We investigate the properties and characteristics of planar Ti/TiOx/Ti junctions, which consist of transverse TiOx lines drawn on Ti test patterns. Junctions are elaborated by means of local anodic oxidation using atomic force microscopy. An irreversible morphological transformation occurring in a reproducible manner is observed when these planar junctions are electrically stressed under ambient atmosphere. Structural and chemical analyses based on transmission electron microscopy techniques reveal the extension of the initial amorphous TiOx into a crystalline rutile phase. This irreversible transformation is proven to vanish completely if the electrical stress occurs under vacuum atmosphere. Finally, we carry out temperature dependent electrical measurements in order to elucidate their conduction mechanism: Schottky emission above an ultra-low potential barrier is assumed to dominate under vacuum atmosphere whereas ionic conduction seems to prevail in air.

Topics
Ionic conductivity, Thermionic emission, Electrical properties and parameters, Field effect transistors, Electric measurements, Electrostatics, Atomic force microscopy, Resistive switching, Transmission electron microscopy, Potential energy barrier
1.
J. J.
 
Yang
,
M. D.
 
Pickett
,
X.
 
Li
,
D. A. A.
 
Ohlberg
,
D. R.
 
Stewart
, and
R. S.
 
Williams
,
Nature Nanotechnol.
 
3
,
429
(
2008
).
https://doi.org/10.1038/nnano.2008.160
Google Scholar
Crossref
Search ADS
 
3.
H.
 
Shima
,
N.
 
Zhong
, and
H.
 
Akinaga
,
Appl. Phys. Lett.
 
94
,
082905
(
2009
).
https://doi.org/10.1063/1.3068754
Google Scholar
Crossref
Search ADS
 
4.
J. J.
 
Yang
,
J.
 
Borghetti
,
D.
 
Murphy
,
D. R.
 
Stewart
, and
R. S.
 
Williams
,
Adv. Mater.
 
21
,
3754
(
2009
).
https://doi.org/10.1002/adma.200900822
Google Scholar
Crossref
Search ADS
 
5.
E. S.
 
Snow
,
P. M.
 
Campbell
,
R. W.
 
Rendell
,
F. A.
 
Buot
,
D.
 
Park
,
C. R. K.
 
Marrian
, and
R.
 
Magno
,
Semicond. Sci. Technol.
 
13
,
75
(
1998
).
https://doi.org/10.1088/0268-1242/13/8A/023
Google Scholar
Crossref
Search ADS
 
6.
K.
 
Fujimaru
,
R.
 
Sasajima
, and
H.
 
Matsumura
,
J. Appl. Phys.
 
85
(
9
),
6912
(
1999
).
https://doi.org/10.1063/1.370104
Google Scholar
Crossref
Search ADS
 
7.
K. K.
 
Likharev
,
Proc. IEEE
 
87
(
4
),
606
(
1999
).
https://doi.org/10.1109/5.752518
Google Scholar
Crossref
Search ADS
 
8.
C.
 
Dubuc
,
J.
 
Beauvais
, and
D.
 
Drouin
,
Appl. Phys. Lett.
 
90
,
113104
(
2007
).
https://doi.org/10.1063/1.2713171
Google Scholar
Crossref
Search ADS
 
9.
K. N.
 
Tu
,
J. Appl. Phys.
 
94
,
5451
(
2003
).
https://doi.org/10.1063/1.1611263
Google Scholar
Crossref
Search ADS
 
10.
C.-K.
 
Hu
,
R.
 
Rosenberg
, and
K. Y.
 
Lee
,
Appl. Phys. Lett.
 
74
,
2945
(
1999
).
https://doi.org/10.1063/1.123974
Google Scholar
Crossref
Search ADS
 
11.
A.
 
Roy
 and
C. M.
 
Tan
,
J. Appl. Phys.
 
103
,
093707
(
2008
).
https://doi.org/10.1063/1.2917065
Google Scholar
Crossref
Search ADS
 
12.
C.
 
Yoshida
,
K.
 
Kinoshita
,
T.
 
Yamasaki
, and
Y.
 
Sugiyama
,
Appl. Phys. Lett.
 
93
,
042106
(
2008
).
https://doi.org/10.1063/1.2966141
Google Scholar
Crossref
Search ADS
 
13.
J. J.
 
Yang
,
F.
 
Miao
,
M. D.
 
Pickett
,
D. A. A.
 
Ohlberg
,
D. R.
 
Stewart
,
C. N.
 
Lau
, and
R. S.
 
Williams
,
Nanotechnology
 
20
,
215201
(
2009
).
https://doi.org/10.1088/0957-4484/20/21/215201
Google Scholar
Crossref
Search ADS
PubMed
 
14.
P.
 
Calka
,
E.
 
Martinez
,
V.
 
Delaye
,
D.
 
Lafond
,
G.
 
Audoit
,
D.
 
Mariolle
,
N.
 
Chevalier
,
H.
 
Grampeix
,
C.
 
Cagli
,
V.
 
Jousseaume
, and
C.
 
Guedj
,
Nanotechnology
 
24
,
085706
(
2013
).
https://doi.org/10.1088/0957-4484/24/8/085706
Google Scholar
Crossref
Search ADS
PubMed
 
15.
P.
 
Avouris
,
T.
 
Hertel
, and
R.
 
Martel
,
Appl. Phys. Lett.
 
71
,
285
(
1997
).
https://doi.org/10.1063/1.119521
Google Scholar
Crossref
Search ADS
 
16.
R.
 
Garcia
,
M.
 
Calleja
, and
F.
 
Perez-Murano
,
Appl. Phys. Lett.
 
72
,
2295
(
1998
).
https://doi.org/10.1063/1.121340
Google Scholar
Crossref
Search ADS
 
17.
F. C.
 
Chiu
,
S. K.
 
Fan
,
K. C.
 
Tai
,
J. Y.
 
Lee
, and
Y. C.
 
Chou
,
Appl. Phys. Lett.
 
87
,
243506
(
2005
).
https://doi.org/10.1063/1.2143127
Google Scholar
Crossref
Search ADS
 
18.
K.
 
Matsumoto
,
M.
 
Ishii
,
K.
 
Segawa
,
Y.
 
Oka
,
B. J.
 
Vartanian
, and
J. S.
 
Harris
,
Appl. Phys. Lett.
 
68
(
1
),
34
(
1996
).
https://doi.org/10.1063/1.116747
Google Scholar
Crossref
Search ADS
 
19.
Y.
 
Gotoh
,
K.
 
Matsumoto
,
V.
 
Bubanja
,
F.
 
Vazquez
,
T.
 
Maeda
, and
J. S.
 
Harris
,
Jpn. J. Appl. Phys., Part 1
 
39
,
2334
(
2000
).
https://doi.org/10.1143/JJAP.39.2334
Google Scholar
Crossref
Search ADS
 
20.
Y.
 
Gotoh
,
K.
 
Matsumoto
, and
T.
 
Maeda
,
Jpn. J. Appl. Phys., Part 1
 
41
,
2578
(
2002
).
https://doi.org/10.1143/JJAP.41.2578
Google Scholar
Crossref
Search ADS
 
21.
P. F.
 
Siles
,
B. S.
 
Archanjo
,
D. L.
 
Baptista
,
V. L.
 
Pimentel
,
J.
 
Joshua
,
B. R. A
 
Neves
, and
G.
 
Medeiros-Ribeiro
,
J. Appl. Phys.
 
110
,
024511
(
2011
).
https://doi.org/10.1063/1.3609065
Google Scholar
Crossref
Search ADS
 
22.
B. L.
 
Weeks
 and
M. W.
 
Vaughn
,
Langmuir
 
21
,
8096
(
2005
).
https://doi.org/10.1021/la0512087
Google Scholar
Crossref
Search ADS
PubMed
 
23.
N.
 
Guillaume
,
E.
 
Puyoo
,
M.
 
Le Berre
,
D.
 
Albertini
,
N.
 
Baboux
,
B.
 
Gautier
, and
F.
 
Calmon
, Seventh International Conference on Quantum, Nano and Micro Technologies (
ICQNM, Barcelona
,
Spain
,
2013
), pp.
50
–
53
, ISBN 978-1-61208-303-2.
24.
C.
 
Huh
 and
S. J.
 
Park
,
J. Vac. Sci. Technol. B
 
18
,
55
(
2000
).
https://doi.org/10.1116/1.591150
Google Scholar
Crossref
Search ADS
 
25.
B.
 
Irmer
,
M.
 
Kehrle
,
H.
 
Lorenz
, and
J. P.
 
Kotthaus
,
Appl. Phys. Lett.
 
71
,
1733
(
1997
).
https://doi.org/10.1063/1.120019
Google Scholar
Crossref
Search ADS
 
26.
R.
 
Moazzami
,
C.
 
Hu
, and
W. H.
 
Shepherd
,
IEEE Trans. Electron Device
 
39
,
2044
(
1992
).
https://doi.org/10.1109/16.155876
Google Scholar
Crossref
Search ADS
 
27.
E. J.
 
Kim
 and
Y.
 
Ohki
,
IEEE Trans. Dielectr. Electron. Insul.
 
2
,
74
(
1995
).
https://doi.org/10.1109/94.368682
Google Scholar
Crossref
Search ADS
 
28.
L. A.
 
Bendersky
 and
F. W.
 
Gayle
,
J. Res. Natl. Inst. Stand. Technol.
 
106
,
997
(
2001
).
https://doi.org/10.6028/jres.106.051
Google Scholar
Crossref
Search ADS
PubMed
 
29.
Q.
 
He
,
Q.
 
Hao
,
G.
 
Chen
,
B.
 
Poudel
,
X.
 
Wang
,
D.
 
Wang
, and
Z.
 
Ren
,
Appl. Phys. Lett.
 
91
,
052505
(
2007
).
https://doi.org/10.1063/1.2767775
Google Scholar
Crossref
Search ADS
 
30.
T.
 
Schmidt
,
R.
 
Martel
,
R. L.
 
Sandstrom
, and
P.
 
Avouris
,
Appl. Phys. Lett.
 
73
(
15
),
2173
(
1998
).
https://doi.org/10.1063/1.122413
Google Scholar
Crossref
Search ADS
 
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