The extreme ultraviolet (EUV) emission and its spatial distribution as well as plasma parameters in a microplasma high-brightness light source are characterized by the use of a two-dimensional radiation hydrodynamic simulation. The expected EUV source size, which is determined by the expansion of the microplasma due to hydrodynamic motion, was evaluated to be 16 μm (full width) and was almost reproduced by the experimental result which showed an emission source diameter of 18–20 μm at a laser pulse duration of 150 ps [full width at half-maximum]. The numerical simulation suggests that high brightness EUV sources should be produced by use of a dot target based microplasma with a source diameter of about 20 μm.
References
1.
H.
Umeda
, H.
Tsushima
, H.
Watanabe
, S.
Tanaka
, M.
Yoshino
, S.
Matsumoto
, H.
Tanaka
, A.
Kurosu
, Y.
Kawasuji
, T.
Matsunaga
, J.
Fujimoto
, and H.
Mizoguchi
, Proc. SPIE
7973
, 79731
K (2011
).2.
H.
Tanaka
, A.
Matsumoto
, K.
Akinaga
, A.
Takahashi
, and T.
Okada
, Appl. Phys. Lett.
87
, 041503
(2005
).3.
Y.
Ueno
, G.
Soumagne
, A.
Sumitani
, A.
Endo
, and T.
Higashiguchi
, Appl. Phys. Lett.
91
, 231501
(2007
).4.
S.
Fujioka
, M.
Shimomura
, Y.
Shimada
, S.
Maeda
, H.
Sakaguchi
, Y.
Nakai
, T.
Aota
, H.
Nishimura
, N.
Ozaki
, A.
Sunahara
, K.
Nishihara
, N.
Miyanaga
, Y.
Izawa
, and K.
Mima
, Appl. Phys. Lett.
92
, 241502
(2008
).5.
J. M.
Freitag
and B. M.
Clemens
, Appl. Phys. Lett.
73
, 43
(1998
).6.
R. S.
Abhari
, B.
Rollinger
, A. Z.
Giovannini
, O.
Morris
, I.
Henderson
, and S. S.
Ellwi
, J. Micro/Nanolithogr. MEMS, MOEMS
11
, 021114
(2012
).7.
D.
Gustafson
, S. F.
Horne
, M. M.
Besen
, D. K.
Smith
, M. J.
Partlow
, and P. A.
Blackborow
, in 2013 International Workshop on EUV Lithography
, Makena Beach & Golf Resort, Maui, Hawaii
(2013
).8.
H.
Kinoshita
, T.
Harada
, M.
Nakasuji
, Y.
Nagata
, and T.
Watanabe
, Microelectron. Eng.
88
, 2000
(2011
).9.
S.
Yuspeh
, Y.
Tao
, R. A.
Burdt
, M. S.
Tillack
, Y.
Ueno
, and F.
Najmabadi
, Appl. Phys. Lett.
98
, 201501
(2011
).10.
A.
Roy
, G.
Arai
, H.
Hara
, T.
Higashiguchi
, H.
Ohashi
, A.
Sunahara
, B.
Li
, P.
Dunne
, G.
O'Sullivan
, T.
Miura
, T.
Mocek
, and A.
Endo
, Appl. Phys. Lett.
105
, 074103
(2014
).11.
T.-H.
Dinh
, Y.
Suzuki
, R.
Hirose
, H.
Hara
, H.
Ohashi
, B.
Li
, P.
Dunne
, G.
O'Sullivan
, A.
Sunahara
, and T.
Higashiguchi
, Rev. Sci. Instrum.
85
, 116104
(2014
).12.
A.
Sunahara
, A.
Sasaki
, and K.
Nishihara
, J. Phys.: Conf. Ser.
112
, 042048
(2008
).13.
G.
O'Sullivan
and P. K.
Carroll
, J. Opt. Soc. Am.
71
, 227
(1981
).14.
P. K.
Carroll
and G.
O'Sullivan
, Phys. Rev. A
25
, 275
(1982
).15.
J.
Blackburn
, P. K.
Carroll
, J.
Costello
, and G.
O'Sullivan
, J. Opt. Soc. Am.
73
, 1325
(1983
).16.
G.
O'Sullivan
and R.
Faulkner
, Opt. Eng.
33
, 3978
(1994
).17.
D. F.
Colombant
and G. F.
Tonon
, J. Appl. Phys.
44
, 3524
(1973
).18.
A.
Sunahara
, T.
Johzaki
, H.
Nagatomo
, and K.
Mima
, Laser Part. Beams
30
, 95
(2012
).19.
R.
More
, H.
Yoneda
, and H.
Morikami
, J. Quant. Spectrosc. Radiat. Transfer
99
, 409
(2006
).20.
M.
Gonzalez
, E.
Audit
, and P.
Huynh
, Astron. Astrophys.
464
, 429
–435
(2007
).21.
A.
Sasaki
, A.
Sunahara
, K.
Nishihara
, T.
Nishikawa
, K.
Fujima
, T.
Kagawa
, F.
Koike
, and H.
Tanuma
, High Energy Density Phys.
3
, 250
(2007
).22.
A.
Sasaki
, A.
Sunahara
, H.
Furukawa
, K.
Nishihara
, T.
Nishikawa
, F.
Koike
, and H.
Tanuma
, High Energy Density Phys.
5
, 147
(2009
).23.
H.
Ohashi
, H.
Tanuma
, S.
Fujioka
, H.
Nishimura
, A.
Sasaki
, and K.
Nishihara
, J. Phys. Conf.
58
, 235
(2007
).24.
H.
Tanuma
, H.
Ohashi
, S.
Fujioka
, H.
Nishimura
, A.
Sasaki
, and K.
Nishihara
, J. Phys. Conf.
58
, 231
(2007
).25.
S.
Fujioka
, H.
Nishimura
, K.
Nishihara
, A.
Sasaki
, A.
Sunahara
, T.
Okuno
, N.
Ueda
, T.
Ando
, Y.
Tao
, Y.
Shimada
, K.
Hashimoto
, M.
Yamaura
, K.
Shigemori
, M.
Nakai
, K.
Nagai
, T.
Norimatsu
, T.
Nishikawa
, N.
Miyanaga
, Y.
Izawa
, and K.
Mima
, Phys. Rev. Lett.
95
, 235004
(2005
).26.
W. L.
Kruer
, The Physics of Laser Plasma Interactions
(Addison-Wesley Publication
, 1988
), p. 48
.27.
R. C.
Malone
, R. L.
McCrory
, and R. L.
Morse
, Phys. Rev. Lett.
34
, 721
(1975
).28.
M. G.
Heines
, Laser-Plasma Interactions 4
, edited by M. B.
Hooper
(IOP Publication
, 1988
), p. 139
.29.
30.
T.
Ando
, S.
Fujioka
, H.
Nishimura
, N.
Ueda
, Y.
Yasuda
, K.
Nagai
, T.
Norimatsu
, M.
Murakami
, K.
Nishihara
, N.
Miyanaga
, Y.
Izawa
, K.
Mima
, and A.
Sunahara
, Appl. Phys. Lett.
89
, 151501
(2006
).31.
R. C.
Spitzer
, T. J.
Orzechowski
, D. W.
Phillion
, R. L.
Kauffman
, and C.
Cerjan
, J. Appl. Phys.
79
, 2251
(1996
).© 2015 AIP Publishing LLC.
2015
AIP Publishing LLC
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