High-density and large-volume atmospheric pressure plasma can be extended remotely by placing a long floating wire inside an Ar-gas flowing quartz tube connected with an inductively coupled coil. The discharge quartz tubes were categorized into three I-shaped tubes and one L-shaped tube. The influence of the geometrical design on plasma properties was investigated. Using the floating wire-assisted L tube, an electron density of 1014 cm−3 and a gas temperature less than 850 K were obtained at the downstream remote region. That is where the Ar plasma plume blew out from the slit at the bottom of the floating wire-assisted L tube at a distance of 140 mm from the coil center, when 100 W of a very high-frequency power (100 MHz) was applied to the inductively coupled coil. The applicability of this new L-type plasma source for large-area glass etching with a high etch rate was explored. At the remote region where the Ar plasma plume blew out of the slit of the L tube, SF6 gas was added for etching a quartz glass plate. Glass etching could be obtained over a large area of 15 mm × 20 mm with a maximum etch rate of 2 μm/min and a volume etch rate of 0.3 mm3/min.
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14 February 2019
Research Article|
February 13 2019
Remotely floating wire-assisted generation of high-density atmospheric pressure plasma and SF6-added plasma etching of quartz glass
Thi-Thuy-Nga Nguyen
;
Thi-Thuy-Nga Nguyen
a)
1
Nagoya University
, Nagoya 464-8603, Japan
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Minoru Sasaki;
Minoru Sasaki
2
Toyota Technological Institute
, Nagoya 468-8511, Japan
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Hidefumi Odaka;
Hidefumi Odaka
3
AGC Inc.
, Yokohama 230-0045, Japan
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Takayoshi Tsutsumi;
Takayoshi Tsutsumi
1
Nagoya University
, Nagoya 464-8603, Japan
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Kenji Ishikawa
;
Kenji Ishikawa
1
Nagoya University
, Nagoya 464-8603, Japan
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Masaru Hori
Masaru Hori
1
Nagoya University
, Nagoya 464-8603, Japan
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J. Appl. Phys. 125, 063304 (2019)
Article history
Received:
November 17 2018
Accepted:
January 29 2019
Citation
Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori; Remotely floating wire-assisted generation of high-density atmospheric pressure plasma and SF6-added plasma etching of quartz glass. J. Appl. Phys. 14 February 2019; 125 (6): 063304. https://doi.org/10.1063/1.5081875
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