In this study, we use transient thermal gratings—a non-contact, laser-based thermal metrology technique with intrinsically high accuracy—to investigate room-temperature phonon-mediated thermal transport in two nanoporous holey silicon membranes with limiting dimensions of 120 nm and 250 nm, respectively. We compare the experimental results with ab initio calculations of phonon-mediated thermal transport according to the phonon Boltzmann transport equation (BTE) using two different computational techniques. We find that the calculations conducted within the Casimir framework, i.e., based on the BTE with the bulk phonon dispersion and diffuse scattering from surfaces, are in quantitative agreement with the experimental data and thus conclude that this framework is adequate for describing phonon-mediated thermal transport in silicon nanostructures with feature sizes of the order of 100 nm.
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21 December 2020
Research Article|
December 17 2020
Thermal transport in nanoporous holey silicon membranes investigated with optically induced transient thermal gratings
Ryan A. Duncan
;
Ryan A. Duncan
a)
1
Department of Chemistry, Massachusetts Institute of Technology
, 77 Massachusetts Ave., Cambridge, Massachusetts 02139, USA
a)Author to whom correspondence should be addressed: [email protected]
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Giuseppe Romano;
Giuseppe Romano
2
Department of Mechanical Engineering, Massachusetts Institute of Technology
, 77 Massachusetts Ave., Cambridge, Massachusetts 02139, USA
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Marianna Sledzinska;
Marianna Sledzinska
3
Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and BIST
, Campus UAB, Bellaterra, 08193 Barcelona, Spain
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Alexei A. Maznev;
Alexei A. Maznev
1
Department of Chemistry, Massachusetts Institute of Technology
, 77 Massachusetts Ave., Cambridge, Massachusetts 02139, USA
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Jean-Philippe M. Péraud;
Jean-Philippe M. Péraud
4
Computational Research Division, Lawrence Berkeley National Laboratory
, 1 Cyclotron Road, Berkeley, California 94720, USA
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Olle Hellman;
Olle Hellman
5
Department of Applied Physics and Materials Science, California Institute of Technology
, Pasadena, California 91125, USA
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Clivia M. Sotomayor Torres
;
Clivia M. Sotomayor Torres
3
Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and BIST
, Campus UAB, Bellaterra, 08193 Barcelona, Spain
6
ICREA
, PG. Lluís Companys 23, 08010 Barcelona, Spain
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Keith A. Nelson
Keith A. Nelson
1
Department of Chemistry, Massachusetts Institute of Technology
, 77 Massachusetts Ave., Cambridge, Massachusetts 02139, USA
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a)Author to whom correspondence should be addressed: [email protected]
J. Appl. Phys. 128, 235106 (2020)
Article history
Received:
December 07 2019
Accepted:
December 02 2020
Citation
Ryan A. Duncan, Giuseppe Romano, Marianna Sledzinska, Alexei A. Maznev, Jean-Philippe M. Péraud, Olle Hellman, Clivia M. Sotomayor Torres, Keith A. Nelson; Thermal transport in nanoporous holey silicon membranes investigated with optically induced transient thermal gratings. J. Appl. Phys. 21 December 2020; 128 (23): 235106. https://doi.org/10.1063/1.5141804
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