We investigated the effect of Sn doping on the optical, electrical, and magneto transport properties of epitaxial α-Ga2O3 thin films grown by mist-Chemical Vapour Deposition. Sn introduces a shallow donor level at ∼0.1 eV and has a high solubility allowing doping up to 1020 cm−3. The lowest obtained resistivity of the films is 2.0 × 10−1 Ω cm. The Sn doped films with a direct band gap of 5.1 eV remain transparent in the visible and UV range. The electrical conduction mechanism and magneto-transport have been investigated for carrier concentrations below and above the insulator-metal transition. The magnetic properties of the neutral Sn donor and the conduction electrons have been studied by electron spin resonance spectroscopy. A spin S = 1/2 state and C3V point symmetry of the neutral Sn donor is found to be in good agreement with the model of a simple SnGa center.
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14 July 2016
Research Article|
July 14 2016
Electrical, optical, and magnetic properties of Sn doped α-Ga2O3 thin films
E. Chikoidze;
E. Chikoidze
a)
1Groupe d'Etude de la Matière Condensée (GEMaC),
Université de Versailles Saint Quentin–CNRS, Université Paris-Saclay
, 45Av. des Etats-Unis, 78035 Versailles Cedex, France
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H. J. von Bardeleben
;
H. J. von Bardeleben
2
Sorbonne Universités, UPMC Université Paris 6
, Institut des Nanosciences de Paris, CNRS, 4, place Jussieu, 75005 Paris, France
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K. Akaiwa;
K. Akaiwa
3Department of Electronic Science and Engineering,
Kyoto University
, Kyoto 615-8510, Japan
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E. Shigematsu;
E. Shigematsu
3Department of Electronic Science and Engineering,
Kyoto University
, Kyoto 615-8510, Japan
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K. Kaneko;
K. Kaneko
3Department of Electronic Science and Engineering,
Kyoto University
, Kyoto 615-8510, Japan
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S. Fujita;
S. Fujita
3Department of Electronic Science and Engineering,
Kyoto University
, Kyoto 615-8510, Japan
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Y. Dumont
Y. Dumont
1Groupe d'Etude de la Matière Condensée (GEMaC),
Université de Versailles Saint Quentin–CNRS, Université Paris-Saclay
, 45Av. des Etats-Unis, 78035 Versailles Cedex, France
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a)
Author to whom correspondence should be addressed. Electronic mail: ekaterine.chikoidze@uvsq.fr
J. Appl. Phys. 120, 025109 (2016)
Article history
Received:
March 25 2016
Accepted:
July 03 2016
Citation
E. Chikoidze, H. J. von Bardeleben, K. Akaiwa, E. Shigematsu, K. Kaneko, S. Fujita, Y. Dumont; Electrical, optical, and magnetic properties of Sn doped α-Ga2O3 thin films. J. Appl. Phys. 14 July 2016; 120 (2): 025109. https://doi.org/10.1063/1.4958860
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