Bipolar high power impulse magnetron sputtering (HiPIMS) with a yttrium target is investigated with the help of time-resolved diagnostics. The bipolar HiPIMS discharge is operated with a negative pulse with a width of , which is immediately followed by a positive pulse (pulse voltage up to +60 V) with a duration of . The time-resolved floating potential first rises to a large positive voltage of at the beginning of the positive pulse (+60 V) and after drops to . It indicates the ignition of a reversed discharge. Further evidence of such a reversed discharge is confirmed by time-resolved mass spectrometry and time-resolved optical emission spectroscopy.
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Research Article| May 27 2020
Time-resolved diagnostics of a bipolar HiPIMS discharge
Rainer Hippler ;
Martin Cada ;
Rainer Hippler, Martin Cada, Zdenek Hubicka; Time-resolved diagnostics of a bipolar HiPIMS discharge. J. Appl. Phys. 29 May 2020; 127 (20): 203303. https://doi.org/10.1063/5.0006425
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