The layered van der Waals compounds (MnBi2Te4)(Bi2Te3) were recently established as the first intrinsic magnetic topological insulators. We report a study on the epitaxial growth of (MnBi2Te4)m(Bi2Te3)n films based on the co-deposition of MnTe and Bi2Te3 on BaF2 (111) substrates. X-ray diffraction and scanning transmission electron microscopy evidence the formation of multilayers of stacked MnBi2Te4 septuple layers and Bi2Te3 quintuple layers with a predominance of MnBi2Te4. The elemental composition and morphology of the films is further characterized by x-ray photoemission spectroscopy and atomic force microscopy. X-ray magnetic circular and linear dichroism spectra are comparable to those obtained for MnBi2Te4 single crystals and confirm antiferromagnetic order in the films.

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