The effects of oxygen-inserted (OI) layers on the diffusion of boron (B), phosphorus (P), and arsenic (As) in silicon (Si) are investigated, for ultra-shallow junction formation by high-dose ion implantation followed by rapid thermal annealing. The projected range (Rp) of the implanted dopants is shallower than the depth of the OI layers. Secondary ion mass spectrometry is used to compare the dopant profiles in silicon samples that have OI layers against the dopant profiles in control samples that do not have OI layers. Diffusion is found to be substantially retarded by the OI layers for B and P, and less for As, providing shallower junction depth. The experimental results suggest that the OI layers serve to block the diffusion of Si self-interstitials and thereby effectively reduce interstitial-aided diffusion beyond the depth of the OI layers. The OI layers also help to retain more dopants within the Si, which technology computer-aided design simulations indicate to be beneficial for achieving shallower junctions with lower sheet resistance to enable further miniaturization of planar metal-oxide-semiconductor field-effect transistors for improved integrated-circuit performance and cost per function.
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28 March 2018
Research Article|
March 29 2018
Effects of oxygen-inserted layers on diffusion of boron, phosphorus, and arsenic in silicon for ultra-shallow junction formation
X. Zhang
;
X. Zhang
a)
1
Department of Electrical Engineering and Computer Sciences, University of California
, Berkeley, California 94720, USA
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D. Connelly;
D. Connelly
1
Department of Electrical Engineering and Computer Sciences, University of California
, Berkeley, California 94720, USA
2
Atomera, Inc.
, Los Gatos, California 95035, USA
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H. Takeuchi;
H. Takeuchi
2
Atomera, Inc.
, Los Gatos, California 95035, USA
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M. Hytha;
M. Hytha
2
Atomera, Inc.
, Los Gatos, California 95035, USA
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R. J. Mears;
R. J. Mears
2
Atomera, Inc.
, Los Gatos, California 95035, USA
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L. M. Rubin
;
L. M. Rubin
3
Axcelis Technologies, Inc.
, Beverly, Massachusetts 01915, USA
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T.-J. K. Liu
T.-J. K. Liu
1
Department of Electrical Engineering and Computer Sciences, University of California
, Berkeley, California 94720, USA
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a)
Electronic mail: xi.zhang@berkeley.edu
J. Appl. Phys. 123, 125704 (2018)
Article history
Received:
January 10 2018
Accepted:
March 15 2018
Citation
X. Zhang, D. Connelly, H. Takeuchi, M. Hytha, R. J. Mears, L. M. Rubin, T.-J. K. Liu; Effects of oxygen-inserted layers on diffusion of boron, phosphorus, and arsenic in silicon for ultra-shallow junction formation. J. Appl. Phys. 28 March 2018; 123 (12): 125704. https://doi.org/10.1063/1.5022078
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