Vacancy-type defects in Al0.1Ga0.9N were probed using a monoenergetic positron beam. Al0.1Ga0.9N layers with different carbon doping concentrations ([C] = 5 × 1017−8 × 1019 cm−3) were grown on Si substrates by metalorganic vapor phase epitaxy. The major defect species in Al0.1Ga0.9N was determined to be a cation vacancy (or cation vacancies) coupled with nitrogen vacancies and/or with carbon atoms at nitrogen sites (CNs). The charge state of the vacancies was positive because of the electron transfer from the defects to CN-related acceptors. The defect charge state was changed from positive to neutral when the sample was illuminated with photon energy above 1.8 eV, and this energy range agreed with the yellow and blue luminescence. For the sample with high [C], the charge transition of the vacancies under illumination was found to be suppressed, which was attributed to the trapping of emitted electrons by CN-related acceptors. With increasing [C], the breakdown voltage under the reverse bias condition increased. This was explained by the trapping of the injected electrons by the positively charged vacancies and CN-related acceptors.
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7 December 2016
Research Article|
December 02 2016
Probing the effect of point defects on the leakage blocking capability of Al0.1Ga0.9N/Si structures using a monoenergetic positron beam Available to Purchase
Akira Uedono
;
Akira Uedono
1Division of Applied Physics, Faculty of Pure and Applied Science,
University of Tsukuba
, Tsukuba, Ibaraki 305-8573, Japan
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Ming Zhao;
Ming Zhao
2
Imec
, Kapeldreef 75, B-3001 Heverlee, Leuven, Belgium
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Eddy Simoen
Eddy Simoen
2
Imec
, Kapeldreef 75, B-3001 Heverlee, Leuven, Belgium
3Department of Solid-State Sciences,
Ghent University
, Krijgslaan 281 S1, 9000 Gent, Belgium
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1Division of Applied Physics, Faculty of Pure and Applied Science,
University of Tsukuba
, Tsukuba, Ibaraki 305-8573, Japan
2
Imec
, Kapeldreef 75, B-3001 Heverlee, Leuven, Belgium
3Department of Solid-State Sciences,
Ghent University
, Krijgslaan 281 S1, 9000 Gent, Belgium
J. Appl. Phys. 120, 215702 (2016)
Article history
Received:
September 17 2016
Accepted:
November 16 2016
Citation
Akira Uedono, Ming Zhao, Eddy Simoen; Probing the effect of point defects on the leakage blocking capability of Al0.1Ga0.9N/Si structures using a monoenergetic positron beam. J. Appl. Phys. 7 December 2016; 120 (21): 215702. https://doi.org/10.1063/1.4970984
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