We present the conduction mechanisms of Ba2/3Sr1/3TiO3 thin films integrated in metal-insulator-metal (MIM) capacitors and the modelling of the frequency-dependent electrostrictive resonances (in the 100 MHz–10 GHz domain) induced in the devices upon applying different voltage biases. Au/BST/Ir MIM structures on MgO substrates have been fabricated and, depending on their specific polarization, we highlighted different conduction mechanisms in the devices. Depending on the dc bias polarity, the conduction current across the material shows a space-charge-limited-current behavior under negative polarization, whereas under positive bias, the conduction obeys an electrode-limited Schottky-type law at the Au/BST interface. The application of an electric field on the device induces the onset of acoustic resonances related to electrostrictive phenomena in the ferroelectric material. We modeled these acoustic resonances over a wide frequency range, by using a modified Lakin model, which takes into account the dispersions of acoustic properties near the lower electrode/thin film interface.

1.
S.
Courrèges
,
B.
Lacroix
,
A.
Amadjikpe
,
S.
Phillips
,
Z.
Zhao
,
K.
Choi
,
A.
Hunt
, and
J.
Papapolymerou
, “
Back-to-back tunable ferroelectric resonator filters on flexible organic substrates
,”
IEEE Trans. Ultrason. Ferroelectr. Freq. Control
57
,
1267
(
2010
).
2.
R.
De Paolis
,
S.
Payan
,
M.
Maglione
,
G.
Guegan
, and
F.
Coccetti
, “
High-tunability and high- q -factor integrated ferroelectric circuits up to millimeter waves
,”
IEEE Trans. Microwave Theory Tech.
63
,
2570
(
2015
).
3.
T.
Kimura
,
H.
Kobayashi
,
Y.
Kishimoto
,
H.
Kato
,
M.
Inaba
,
K.-Y.
Hashimoto
,
T.
Matsumura
,
H.
Hirano
,
M.
Kadota
,
M.
Esashi
, and
S.
Tanaka
, “
Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 varactors directly fabricated on a LiTaO3 wafer
,” in
IEEE International Ultrasonics Symposium (IUS)
(
2014
).
4.
I.
Vendik
,
V.
Pleskachev
,
E.
Zameshaeva
,
P.
Turalchuk
,
D.
Kholodnyak
,
I.
Kolmakova
,
S.
Zubko
,
I.
Munina
,
V.
Turgaliev
,
M.
Sitnikova
,
M.
Odit
,
X.
Wang
,
N.
Li
,
L.
Sun
, and
Y.
He
, in
Proceedings of the 43rd European Microwave Conference
(
2013
).
5.
G.
Subramanyam
,
M.-W.
Cole
,
N.-X.
Sun
,
T.-S.
Kalkur
,
N.-M.
Sbrockey
,
G.-S.
Tompa
,
X.
Guo
,
C.
Chen
,
S.-P.
Alpay
,
G.-A.
Rossetti
, Jr.
,
K.
Dayal
,
L.-Q.
Chen
, and
D.-G.
Schlom
, “
Challenges and opportunities for multi-functional oxide thin films for voltage tunable radio frequency/microwave components
,”
J. Appl. Phys.
114
,
191301
(
2013
).
6.
H.
Khassaf
,
N.
Khakpash
,
F.
Sun
,
N.-M.
Sbrockey
,
G.-S.
Tompa
,
T.-S.
Kalkur
, and
S.-P.
Alpay
, “
Strain engineered barium strontium titanate for tunable thin film resonators
,”
Appl. Phys. Lett.
104
,
202902
(
2014
).
7.
N.-M.
Sbrockey
,
T.-S.
Kalkur
,
A.
Mansour
,
H.
Khassaf
,
H.
Yu
,
M.
Aindow
,
S.-P.
Alpay
, and
G.-S.
Tompa
, “
Switchable and tunable film bulk acoustic resonator fabricated using barium strontium titanate active layer and Ta2O5/SiO2 acoustic reflector
,”
Appl. Phys. Lett.
109
,
052902
(
2016
).
8.
A.
Ghalem
,
M.
Rammal
,
L.
Huitema
,
A.
Crunteanu
,
V.
Madrangeas
,
P.
Dutheil
,
F.
Dumas Bouchiat
,
P.
Marchet
,
C.
Champeaux
,
L.
Trupina
,
L.
Nedelcu
, and
M. G.
Banciu
, “
Ultra-High tunability of Ba(2/3)Sr(1/3)TiO3-based capacitors under low electric fields
,”
IEEE Microwave Wireless Compon. Lett.
26
,
504
506
(
2016
).
9.
H. S.
Kim
,
H. G.
Kim
,
I. D.
Kim
,
K. B.
Kim
, and
J. C.
Lee
, “
High tunability and low-microwave-loss Ba0.6Sr0.4TiO3 thin films grown on high-resistivity Si substrates using TiO2 buffer layers
,”
Appl. Phys. Lett.
87
,
212903
(
2005
).
10.
C. L.
Chen
,
H. H.
Feng
,
Z.
Zhang
,
A.
Brazdeikis
,
Z. J.
Huang
,
W. K.
Chu
,
C. W.
Chu
,
F. A.
Miranda
,
F. W.
Van Keuls
,
R. R.
Romanofsky
, and
Y.
Liou
, “
Epitaxial ferroelectric Ba0.5Sr0.5TiO3 thin films for room-temperature tunable element applications
,”
Appl. Phys. Lett.
75
(
3
),
412
414
(
1999
).
11.
D. A.
Boyd
,
S. G.
Hirsch
,
C.
Hubbard
, and
M. W.
Cole
, “
BST films grown by metal organic chemical vapor deposition incorporating real-time control of stoichiometry
,”
Integr. Ferroelectr.
111
(
1
),
17
26
(
2009
).
12.
D.
Levasseur
,
H.-B.
El-Shaarawi
,
S.
Pacchioni
,
A.
Rousseau
,
S.
Payan
,
G.
Guegan
, and
M.
Maglione
, “
Systematic investigation of the annealing temperature and composition effects on the dielectric properties of sol–gel BaxSr1xTiO3 thin films
,”
J. Eur. Ceram. Soc.
33
,
139
146
(
2013
).
13.
W.-Y.
Hsu
,
J.-D.
Luttmer
,
R.
Tsu
,
S.
Summerfelt
,
M.
Bedekar
,
T.
Tokumoto
, and
J.
Nulman
, “
Direct current conduction properties of sputtered Pt/(Ba0.7Sr0.3)TiO3/Pt thin films capacitors
,”
Appl. Phys. Lett.
66
,
2975
(
1995
).
14.
C.-S.
Hwang
,
B.-T.
Lee
,
C.-S.
Kang
,
J.-W.
Kim
,
K.-H.
Lee
,
H.-J.
Cho
,
H.
Horii
,
W.-D.
Kim
,
S.-I.
Lee
,
Y.-B.
Roh
, and
M.-Y.
Lee
, “
A comparative study on the electrical conduction mechanisms of (Ba0.5Sr0.5)TiO3 thin films on Pt and IrO2 electrodes
,”
J. Appl. Phys.
83
,
3703
(
1998
).
15.
T.
Kawakubo
,
S.
Komatsu
,
K.
Abe
,
K.
Sano
,
N.
Yanase
, and
N.
Fukushima
, “
Ferroelectric properties of SrRuO3/(Ba, Sr)TiO3/SrRuO3 epitaxial capacitor
,”
Jpn. J. Appl. Phys., Part 1
37
,
5108
(
1998
).
16.
A.
Srivastava
,
D.
Kumar
, and
R. K.
Singh
, “
LaNiO3 as contact material for (Ba, Sr)TiO3 dielectric thin films
,”
Electrochem. Solid-State Lett.
2
,
294
296
(
1999
).
17.
C-M.
Chu
and
P.
Lin
, “
Electrical properties and crystal structures of (Ba,Sr)TiO3 films and BaRuO3 bottom electrodes prepared by sputtering
,”
Appl. Phys. Lett.
72
,
1241
1243
(
1998
).
18.
S.-T.
Chang
and
J.-Y.
Lee
, “
Electrical conduction mechanism in high-dielectric-constant (Ba0.5,Sr0.5)TiO3 thin films
,”
Appl. Phys. Lett.
80
,
655
(
2002
).
19.
M.-A.
Khan
,
T.-P.
Comyn
, and
A.-J.
Bell
, “
Deposition of PbTiO3 films on Pt/Si substrates using pulsed laser deposition
,”
J. Eur. Ceram. Soc.
28
,
591
(
2008
).
20.
C.-S.
Hwang
, “
Bulk- or interface-limited electrical conductions in IrO2/(Ba,Sr)TiO3/IrO2 thin film capacitors
,”
J. Mater. Res.
16
,
3476
3484
(
2001
).
21.
T.-M.
Shaw
,
Z.
Suo
,
M.
Huang
,
E.
Liniger
,
R.-B.
Laibowitz
, and
J.-D.
Baniecki
, “
The effect of stress on the dielectric properties of barium strontium titanate thin films
,”
Appl. Phys. Lett.
75
,
2129
(
1999
).
22.
S.-Y.
Wang
,
B.-L.
Cheng
,
C.
Wang
,
S.-A.
Redfern
,
S.-Y.
Dai
,
K.-J.
Jin
,
H.-B.
Lu
,
Y.-L.
Zhou
,
Z.-H.
Chen
, and
G.-Z.
Yang
, “
Influence of Ce doping on leakage current in Ba0.5Sr0.5TiO3 films
,”
J. Phys. D: Appl. Phys.
38
,
2253
2257
(
2005
).
23.
S.-H.
Paek
,
J.
Won
,
K.-S.
Lee
,
J.-S.
Choi
, and
C.-S.
Park
, “
Electrical and microstructural degradation with decreasing thickness of (Ba, Sr)TiO3 thin films deposited by RF magnetron sputtering
,”
Jpn. J. Appl. Phys., Part 1
35
,
5757
(
1996
).
24.
Y.
Wang
,
M.-K.
Niranjan
,
K.
Janicka
,
J.-P.
Velev
,
M.-Y.
Zhuravlev
,
S.-S.
Jaswa
, and
E.-Y.
Tsymbal
, “
Ferroelectric dead layer driven by a polar interface
,”
Phys. Rev. B
82
,
094114
(
2010
).
25.
N.-A.
Spaldin
, “
Fundamental size limits in ferroelectricity
,”
Science
304
,
1606
(
2004
).
26.
R.-R.
Mehta
,
B.-D.
Silverman
, and
J.-T.
Jacobs
, “
DC bias dependent shift of resonance frequencies in BST thin film membranes
,”
IEEE International Symposium on the Applications of Ferroelectrics
(
2007
), pp.
236
238
.
27.
A.
Noeth
,
T.
Yamada
,
V.
Sherman
,
P.
Muralt
,
A.
Tangantsev
, and
N.
Setter
, “
Tuning of direct current bias-induced resonances in micromachined Ba0.3Sr0.7TiO3 thin-film capacitors
,”
J. Appl. Phys.
102
,
114110
(
2007
).
28.
A.
Vorobiev
,
S.
Gevorgian
,
N.
Martirosyan
,
M.
Löffler
, and
E.
Olsson
, “
Intrinsically tunable 0.67BiFeO3-0.33BaTiO3 thin film bulk acoustic wave resonators
,”
Appl. Phys. Lett.
101
,
232903
(
2012
).
29.
S.
Gevorgian
,
A.
Vorobiev
, and
T.
Lewin
, “
DC field and temperature dependent acoustic resonances in parallel-plate capacitors based on SrTiO3 and Ba0.25Sr0.75TiO3 films: Experiment and modeling
,”
J. Appl. Phys.
99
,
124112
(
2006
).
30.
A.
Noeth
,
T.
Yamada
,
A.-K.
Tagantsev
, and
N.
Setter
, “
Electrical tuning of dc bias induced acoustic resonances in paraelectric thin films capacitors
,”
J. Appl. Phys.
104
,
094102
(
2008
).
31.
S.
Tappe
,
U.
Bottger
, and
R.
Waser
, “
Electrostrictive resonances in Ba0.7Sr0.3TiO3 thin films at microwave frequencies
,”
Appl. Phys. Lett.
85
,
624
(
2004
).
32.
W.-P.
Mason
and
B.-T.
Matthias
, “
Theoretical model for explaining the ferroelectric effect in barium titanate
,”
Phys. Rev.
74
,
1622
(
1948
).
33.
X.
Zhu
,
J. D.
Phillips
, and
A.
Mortazawi
, “
A DC voltage dependent switchable thin film bulk wave acoustic resonator using ferroelectric thin film
,”
2007 IEEE MTT-S International Microwave Symposium Digest
(
2007
), pp.
671
674
.
34.
W.-P.
Mason
, “
An electromechanical representation of a piezoelectric crystal used as a transducer
,”
Proc. Institute Radio Eng.
23
,
1252
1263
(
1935
).
35.
M.
Schreiter
,
R.
Gabl
,
D.
Pitzer
,
R.
Primig
, and
W.
Wersing
, “
Electro-acoustic hysteresis behaviour of PZT thin film bulk acoustic resonators
,”
J. Eur. Ceram. Soc.
24
,
1589
1592
(
2004
).
36.
P.-B.
Kirby
,
Q.-X.
Su
,
E.
Kornuro
,
Q.
Zhang
,
M.
Imura
, and
R.-W.
Whatmore
, “
PZT thin film bulk acoustic wave resonators and filters
,”
IEEE International Frequency Control Symposium and PDA Exhibition
(
2001
), pp.
687
694
.
37.
K.-M.
Lakin
,
G.-R.
Kline
, and
K.-T.
Carron
, “
High-Q microwave acoustic resonators and filters
,”
IEEE Trans. Microwave Theory Tech.
41
,
2139
2146
(
1993
).
38.
I.
Vendik
,
P.-A.
Turalchuk
,
O.-G.
Vendik
, and
J.
Berge
, “
Modeling tunable bulk acoustic resonators based on induced piezoelectric effect in BaTiO3 and Ba0.25Sr0.75TiO3 films
,”
J. Appl. Phys.
103
,
014107
(
2008
).
39.
A.
Vorobiev
,
J.
Berge
,
S.
Gevorgian
,
M.
Löffler
, and
E.
Olsson
, “
Effect of interface roughness on acoustic loss in tunable thin film bulk acoustic wave resonators
,”
J. Appl. Phys.
110
,
024116
(
2011
).
40.
D.
Levasseur
,
E.
Bouyssou
,
R.
De Paolis
,
A.
Rousseau
,
F.
Coccetti
,
G.
Guegan
,
S.
Payan
, and
M.
Maglione
, “
Systematic tuning of the conduction mechanisms in ferroelectric thin films
,”
J. Phys.: Condens. Matter
25
,
495901
(
2013
).
41.
B.
Ivira
,
A.
Reinhardt
,
E.
Defay
, and
M.
Aid
, “
Integration of electrostrictive Ba0.7Sr0.3TiO3 thin films into bulk acoustic wave resonator for RF-frequency tuning under DC bias
,”
IEEE International Frequency Control Symposium
(
2008
), pp.
254
258
.
42.
A.-G.
Altynnikov
,
A.-G.
Gagarin
,
M.-M.
Gaidukov
,
A.
Tumarkin
,
P.-K.
Petrov
,
N.
Alford
, and
A.-B.
Kozyrev
, “
Suppression of slow capacitance relaxation phenomenon in Pt/Ba0.3Sr0.7TiO3/Pt thin film ferroelectric structures by annealing in oxygen atmosphere
,”
Appl. Phys. Lett.
104
,
042903
(
2014
).
43.
K-H.
Ahn
,
S-S.
Kim
, and
S.
Baik
, “
Change of conduction mechanism by microstructural variation in Pt/(Ba,Sr)TiO3/Pt film capacitors
,”
J. Appl. Phys.
92
,
421
425
(
2002
).
44.
B.
Mešić
and
H.
Schroeder
, “
Integration of perovskite oxide dielectrics into complementary metal–oxide–semiconductor capacitor structures using amorphous TaSiN as oxygen diffusion barrier
,”
J. Appl. Phys.
110
,
064117
(
2011
).
45.
L.
Pintilie
,
I.
Vrejoiu
,
D.
Hesse
,
G.
LeRhun
, and
M.
Alexe
, “
Ferroelectric polarization-leakage current relation in high quality epitaxial Pb(Zr,Ti)O3
,”
Phys. Rev. B
75
,
104103
(
2007
).
46.
J.
Shin
,
J.
Park
,
C.-S.
Hwang
, and
H.-J.
Kim
, “
Dielectric and electrical properties of sputter grown (Ba,Sr)TiO3 thin films
,”
J. Appl. Phys.
86
,
506
(
1999
).
47.
J.
Sun
,
X.-J.
Zheng
,
W.
Yin
,
M. H.
Tang
, and
W.
Li
, “
Space-charge-limited leakage current in high dielectric constant and ferroelectric thin films considering the field-dependent permittivity
,”
Appl. Phys. Lett.
97
,
242905
(
2010
).
48.
S. M.
Sze
,
Physics of Semiconductor Device
, 2nd ed. (
Wiley
,
New York
,
1981
).
49.
C.-J.
Peng
and
S.-B.
Krupanidhi
, “
Structures and electrical properties of barium strontium titanate thin films grown by multi-ion-beam reactive sputtering technique
,”
J. Mater. Res.
10
,
708
726
(
1995
).
50.
T.
Baiatu
,
R.
Waser
, and
K.-H.
Härdt
, “
DC electrical degradation of perovskite-type titanates: III, A model of the mechanism
,”
J. Am. Ceram. Soc.
73
,
1663
1673
(
1990
).
51.
R.
Bouregba
,
G.
Le Rhun
,
G.
Poullain
, and
G.
Leclerc
, “
Investigation of thickness dependence of the ferroelectric properties of Pb(Zr0.6Ti0.4) thin-film capacitors
,”
J. Appl. Phys.
99
,
034102
(
2006
).
52.
S.
Gevorgian
,
A.
Vorobiev
, and
J.
Berge
, “
Electromechanical modelling and reduction of the electroacoustic losses in parallel-plate ferroelectric varactors
,” in
Proceeding of the 36th European Microwave Conference
(
2006
), pp.
851
853
.
53.
K-M.
Lakin
, “
Modeling of Thin Film Resonators and Filters
,”
IEEE MTT-S International Microwave Symposium Digest
1
, pp
149
152
(
1992
).
54.
K. M.
Lakin
, “
Thin film resonator technology
,”
IEEE Trans. Ultrason. Ferroelectr. Freq. Control
52
(
5
),
707
716
(
2005
).
55.
A.
Vorobiev
and
S.
Gevorgian
, “
Composite ferroelectric FBARS that are switchable between the first and second harmonics: Experimental demonstration
,”
IEEE Trans. Ultrason. Ferroelect. Freq. Control
62
(
3
),
565
575
(
2015
).
56.
C.
Zhou
and
D.-M.
Newns
, “
Intrinsic dead layer effect and the performance of ferroelectric thin film capacitors
,”
J. Appl. Phys.
82
,
3081
(
1997
).
57.
K.
Natori
,
D.
Otani
, and
M.
Sano
, “
Thickness dependence of the effective dielectric constant in a thin film capacitor
,”
Appl. Phys. Lett.
73
,
632
(
1998
).
58.
M.
Grossmann
,
O.
Lohse
,
D.
Bolten
,
U.
Boettger
,
T.
Schneller
, and
R.
Waser
, “
Interface-related decrease of the permittivity in PbZrxTi1xO3 thin films
,”
Appl. Phys. Lett.
80
,
1427
(
2002
).
59.
J.
Junquera
and
P.
Ghosez
, “
Critical thickness for ferroelectricity in perovskite ultrathin films
,”
Lett. Nat.
422
,
506
(
2003
).
60.
C.-S.
Hwang
,
B.-T.
Lee
,
C.-S.
Kang
,
K.-H.
Lee
,
H.
Cho
,
H.
Hideki
,
W.-D.
Kim
,
S.-I.
Lee
, and
M.-Y.
Lee
, “
Depletion layer thickness and Schottky type carrier injection at the interface between Pt electrodes and (Ba, Sr)TiO3 thin films
,”
J. Appl. Phys.
85
,
287
(
1999
).
61.
C.
Basceri
,
S.-K.
Streiffer
,
A.-I.
Kingon
, and
R.
Waser
, “
The dielectric response as a function of temperature and film thickness of fiber-textured (Ba,Sr)TiO3 thin films grown by chemical vapor deposition
,”
J. Appl. Phys.
82
,
2497
2504
(
1997
).
62.
A. A.
Sirenko
,
C.
Bernhard
,
A.
Golnik
,
A. M.
Clark
,
J.
Hao
,
W.
Si
, and
X. X.
Xi
, “
Soft-mode hardening in SrTiO3 thin films
,”
Lett. Nat.
404
,
373
376
(
2000
).
63.
C.-T.
Black
and
J.-J.
Welser
, “
Electric-field penetration into metals: Consequences for high-dielectric-constant capacitors
,”
IEEE Trans. Electron. Devices
46
,
776
780
(
1999
).
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