We investigated the dark current components of thin planar InGaAs photodiodes grown by metalorganic vapor-phase epitaxy for optical nano-resonators. Owing to their high electric field enhancement, nano-resonators make it possible to substantially reduce the thickness of the active region to about 100 nm all the while maintaining high quantum efficiency. In the present study, to cover a broad spectral band, we combined several resonance peaks induced by guided-mode resonances in a given spectral range. This type of geometry allowed us to introduce InAlAs at the edge of a thin InGaAs active region in order to drastically reduce both the diffusion current and the generation/recombination current. We found that, in such devices, tunneling dark current components increase as the thickness of the active layer is reduced and dominate the reverse dark current. By optimizing the epitaxial stack, while keeping its total thickness constant (the optical properties of the nano-resonator remained unchanged), we showed that we are already able to achieve a specific detectivity of up to for .
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