Stoichiometric gallium oxide sulfide Ga2(O1 − xSx)3 thin-film alloys were synthesized by pulsed-laser deposition with x ≤ 0.35. All deposited Ga2(O1 − xSx)3 films were found to be amorphous. Despite the amorphous structure, the films have a well-defined, room-temperature optical bandgap tunable from 5.0 eV down to 3.0 eV. The optical absorption data are interpreted using a modified valence-band anticrossing model that is applicable for highly mismatched alloys. The model provides a quantitative method to more accurately determine the bandgap as well as an insight into how the band edges are changing with composition. The observed large reduction in energy bandgap with a small sulfur ratio arises from the anticrossing interaction between the valence band of Ga2O3 and the localized sulfur level at 1.0 eV above the Ga2O3 valence-band maximum.
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