We present a versatile nanomechanical sensing platform for the investigation of magnetostriction in thin films. It is based on a doubly clamped silicon nitride nanobeam resonator covered with a thin magnetostrictive film. Changing the magnetization direction within the film plane by an applied magnetic field generates a magnetoelastic stress and thus changes the resonance frequency of the nanobeam. A measurement of the resulting resonance frequency shift, e.g., by optical interferometry, allows to quantitatively determine the magnetostriction constants of the thin film. In a proof-of-principle experiment, we determine the magnetostriction constants of a 10 nm thick polycrystalline cobalt film, showing very good agreement with literature values. The presented technique aims, in particular, for the precise measurement of magnetostriction in a variety of (conducting and insulating) thin films, which can be deposited by, e.g., electron beam deposition, thermal evaporation, or sputtering.

1.
Q. P.
Unterreithmeier
,
T.
Faust
, and
J. P.
Kotthaus
,
Phys. Rev. Lett.
105
,
027205
(
2010
).
2.
C. L.
Degen
,
M.
Poggio
,
H. J.
Mamin
,
C. T.
Rettner
, and
D.
Rugar
,
Proc. Natl. Acad. Sci. U.S.A.
106
,
1313
(
2009
).
3.
K.
Eom
,
H. S.
Park
,
D. S.
Yoon
, and
T.
Kwon
,
Phys. Rep.
503
,
115
(
2011
).
4.
A.
Boisen
,
S.
Dohn
,
S. S.
Keller
,
S.
Schmid
, and
M.
Tenje
,
Rep. Prog. Phys.
74
,
036101
(
2011
).
5.
J. L.
Arlett
,
E. B.
Myers
, and
M. L.
Roukes
,
Nat. Nanotechnol.
6
,
203
(
2011
).
6.
J.
Moser
,
J.
Güttinger
,
A.
Eichler
,
M. J.
Esplandiu
,
D. E.
Liu
,
M. I.
Dykman
, and
A.
Bachtold
,
Nat. Nanotechnol.
8
,
493
(
2013
).
7.
R.
Mukhopadhyay
,
M.
Lorentzen
,
J.
Kjems
, and
F.
Besenbacher
,
Langmuir
21
,
8400
(
2005
).
8.
J.
Chaste
,
A.
Eichler
,
J.
Moser
,
G.
Ceballos
,
R.
Rurali
, and
A.
Bachtold
,
Nat. Nanotechnol.
7
,
301
(
2012
).
9.
P. A.
Greaney
and
J. C.
Grossman
,
Nano Lett.
8
,
2648
(
2008
).
10.
S.
Schmid
,
K. D.
Jensen
,
K. H.
Nielsen
, and
A.
Boisen
,
Phys. Rev. B
84
,
165307
(
2011
).
11.
R. B.
Karabalin
,
L. G.
Villanueva
,
M. H.
Matheny
,
J. E.
Sader
, and
M. L.
Roukes
,
Phys. Rev. Lett.
108
,
236101
(
2012
).
12.
T.
Faust
,
J.
Rieger
,
M. J.
Seitner
,
J. P.
Kotthaus
, and
E. M.
Weig
,
Phys. Rev. B
89
,
100102
(
2014
).
13.
A. J.
Sorensen
,
Phys. Rev.
24
,
658
(
1924
).
14.
F.
Richter
,
Mechanical Properties of Solid Bulk Materials and Thin Films
(
TU Chemnitz
,
2010
).
15.
N. A.
Spaldin
and
M.
Fiebig
,
Science
309
,
391
(
2005
).
16.
S. C.
Masmanidis
,
H. X.
Tang
,
E. B.
Myers
,
M.
Li
,
K.
De Greve
,
G.
Vermeulen
,
W.
Van Roy
, and
M. L.
Roukes
,
Phys. Rev. Lett.
95
,
187206
(
2005
).
17.
M.
Vogel
,
C.
Mooser
,
K.
Karrai
, and
R. J.
Warburton
,
Appl. Phys. Lett.
83
,
1337
(
2003
).
18.
N. O.
Azak
,
M. Y.
Shagam
,
D. M.
Karabacak
,
K. L.
Ekinci
,
D. H.
Kim
, and
D. Y.
Jang
,
Appl. Phys. Lett.
91
,
093112
(
2007
).
19.
S.
Chikazumi
,
Physics of Ferromagnetism
(
Oxford University Press
,
1997
).
20.
R.
Gross
and
A.
Marx
,
Festkörperphysik
(
Oldenbourg
,
2012
).
21.
S.
Hunklinger
,
Festkörperphysik
(
Oldenbourg
,
2009
).
22.
F.
Hocke
,
M.
Pernpeintner
,
X.
Zhou
,
A.
Schliesser
,
T. J.
Kippenberg
,
H.
Huebl
, and
R.
Gross
,
Appl. Phys. Lett.
105
,
133102
(
2014
).
23.
M. J.
Seitner
,
K.
Gajo
, and
E. M.
Weig
,
Appl. Phys. Lett.
105
,
213101
(
2014
).
24.
S. S.
Verbridge
,
J. M.
Parpia
,
R. B.
Reichenbach
,
L. M.
Bellan
, and
H. G.
Craighead
,
J. Appl. Phys.
99
,
124304
(
2006
).
25.
N. N.
Greenwood
and
A.
Earnshaw
,
Chemie der Elemente
(
Wiley-VCH Weinheim
,
1988
).
26.
H.
Masumoto
,
H.
Saito
, and
M.
Kikuchi
,
Sci. Rep. Res. Inst., Tohoku Univ., Ser. A
19
,
172
(
1967
); available at http://ir.library.tohoku.ac.jp/re/bitstream/10097/27368/1/KJ00004197159.pdf.
27.
A. H.
Morrish
,
The Physical Principles of Magnetism
(
Wiley
,
2001
).
28.
A.
Brandlmaier
, “
Magnetische Anisotropie in dünnen Schichten aus Magnetit
,” M.S. thesis,
Technische Universität München
,
2006
.
29.
M.
Weiler
,
A.
Brandlmaier
,
S.
Geprägs
,
M.
Althammer
,
M.
Opel
,
C.
Bihler
,
H.
Huebl
,
M. S.
Brandt
,
R.
Gross
, and
S. T. B.
Goennenwein
,
New J. Phys.
11
,
013021
(
2009
).
30.
31.
E.
Klokholm
,
IEEE Trans. Magn.
12
,
819
(
1976
).
32.
A. C.
Tam
and
H.
Schroeder
,
J. Appl. Phys.
64
,
5422
(
1988
).
33.
E.
du Trémolet de Lacheisserie
and
J. C.
Peuzin
,
J. Magn. Magn. Mater.
136
,
189
(
1994
).
34.
M.
Weber
,
R.
Koch
, and
K. H.
Rieder
,
Phys. Rev. Lett.
73
,
1166
(
1994
).
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