Plasmonic and nanophotonic structures have been used to enhance the performance of photonic devices through the control and manipulation of photonic energy. Characterization of such devices typically requires the fabrication of contacting structures followed by stepwise spectral illumination and data recording. The acquisition of reflectance and transmittance spectra with Fourier transform infrared spectroscopy (FTIR) is—in contrast—a contactless and faster process. Since FTIR measurements take into account substrate absorption, which does not contribute to photocurrent, the two measurement approaches cannot be compared without further data processing. Here, we present a strategy to separate substrate absorption from absorption processes within the device layers in order to predict device performance from FTIR measurements. We apply our strategy to Ge-on-Si planar photodetectors with and without plasmonic structures.
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7 July 2020
Research Article|
July 02 2020
Comparing Fourier transform infrared spectroscopy results with photocurrent measurements for Ge-on-Si PIN photodetectors with and without Al nanoantennas
Lion Augel
;
Lion Augel
a)
1
Chair of Micro and Nano Systems, Brandenburg University of Technology
, Cottbus 03046, Germany
2
Institute of Semiconductor Engineering, University of Stuttgart
, Stuttgart 70569, Germany
a)Author to whom correspondence should be addressed: lion.augel@b-tu.de
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Inga A. Fischer
;
Inga A. Fischer
2
Institute of Semiconductor Engineering, University of Stuttgart
, Stuttgart 70569, Germany
3
Experimental Physics and Functional Materials, Brandenburg University of Technology
, Cottbus 03046, Germany
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Martin Gollhofer;
Martin Gollhofer
2
Institute of Semiconductor Engineering, University of Stuttgart
, Stuttgart 70569, Germany
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Michael Oehme;
Michael Oehme
2
Institute of Semiconductor Engineering, University of Stuttgart
, Stuttgart 70569, Germany
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Jörg Schulze
Jörg Schulze
2
Institute of Semiconductor Engineering, University of Stuttgart
, Stuttgart 70569, Germany
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a)Author to whom correspondence should be addressed: lion.augel@b-tu.de
J. Appl. Phys. 128, 013105 (2020)
Article history
Received:
April 29 2020
Accepted:
June 16 2020
Citation
Lion Augel, Inga A. Fischer, Martin Gollhofer, Michael Oehme, Jörg Schulze; Comparing Fourier transform infrared spectroscopy results with photocurrent measurements for Ge-on-Si PIN photodetectors with and without Al nanoantennas. J. Appl. Phys. 7 July 2020; 128 (1): 013105. https://doi.org/10.1063/5.0012279
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