Unannealed neutron transmutation doped silicon substrates with a target resistivity of approximately are characterized for radiation induced defects by means of microwave detected photoinduced current transient spectroscopy (MD-PICTS). This technique is a contactless advancement of conventional PICTS and does not require the fabrication of ohmic contacts. Defect spectroscopy by means of MD-PICTS is conducted in a broad temperature range between 30 K and 293 K, which makes it possible to identify energetically shallow as well as deep traps. In addition, a wavelength dependent analysis is performed to determine whether a defect is located at the surface or in the bulk material. Three traps with an average activation energy of , , and are observed. In addition, an indication for deep defect states with activation energies between and is found. According to the wavelength dependent analysis, it is assumed that all observed traps are bulk defects. Finally, a minority carrier lifetime of approximately 0.7 μs is determined, suggesting that the crystal is heavily damaged by neutron radiation.
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21 January 2020
Research Article|
January 17 2020
Defect characterization of unannealed neutron transmutation doped silicon by means of deep temperature microwave detected photo induced current transient spectroscopy
Special Collection:
Defects in Semiconductors 2020
C. R. Engst
;
C. R. Engst
1
Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT)
, Hansastrasse 27d, 80686 Munich, Germany
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I. Eisele;
I. Eisele
a)
1
Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT)
, Hansastrasse 27d, 80686 Munich, Germany
2
Institute of Physics, Universität der Bundeswehr München
, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany
a)Author to whom correspondence should be addressed: ignaz.eisele@emft.fraunhofer.de
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C. Kutter
C. Kutter
1
Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT)
, Hansastrasse 27d, 80686 Munich, Germany
2
Institute of Physics, Universität der Bundeswehr München
, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany
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a)Author to whom correspondence should be addressed: ignaz.eisele@emft.fraunhofer.de
Note: This paper is part of the Special Topic on Defects in Semiconductors 2020.
J. Appl. Phys. 127, 035704 (2020)
Article history
Received:
October 31 2019
Accepted:
January 01 2020
Citation
C. R. Engst, I. Eisele, C. Kutter; Defect characterization of unannealed neutron transmutation doped silicon by means of deep temperature microwave detected photo induced current transient spectroscopy. J. Appl. Phys. 21 January 2020; 127 (3): 035704. https://doi.org/10.1063/1.5134663
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