The fabrication of nanostructures of vanadium dioxide ()-based films with critical dimensions down to 100 nm and the characterization of their phase transformation properties are presented. Starting materials are and films that are deposited by magnetron sputtering. For nanofabrication, two top-down processes are investigated, in which the substrate is nanomachined either before or after film deposition. Electrical resistance measurements on bridge nanostructures exhibit a semiconductor–metal transition similar to reference films. A detailed analysis of phase transition temperatures does not reveal any significant width-dependence as it may be expected when approaching the grain size of 100 nm. The absolute electrical resistance in the semiconducting state scales inversely proportional to the width reflecting homogeneous material characteristics. Yet, the resistance change at the semiconductor–metal transition tends to increase for decreasing width indicating reduced carrier scattering as the absolute number of grain boundaries decreases.
REFERENCES
1.
B. C.
Wu
, H.
Wei
, B.
Ning
, and Y.
Xie
, “New vanadium oxide nanostructures: Controlled synthesis and their smart electrical switching properties
,” Adv. Mater.
22
, 1972
–1976
(2010
). 2.
M.
Marezio
, “Structural aspects of the metal-insulator transitions in Cr-doped
,” Phys. Rev. B
5
, 2541
–2551
(1971
). 3.
J.
Cao
, E.
Ertekin
, V.
Srinivasan
, W.
Fan
, S.
Huang
, H.
Zheng
, J. W. L.
Yim
, D. R.
Khanal
, D. F.
Ogletree
, J. C.
Grossman
, and J.
Wu
, “Strain engineering and one-dimensional organization of metal–insulator domains in single-crystal vanadium dioxide beams
,” Nat. Nanotechnol.
4
, 732
–737
(2009
). 4.
N.
Inomata
, L.
Pan
, M.
Toda
, and T.
Ono
, “Microfabricated vanadium oxide resonant thermal sensor with a high temperature coefficient of resonant frequency,” in 2016 IEEE 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
(IEEE, 2016), pp. 1042–1045.5.
R.
Cabrera
, E.
Merced
, and N.
Sepulveda
, “Performance of electro-thermally driven -based MEMS actuators
,” J. Microelectromech. Syst.
23
, 243
–251
(2014
). 6.
T. J.
Hanlon
, J. A.
Coath
, and M. A.
Richardson
, “Molybdenum-doped vanadium dioxide coatings on glass produced by the aqueous sol-gel method
,” Thin Solid Films
436
, 269
–272
(2003
). 7.
A.
Lai
, Z.
Du
, C. L.
Gan
, and C. A.
Schuh
, “Shape memory and superelastic ceramics at small scales
,” Science
341
, 1505
–1508
(2013
). 8.
B. S.
Guiton
, Q.
Gu
, A. L.
Prieto
, M. S.
Gudiksen
, and H.
Park
, “Single-crystalline vanadium dioxide nanowires with rectangular cross sections
,” J. Am. Chem. Soc.
127
, 498
–499
(2005
). 9.
A.
Tselev
, E.
Strelcov
, I. A.
Luk’yanchuk
, J. D.
Budai
, J. Z.
Tischler
, I. N.
Ivanov
, K.
Jones
, R.
Proksch
, S. V.
Kalinin
, and A.
Kolmakov
, “Interplay between ferroelastic and metal-insulator phase transitions in strained quasi-two-dimensional nanoplatelets
,” Nano Lett.
10
, 2003
–2011
(2010
). 10.
S.
Lee
, K.
Hippalgaonkar
, F.
Yang
, J.
Hong
, C.
Ko
, J.
Suh
, K.
Liu
, K.
Wang
, J. J.
Urban
, X.
Zhang
, C.
Dames
, S. A.
Hartnoll
, O.
Delaire
, and J.
Wu
, “Anomalously low electronic thermal conductivity in metallic vanadium dioxide
,” Science
355
, 371
–374
(2017
). 11.
H.
Guo
, M. I.
Khan
, C.
Cheng
, W.
Fan
, C.
Dames
, J.
Wu
, and A. M.
Minor
, “Vanadium dioxide nanowire-based micro thermometer for quantitative evaluation of electron beam heating
,” Nat. Commun.
5
, 4986
(2014
). 12.
K.
Liu
, C.
Cheng
, Z.
Cheng
, K.
Wang
, R.
Ramesh
, and J.
Wu
, “Giant-amplitude, high-work density microactuators with phase transition activated nanolayer bimorphs
,” Nano Lett.
12
, 6302
–6308
(2012
). 13.
W.
Xiao
, Y. A. N.
Lu
, L. I.
Ying
, and C. A. O.
Yun-Zhen
, “Sputtering deposition of film using plasma emission monitor as reactive gas flow rate feedback control
,” J. Inorg. Mater.
30
, 1228
–1232
(2015
). 14.
C.
Lay
, I.
Aseguinolaza
, V.
Chernenko
, and M.
Kohl
, “In-situ characterization of ferromagnetic shape memory alloy/silicon bimorph nanoactuators,” in 14th IEEE International Conference on Nanotechnology
(IEEE, 2014), pp. 192–195. 15.
F. J.
Morin
, “Oxides which show a metal-to-insulator transition at the Neel temperature
,” Phys. Rev. Lett.
29
, 1361
–1362
(1972
). 16.
J. B.
Goodenough
, “The two components of the crystallographic transition in
,” J. Solid State Chem.
3
, 490
–500
(1971
). 17.
P.
Jin
, K.
Yoshimura
, and S.
Tanemura
, “Dependence of microstructure and thermochromism on substrate temperature for sputter-deposited epitaxial films
,” J. Vac. Sci. Technol. A
15
, 1113
–1117
(1997
). 18.
L. A.
Ladd
and W.
Paul
, “Optical and transport properties of high quality crystals of near the metallic transition temperature
,” Solid State Commun.
7
, 425
–428
(1969
). 19.
Y.
Zhao
, J. H.
Lee
, Y.
Zhu
, C.
Nazari
, M.
Chen
, A.
Wang
, H.
Bernussi
, M.
Holtz
, and Z.
Fan
, “Structural, electrical, and terahertz transmission properties of thin films grown on c-, r-, and m-plane sapphire substrates
,” J. Appl. Phys.
111
, 053533
(2012
). 20.
K.
Okimura
and N.
Kubo
, “Preparation of films with metal-insulator transition on sapphire and silicon substrates by inductively coupled plasma-assisted sputtering
,” Jpn. J. Appl. Phys.
44
, 1150
–1153
(2005
). 21.
D.
Ruzmetov
, K. T.
Zawilski
, V.
Narayanamurti
, and S.
Ramanathan
, “Structure-functional property relationships in RF-sputtered vanadium dioxide thin films
,” J. Appl. Phys.
102
, 113715
(2007
). 22.
X.
Tan
, T.
Yao
, R.
Long
, Z.
Sun
, Y.
Feng
, H.
Cheng
, X.
Yuan
, W.
Zhang
, Q.
Liu
, C.
Wu
, Y.
Xie
, and S.
Wei
, “Unraveling metal-insulator transition mechanism of triggered by tungsten doping
,” Sci. Rep.
2
, 466
(2012
). 23.
S.-J.
Liu
, H.-W.
Fang
, Y.-T.
Su
, and J.-H.
Hsieh
, “Metal–insulator transition characteristics of Mo- and Mn-doped films fabricated by magnetron cosputtering technique
,” Jpn. J. Appl. Phys.
53
, 063201
(2014
). 24.
R.
Lopez
, T. E.
Haynes
, L. A.
Boatner
, L. C.
Feldman
, and R. F.
Haglund
, “Size effects in the structural phase transition of nanoparticles
,” Phys. Rev. B
65
, 224113
(2002
). 25.
J.
Du
, Y.
Gao
, H.
Luo
, L.
Kang
, Z.
Zhang
, Z.
Chen
, and C.
Cao
, “Significant changes in phase-transition hysteresis for Ti-doped films prepared by polymer-assisted deposition
,” Solar Energy Mater. Solar Cells
95
, 469
–475
(2011
). 26.
S.
Zhou
, Y.
Li
, H.
Zhu
, R.
Sun
, Y.
Zhang
, Y.
Huang
, L.
Li
, Y.
Shen
, Q.
Zhen
, G.
Tong
, and B.
Fang
, “Microstructures and thermochromic characteristics of low-cost vanadium-tungsten co-sputtered thin films
,” Surf. Coatings Technol.
206
, 2922
–2926
(2012
). 27.
J.
Cao
, Y.
Gu
, W.
Fan
, L.
Chen
, D.
Ogletree
, K.
Chen
, N.
Tamura
, M.
Kunz
, C.
Barrett
, J.
Seidel
, and J.
Wu
, “Extended mapping and exploration of the vanadium dioxide stress-temperature phase diagram
,” Nano Lett.
10
, 2667
–2673
(2010
). 28.
J.
Kim
, C.
Ko
, A.
Frenzel
, S.
Ramanathan
, and J. E.
Hoffman
, “Nanoscale imaging and control of resistance switching in at room temperature
,” Appl. Phys. Lett.
96
, 213106
(2010
). 29.
J. F.
De Natale
, P. J.
Hood
, and A. B.
Harker
, “Formation and characterization of grain-oriented thin films
,” J. Appl. Phys.
66
, 5844
–5850
(1989
). © 2019 Author(s).
2019
Author(s)
You do not currently have access to this content.
