Layered fluoroethylenepropylene (FEP) ferroelectret films with cross-tunnel structure were fabricated from sheets of FEP films by template-patterning followed by a fusion-bonding process and contact charging. The typical piezoelectric d33 coefficients, measured by a quasi-static method of samples not annealed, are in the range of 1000–3700 pC/N. The resonance behavior of the samples is analyzed by dielectric spectroscopy which also yields Young's modulus. Microphones built with such films exhibit a somewhat decreasing frequency response up to 1 kHz, an increase of the responses due to diffraction effects at higher frequencies, and eventually a peak probably due to a thickness resonance at about 40 kHz. Annealing at 125 °C indicates that the sensitivity stabilizes at about 40% of the original value. From this data, stable dynamic d33 coefficients of up to 300 pC/N can be calculated. A micro energy harvesting generator utilizing these films and based on the excitation of thickness vibrations is also described. With an active area of 4.3 cm2 and a seismic mass of 69.5 g, power up to 0.5 μW referred to an acceleration of 1 g can be generated at a frequency of 120 Hz.
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21 August 2014
Research Article|
August 19 2014
Fluoroethylenepropylene ferroelectret films with cross-tunnel structure for piezoelectric transducers and micro energy harvesters Available to Purchase
Xiaoqing Zhang;
Xiaoqing Zhang
1School of Physics Science and Engineering,
Tongji University
, 1239 Siping Road, Shanghai 200092, China
2
Institute for Telecommunications Technology
, TU Darmstadt, Merckstrasse 25, 64283 Darmstadt, Germany
Search for other works by this author on:
Gerhard M. Sessler;
Gerhard M. Sessler
a)
2
Institute for Telecommunications Technology
, TU Darmstadt, Merckstrasse 25, 64283 Darmstadt, Germany
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Yujie Wang
Yujie Wang
1School of Physics Science and Engineering,
Tongji University
, 1239 Siping Road, Shanghai 200092, China
Search for other works by this author on:
Xiaoqing Zhang
1,2
Gerhard M. Sessler
2,a)
Yujie Wang
1
1School of Physics Science and Engineering,
Tongji University
, 1239 Siping Road, Shanghai 200092, China
2
Institute for Telecommunications Technology
, TU Darmstadt, Merckstrasse 25, 64283 Darmstadt, Germany
a)
E-mail: [email protected]
J. Appl. Phys. 116, 074109 (2014)
Article history
Received:
May 28 2014
Accepted:
August 06 2014
Citation
Xiaoqing Zhang, Gerhard M. Sessler, Yujie Wang; Fluoroethylenepropylene ferroelectret films with cross-tunnel structure for piezoelectric transducers and micro energy harvesters. J. Appl. Phys. 21 August 2014; 116 (7): 074109. https://doi.org/10.1063/1.4893367
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