A dense, homogeneous and crack-free ferroelectric PZT thin film with 〈100〉-preferred orientation was produced using the sol-gel method. The volume fraction α(100) of 〈100〉-oriented grains in the PZT film was calculated [α(100) ≈ 80%] from XRD of the PZT thin film and powder. The PZT thin film exhibits an open polarization vs. electric field loop and a low leakage current density from 10−8 A/cm2 to 10−7 A/cm2. The electrical conduction data were fit to a Schottky-emission model with deep traps from 100 kV/cm to 250 kV/cm. A modified capacitance model was introduced that adds electrical domain capacitance based on a metal-ferroelectric-metal (MFM) system with Schottky contacts. The model reproduces the observed non-linear capacitance vs. voltage behavior of the film.

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