We have studied the effect of photoelectrons on defect formation in graphene during extreme ultraviolet (EUV) irradiation. Assuming the major role of these low energy electrons, we have mimicked the process by using low energy primary electrons. Graphene is irradiated by an electron beam with energy lower than 80 eV. After e-beam irradiation, it is found that the D peak, I(D), appears in the Raman spectrum, indicating defect formation in graphene. The evolution of I(D)/I(G) follows the amorphization trajectory with increasing irradiation dose, indicating that graphene goes through a transformation from microcrystalline to nanocrystalline and then further to amorphous carbon. Further, irradiation of graphene with increased water partial pressure does not significantly change the Raman spectra, which suggests that, in the extremely low energy range, e-beam induced chemical reactions between residual water and graphene are not the dominant mechanism driving defect formation in graphene. Single layer graphene, partially suspended over holes was irradiated with EUV radiation. By comparing with the Raman results from e-beam irradiation, it is concluded that the photoelectrons, especially those from the valence band, contribute to defect formation in graphene during irradiation.

1.
A.
Geim
and
K.
Novoselov
, “
The rise of graphene
,”
Nature Mater.
6
,
183
191
(
2007
).
2.
A.
Geim
, “
Graphene: Status and prospects
,”
Science
324
,
1530
1534
(
2009
).
3.
K.
Novoselov
,
D.
Jiang
,
F.
Schedin
,
T.
Booth
,
V.
Khotkevich
,
S.
Morozov
, and
A.
Geim
, “
Two-dimensional atomic crystals
,”
Proc. Natl. Acad. Sci. U.S.A.
102
,
10451
(
2005
).
4.
Y.
Zhang
,
Y.-W.
Tan
,
H. L.
Stormer
, and
P.
Kim
, “
Experimental observation of the quantum hall effect and berry's phase in graphene
,”
Nature
438
,
201
204
(
2005
).
5.
M. Y.
Han
,
B.
Özyilmaz
,
Y.
Zhang
, and
P.
Kim
, “
Energy band-gap engineering of graphene nanoribbons
,”
Phys. Rev. Lett.
98
,
206805
(
2007
).
6.
K. I.
Bolotin
,
K.
Sikes
,
Z.
Jiang
,
M.
Klima
,
G.
Fudenberg
,
J.
Hone
,
P.
Kim
, and
H.
Stormer
, “
Ultrahigh electron mobility in suspended graphene
,”
Solid State Commun.
146
,
351
355
(
2008
).
7.
C.
Lee
,
X.
Wei
,
J. W.
Kysar
, and
J.
Hone
, “
Measurement of the elastic properties and intrinsic strength of monolayer graphene
,”
Science
321
,
385
388
(
2008
).
8.
J. S.
Bunch
,
A. M.
Van Der Zande
,
S. S.
Verbridge
,
I. W.
Frank
,
D. M.
Tanenbaum
,
J. M.
Parpia
,
H. G.
Craighead
, and
P. L.
McEuen
, “
Electromechanical resonators from graphene sheets
,”
Science
315
,
490
493
(
2007
).
9.
A.
Gao
,
P.
Rizo
,
E.
Zoethout
,
L.
Scaccabarozzi
,
C.
Lee
,
V.
Banine
, and
F.
Bijkerk
, “
Extreme ultraviolet induced defects on few-layer graphene
,”
J. Appl. Phys.
114
,
044313
(
2013
).
10.
S.
Zhou
,
Ç.
Girit
,
A.
Scholl
,
C.
Jozwiak
,
D.
Siegel
,
P.
Yu
,
J.
Robinson
,
F.
Wang
,
A.
Zettl
, and
A.
Lanzara
, “
Instability of two-dimensional graphene: Breaking sp2 bonds with soft x rays
,”
Phys. Rev. B
80
,
121409
(
2009
).
11.
D.
Teweldebrhan
and
A.
Balandin
, “
Modification of graphene properties due to electron-beam irradiation
,”
Appl. Phys. Lett.
94
,
013101
(
2009
).
12.
M.
Iqbal
,
A. Kumar
Singh
,
M.
Iqbal
,
S.
Seo
, and
J.
Eom
, “
Effect of e-beam irradiation on graphene layer grown by chemical vapor deposition
,”
J. Appl. Phys.
111
,
084307
(
2012
).
13.
M.
Xu
,
D.
Fujita
, and
N.
Hanagata
, “
Monitoring electron-beam irradiation effects on graphenes by temporal Auger electron spectroscopy
,”
Nanotechnology
21
,
265705
(
2010
).
14.
J. C.
Meyer
,
F.
Eder
,
S.
Kurasch
,
V.
Skakalova
,
J.
Kotakoski
,
H. J.
Park
,
S.
Roth
,
A.
Chuvilin
,
S.
Eyhusen
,
G.
Benner
 et al., “
Accurate measurement of electron beam induced displacement cross sections for single-layer graphene
,”
Phys. Rev. Lett.
108
,
196102
(
2012
).
15.
L.
Tao
,
C.
Qiu
,
F.
Yu
,
H.
Yang
,
M.
Chen
,
G.
Wang
, and
L.
Sun
, “
Modification on single-layer graphene induced by low-energy electron-beam irradiation
,”
J. Phys. Chem. C
117
,
10079
10085
(
2013
).
16.
M. M.
Lucchese
,
F.
Stavale
,
E.
Ferreira
,
C.
Vilani
,
M.
Moutinho
,
R. B.
Capaz
,
C.
Achete
, and
A.
Jorio
, “
Quantifying ion-induced defects and Raman relaxation length in graphene
,”
Carbon
48
,
1592
1597
(
2010
).
17.
F.
Banhart
,
J.
Kotakoski
, and
A. V.
Krasheninnikov
, “
Structural defects in graphene
,”
ACS Nano
5
,
26
41
(
2011
).
18.
T. E.
Madey
,
N. S.
Faradzhev
,
B. V.
Yakshinskiy
, and
N.
Edwards
, “
Surface phenomena related to mirror degradation in extreme ultraviolet (EUV) lithography
,”
Appl. Surf. Sci.
253
,
1691
1708
(
2006
).
19.
X.-L.
Zhou
,
X.-Y.
Zhu
, and
J.
White
, “
Photochemistry at adsorbate/metal interfaces
,”
Surf. Sci. Rep.
13
,
73
220
(
1991
).
20.
M.
Klosner
and
W.
Silfvast
, “
Intense xenon capillary discharge extreme-ultraviolet source in the 10–16-nm-wavelength region
,”
Opt. Lett.
23
,
1609
1611
(
1998
).
21.
L.
Sjmaenok
, “Nanoscale multilayer membranes as optical elements for EUVL,” International Workshop on EUV and Soft X-Ray Source (
2012
).
22.
V.
Banine
, “Spectral purity filter development for EUV HVM,” EUVL Symposium (
2008
).
23.
D. L.
Windt
, “
Imdsoftware for modeling the optical properties of multilayer films
,”
Comput. Phys.
12
,
360
370
(
1998
).
24.
A.
Ferrari
and
J.
Robertson
, “
Interpretation of Raman spectra of disordered and amorphous carbon
,”
Phys. Rev. B
61
,
14095
(
2000
).
25.
T.
Yuzvinsky
,
A.
Fennimore
,
W.
Mickelson
,
C.
Esquivias
, and
A.
Zettl
, “
Precision cutting of nanotubes with a low-energy electron beam
,”
Appl. Phys. Lett.
86
,
053109
(
2005
).
26.
R. H.
Page
,
R. J.
Larkin
,
Y.
Shen
, and
Y.-T.
Lee
, “
High-resolution photoionization spectrum of water molecules in a supersonic beam
,”
J. Chem. Phys.
88
,
2249
2263
(
1988
).
27.
B.
Krauss
,
T.
Lohmann
,
D.-H.
Chae
,
M.
Haluska
,
K.
von Klitzing
, and
J. H.
Smet
, “
Laser-induced disassembly of a graphene single crystal into a nanocrystalline network
,”
Phys. Rev. B
79
,
165428
(
2009
).
28.
P.
Atkins
,
Atkins' Physical Chemistry
(
Oxford University Press
,
Oxford
,
2009
).
29.
R. U. B.
Yakshinskiy
, personal communication.
30.
Unpublished data.
31.
A. L.
Kitt
,
Z.
Qi
,
S.
Remi
,
H. S.
Park
,
A. K.
Swan
, and
B. B.
Goldberg
, “
How graphene slides: Measurement and theory of strain-dependent frictional forces between graphene and SiO2
,”
Nano Lett.
13
,
2605
2610
(
2013
).
You do not currently have access to this content.