We report investigations of capacitively coupled carbon tetrafluoride (CF4) plasmas excited with tailored voltage waveforms containing up to five harmonics of a base frequency of 5.5 MHz. The impact of both the slope asymmetry, and the amplitude asymmetry, of these waveforms on the discharge is examined by combining experiments with particle-in-cell simulations. For all conditions studied herein, the discharge is shown to operate in the drift-ambipolar mode, where a comparatively large electric field in the plasma bulk (outside the sheaths) is the main mechanism for electron power absorption leading to ionization. We show that both types of waveform asymmetries strongly influence the ion energy at the electrodes, with the particularity of having the highest ion flux on the electrode where the lowest ion energy is observed. Even at the comparatively high pressure (600 mTorr) and low fundamental frequency of 5.5 MHz used here, tailoring the voltage waveforms is shown to efficiently create an asymmetry of both the ion energy and the ion flux in geometrically symmetric reactors.
Skip Nav Destination
Article navigation
28 April 2016
Research Article|
April 26 2016
Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas
B. Bruneau;
B. Bruneau
a)
1
LPICM-CNRS
, Ecole Polytechnique, 91128 Palaiseau, France
Search for other works by this author on:
I. Korolov
;
I. Korolov
2Institute for Solid State Physics and Optics, Wigner Research Centre for Physics,
Hungarian Academy of Sciences
, Konkoly-Thege Miklós Str. 29-33, H-1121 Budapest, Hungary
Search for other works by this author on:
T. Lafleur;
T. Lafleur
3LPP,
Ecole Polytechnique-CNRS-Univ Paris-Sud-UPMC
, 91128 Palaiseau, France
Search for other works by this author on:
T. Gans;
T. Gans
4Department of Physics, York Plasma Institute,
University of York
, Heslington, York YO10 5DD, United Kingdom
Search for other works by this author on:
D. O'Connell;
D. O'Connell
4Department of Physics, York Plasma Institute,
University of York
, Heslington, York YO10 5DD, United Kingdom
Search for other works by this author on:
A. Greb;
A. Greb
4Department of Physics, York Plasma Institute,
University of York
, Heslington, York YO10 5DD, United Kingdom
Search for other works by this author on:
A. Derzsi;
A. Derzsi
2Institute for Solid State Physics and Optics, Wigner Research Centre for Physics,
Hungarian Academy of Sciences
, Konkoly-Thege Miklós Str. 29-33, H-1121 Budapest, Hungary
Search for other works by this author on:
Z. Donkó;
Z. Donkó
2Institute for Solid State Physics and Optics, Wigner Research Centre for Physics,
Hungarian Academy of Sciences
, Konkoly-Thege Miklós Str. 29-33, H-1121 Budapest, Hungary
Search for other works by this author on:
S. Brandt;
S. Brandt
5Department of Physics,
West Virginia University
, Morgantown, West Virginia 26506-6315, USA
Search for other works by this author on:
E. Schüngel;
E. Schüngel
5Department of Physics,
West Virginia University
, Morgantown, West Virginia 26506-6315, USA
Search for other works by this author on:
J. Schulze;
J. Schulze
5Department of Physics,
West Virginia University
, Morgantown, West Virginia 26506-6315, USA
Search for other works by this author on:
E. Johnson;
E. Johnson
1
LPICM-CNRS
, Ecole Polytechnique, 91128 Palaiseau, France
Search for other works by this author on:
J.-P. Booth
J.-P. Booth
3LPP,
Ecole Polytechnique-CNRS-Univ Paris-Sud-UPMC
, 91128 Palaiseau, France
Search for other works by this author on:
a)
Author to whom correspondence should be addressed. Electronic mail: [email protected].
J. Appl. Phys. 119, 163301 (2016)
Article history
Received:
February 12 2016
Accepted:
April 12 2016
Citation
B. Bruneau, I. Korolov, T. Lafleur, T. Gans, D. O'Connell, A. Greb, A. Derzsi, Z. Donkó, S. Brandt, E. Schüngel, J. Schulze, E. Johnson, J.-P. Booth; Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas. J. Appl. Phys. 28 April 2016; 119 (16): 163301. https://doi.org/10.1063/1.4947453
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
A step-by-step guide to perform x-ray photoelectron spectroscopy
Grzegorz Greczynski, Lars Hultman
Piezoelectric thin films and their applications in MEMS: A review
Jinpeng Liu, Hua Tan, et al.
Tutorial: Simulating modern magnetic material systems in mumax3
Jonas J. Joos, Pedram Bassirian, et al.
Related Content
Experimental investigations of silicon tetrafluoride decomposition in ECR discharge plasma
Rev. Sci. Instrum. (June 2011)
Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures
J. Chem. Phys. (June 2014)
Investigation on critical breakdown electric field of hot sulfur hexafluoride/carbon tetrafluoride mixtures for high voltage circuit breaker applications
J. Appl. Phys. (September 2013)
Investigation of material removal characteristics of Si (100) wafer during linear field atmospheric-pressure plasma etching
Nanotechnology and Precision Engineering (September 2020)
Kinetic modeling of the effect of electron beam pulse duration on abatement of carbon tetrafluoride using O 2 as an additive gas
J. Vac. Sci. Technol. A (September 2009)