIMS discharges. I. General effects
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28 July 2020
Research Article|
July 28 2020
Revisiting particle dynamics in HiPIMS discharges. I. General effects
Jaroslav Hnilica
;
Jaroslav Hnilica
a)
1
Department of Physical Electronics, Masaryk University
, Kotlářská 2, CZ-61137 Brno, Czech Republic
a)Author to whom correspondence should be addressed: hnilica@mail.muni.cz
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Peter Klein
;
Peter Klein
1
Department of Physical Electronics, Masaryk University
, Kotlářská 2, CZ-61137 Brno, Czech Republic
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Petr Vašina;
Petr Vašina
1
Department of Physical Electronics, Masaryk University
, Kotlářská 2, CZ-61137 Brno, Czech Republic
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Rony Snyders;
Rony Snyders
2
Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons
, 23 Place du Parc, B-7000 Mons, Belgium
3
Materia Nova Research Center, Parc Initialis
, B-7000 Mons, Belgium
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Nikolay Britun
Nikolay Britun
b)
2
Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons
, 23 Place du Parc, B-7000 Mons, Belgium
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a)Author to whom correspondence should be addressed: hnilica@mail.muni.cz
b)
Present address: Center for Low-temperature Plasma Sciences, Nagoya University, Chikusa-ku, 464-8603 Nagoya, Japan. Electronic mail: britun@plasma.engg.nagoya-u.ac.jp
J. Appl. Phys. 128, 043303 (2020)
Article history
Received:
March 30 2020
Accepted:
June 03 2020
Citation
Jaroslav Hnilica, Peter Klein, Petr Vašina, Rony Snyders, Nikolay Britun; Revisiting particle dynamics in HiPIMS discharges. I. General effects. J. Appl. Phys. 28 July 2020; 128 (4): 043303. https://doi.org/10.1063/5.0009378
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