Mechanical resonators are excellent transducers for ultrasensitive detection applications. Recent advances such as vectorial force sensing and ultrahigh-resolution mass spectra rely on the identification of two flexural vibrational modes of a resonator. The orientations of the flexural modes with respect to the incident optical axis are crucial parameters for a cantilevered resonator. Previous methods have adopted complex experimental setups using quadrant photodetectors or have required simultaneous detection of two flexural modes of the cantilever. In this paper, we propose a method for determination of the orientations of the flexural vibrations of a cantilever using a microlens optical fiber interferometer that takes both the light interference and the lateral light scattering of the cantilever into account. We demonstrated the method by experimentally determining the orientation of the first three flexural vibrational modes of a thermally driven microwire. Our method can be used to characterize individual flexural modes with arbitrary orientations and thus provides a new tool for detecting vectorial forces.
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21 April 2019
Research Article|
April 16 2019
Determining the orientation of the flexural modes of a thermally driven microwire cantilever
Chenghua Fu
;
Chenghua Fu
1
Anhui Province Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory, Chinese Academy of Sciences
, Hefei 230031, People’s Republic of China
2
Department of Physics, University of Science and Technology of China
, Hefei 230026, People’s Republic of China
3
Collaborative Innovation Center of Advanced Microstructures, Nanjing University
, Nanjing 210093, People’s Republic of China
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Wen Deng;
Wen Deng
1
Anhui Province Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory, Chinese Academy of Sciences
, Hefei 230031, People’s Republic of China
2
Department of Physics, University of Science and Technology of China
, Hefei 230026, People’s Republic of China
3
Collaborative Innovation Center of Advanced Microstructures, Nanjing University
, Nanjing 210093, People’s Republic of China
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Lvkuan Zou
;
Lvkuan Zou
a)
1
Anhui Province Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory, Chinese Academy of Sciences
, Hefei 230031, People’s Republic of China
3
Collaborative Innovation Center of Advanced Microstructures, Nanjing University
, Nanjing 210093, People’s Republic of China
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Wanli Zhu
;
Wanli Zhu
1
Anhui Province Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory, Chinese Academy of Sciences
, Hefei 230031, People’s Republic of China
2
Department of Physics, University of Science and Technology of China
, Hefei 230026, People’s Republic of China
3
Collaborative Innovation Center of Advanced Microstructures, Nanjing University
, Nanjing 210093, People’s Republic of China
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Feng Xu;
Feng Xu
1
Anhui Province Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory, Chinese Academy of Sciences
, Hefei 230031, People’s Republic of China
2
Department of Physics, University of Science and Technology of China
, Hefei 230026, People’s Republic of China
3
Collaborative Innovation Center of Advanced Microstructures, Nanjing University
, Nanjing 210093, People’s Republic of China
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Ning Wang;
Ning Wang
1
Anhui Province Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory, Chinese Academy of Sciences
, Hefei 230031, People’s Republic of China
3
Collaborative Innovation Center of Advanced Microstructures, Nanjing University
, Nanjing 210093, People’s Republic of China
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Fei Xue
Fei Xue
b)
1
Anhui Province Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory, Chinese Academy of Sciences
, Hefei 230031, People’s Republic of China
3
Collaborative Innovation Center of Advanced Microstructures, Nanjing University
, Nanjing 210093, People’s Republic of China
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a)
Electronic mail: zoulvkuan@hmfl.ac.cn
b)
Electronic mail: xuef@hmfl.ac.cn
J. Appl. Phys. 125, 154302 (2019)
Article history
Received:
July 10 2018
Accepted:
March 28 2019
Citation
Chenghua Fu, Wen Deng, Lvkuan Zou, Wanli Zhu, Feng Xu, Ning Wang, Fei Xue; Determining the orientation of the flexural modes of a thermally driven microwire cantilever. J. Appl. Phys. 21 April 2019; 125 (15): 154302. https://doi.org/10.1063/1.5047932
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