Silver nanoparticles on nanopatterned LiF(110) surface studied by extreme ultraviolet light scattering

A LiF(110) surface featuring a ridge-and-valley nanopatterned structure periodic along the [−1,1,0] direction (period and height of the order of 30 nm and 10 nm, respectively) formed by [001] macrosteps exposing {100} and {010} facets was functionalized by rows of Ag nanoparticles and studied by elastic light scattering in the energy range 50–100 eV. Families of diffraction efficiencies curves were taken at grazing incidence angle and fixed photon energy as a function of scattering angle, and elastic scattering curves were taken at fixed scattering angle as a function of energy. The scattering curves presented well-defined features ascribable to the periodicities of the surface, or equivalently to the reciprocal q_X vectors correlated with the power spectral density features of topological images of atomic force microscopy. Other characteristics of the functionalized surface, including the height of ridge-valley profile, the Ag nanoparticle dimensions, and the material distribution in the scattering plane, were obtained by fitting the experimental zero and first order efficiency curves to simulation results of a parameterized model. The simulations were carried out adapting an in-house code based on the electromagnetic differential method, and the different material properties were taken into account by a space dependent complex dielectric constant. Information along the direction perpendicular to the scattering plane was not accessible but morphological insights were obtained combining light diffraction with atomic force microscopy. The results indicate nanoparticles with a quasi-ellipsoidal shape prolate along the ridge direction with minor and major axes of ∼12 nm and ∼21 nm, respectively.