The formation process of hexagonal boron nitride (hBN) monolayer sheets on single-crystalline ZrB2(0001) thin films grown on Si(111) wafers has been investigated by electron diffraction, scanning tunneling microscopy, and photoelectron spectroscopy. A two-step reaction was identified, resulting first in the formation of a silicon nitride layer by room temperature exposure of the silicene-terminated ZrB2 thin film surface to nitrogen radicals and then in the formation of an hBN monolayer replacing the silicon nitride layer through annealing at 900 °C. A large-scale moiré pattern and a clear dispersion of the π-electronic band provide evidence for the formation of an epitaxial hBN monolayer sheet directly on the diboride surface. The unique ability of the ZrB2(0001) surface, upon which both silicene and hBN monolayers can be formed, opens a way toward the integration of these two very different two-dimensional materials.
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7 October 2019
Research Article|
October 04 2019
Formation of hBN monolayers through nitridation of epitaxial silicene on diboride thin films
K. Aoyagi;
K. Aoyagi
a)
1
School of Materials Science, Japan Advanced Institute of Science and Technology
, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
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F. B. Wiggers
;
F. B. Wiggers
b)
2
MESA+ Institute for Nanotechnology, University of Twente
, 7500 AE Enschede, The Netherlands
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R. Friedlein;
R. Friedlein
c)
1
School of Materials Science, Japan Advanced Institute of Science and Technology
, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
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F. Gimbert;
F. Gimbert
d)
1
School of Materials Science, Japan Advanced Institute of Science and Technology
, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
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A. Fleurence
;
A. Fleurence
1
School of Materials Science, Japan Advanced Institute of Science and Technology
, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
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T. Ozaki;
T. Ozaki
3
The Institute for Solid State Physics, The University of Tokyo
, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8581, Japan
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Y. Yamada-Takamura
Y. Yamada-Takamura
e)
1
School of Materials Science, Japan Advanced Institute of Science and Technology
, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
e)Author to whom correspondence should be addressed: [email protected]
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e)Author to whom correspondence should be addressed: [email protected]
a)
Present address: Siemens Healthcare K.K., 1-11-1 Osaki, Shinagawa-ku, Tokyo 141-8644, Japan.
b)
Present address: ASML Netherlands B.V., De Run 6501, 5504 DR Veldhoven, The Netherlands.
c)
Present address: Meyer Burger (Germany) AG, 09337 Hohenstein-Ernstthal, Germany.
d)
Present address: Nissan ARC Ltd., 1 Natsushima-cho, Yokosuka, Kanagawa 237-0061, Japan.
J. Appl. Phys. 126, 135305 (2019)
Article history
Received:
July 17 2019
Accepted:
September 22 2019
Citation
K. Aoyagi, F. B. Wiggers, R. Friedlein, F. Gimbert, A. Fleurence, T. Ozaki, Y. Yamada-Takamura; Formation of hBN monolayers through nitridation of epitaxial silicene on diboride thin films. J. Appl. Phys. 7 October 2019; 126 (13): 135305. https://doi.org/10.1063/1.5120295
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