Boron-carbon-nitrogen films were grown by RF reactive sputtering from a B4C target and N2 as reactive gas. The films present phase segregation and are mechanically softer than boron carbide films (a factor of more than 2 in Young's modulus). This fact can turn out as an advantage in order to select buffer layers to better anchor boron carbide films on substrates eliminating thermally induced mechanical tensions.
REFERENCES
1.
C.
Wood
and D.
Emin
, Phys. Rev. B
29
, 4582
(1984
).2.
Y.
Kumashiro
, T.
Yokoyama
, A.
Sato
, and Y.
Ando
, J. Solid State Chem.
133
, 314
(1997
).3.
K.
Kamimura
, T.
Yoshimura
, T.
Nagaoka
, M.
Nakao
, Y.
Onuma
, and M.
Makimura
, J. Solid State Chem.
154
, 153
(2000
).4.
J.
Nagamatsu
, N.
Nakagawa
, T.
Muronaka
, Y.
Zentani
, and J.
Akimitsu
, Nature
410
, 63
(2001
).5.
L. M.
Cao
, H.
Tian
, Z.
Zhang
, X. Y.
Zhang
, C. X.
Gao
, and W. K.
Wang
, Nanotechnology
15
, 139
(2004
).6.
L. G.
Jacobsohn
and M.
Nastasi
, Surf. Coat. Technol.
200
, 1472
(2005
).7.
J. L.
He
, L. C.
Guo
, E.
Wu
, X. G.
Luo
, and Y. J.
Tian
, J. Phys.: Condens. Matter
16
, 8131
(2004
).8.
T. H.
Tsai
, T. S.
Yang
, C. L.
Cheng
, and M. S.
Wong
, Mater. Chem. Phys.
72
, 264
(2001
).9.
D. C.
Reigada
and F. L.
Freire
, Surf. Coat. Technol.
142–144
, 889
(2001
).10.
E.
Martinez
, A.
Lousa
, and J.
Esteve
, Diamond Relat. Mater.
10
, 1892
(2001
).11.
C.
Morant
, P.
Prieto
, J.
Bareno
, J. M.
Sanz
, and E.
Elizalde
, Thin Solid Films
515
, 207
(2006
).12.
S.
Ulrich
, T.
Theel
, J.
Schwan
, and H.
Ehrhardt
, Surf. Coat. Technol.
97
, 45
(1997
).13.
V.
Linss
, I.
Hermann
, N.
Scwarzer
, U.
Kreissig
, and F.
Richter
, Surf. Coat. Technol.
163–164
, 220
(2003
).14.
Y.
Chen
, Y. W.
Chung
, and S. Y.
Li
, Surf. Coat. Technol.
200
, 4072
(2006
).15.
C.
Hoglund
, J.
Birch
, K.
Andersen
, T.
Bigault
, J. C.
Buffet
, J.
Correa
, P.
van Esch
, B.
Guerard
, R.
Hall-Wilton
, J.
Jensen
, A.
Khaplanov
, F.
Piscitelli
, C.
Vettier
, W.
Vollenberg
, and L.
Hultman
, J. Appl. Phys.
111
, 104908
(2012
).16.
A. N.
Caruso
, J. Phys.: Condens. Matter
22
, 443201
(2010
).17.
M. U.
Guruz
, V. P.
Dravid
, and Y. W.
Chung
, Thin Solid Films
414
, 129
(2002
).18.
K.
Sell
, S.
Ulrich
, E.
Nold
, J.
Ye
, H.
Leiste
, M.
Stuber
, and H.
Holleck
, Surf. Coat. Technol.
174–175
, 1121
(2003
).19.
M.-L.
Wu
, J. D.
Kiely
, T.
Klemmer
, Y.-T.
Hsia
, and K.
Howard
, Thin Solid Films
449
, 120
(2004
).20.
S.
Ulrich
, H.
Ehrhardt
, J.
Schwan
, R.
Samlenski
, and R.
Brenn
, Diamond Relat. Mater.
7
, 835
(1998
).21.
T.
Tavsanoglu
, M.
Jeandin
, O.
Addemir
, and O.
Yucel
, Solid State Sci.
14
, 1717
(2012
).22.
E.
Salas
, F.
Jiménez-Villacorta
, J.
Sánchez-Marcos
, R. J.
Jiménez-Riobóo
, A.
Muñoz-Martín
, J. E.
Prieto
, V.
Joco
, and C.
Prieto
, Phys. Status Solidi A
210
, 513
(2013
).23.
D. H.
Kim
, E.
Byon
, S.
Lee
, J.-K.
Kim
, and H.
Ruh
, Thin Solid Films
447
, 192
(2004
).24.
A.
Perrone
, A. P.
Caricato
, A.
Luches
, M.
Dinescu
, C.
Ghica
, V.
Sandu
, and A.
Andrei
, Appl. Surf. Sci.
133
, 239
(1998
).25.
M. C.
Polo
, E.
Martínez
, J.
Esteve
, and J. L.
Andujar
, Diamond Relat. Mater.
8
, 423
(1999
).26.
F. L.
Freire
, D. C.
Reigada
, and R.
Prioli
, Phys. Status Solidi A
187
, 1
(2001
).27.
V.
Linss
, S. E.
Rodil
, P.
Reinke
, M. G.
Garnier
, P.
Oelhafen
, U.
Kreissig
, and F.
Rischter
, Thin Solid Films
467
, 76
(2004
).28.
Z. F.
Zhou
, I.
Bello
, M. K.
Lei
, K. Y.
Li
, and C. S.
Lee
, Surf. Coat. Technol.
128
, 334
(2000
).29.
F.
Jia
, C.
Zhuang
, C.
Guan
, J.
Zhao
, Y.
Bai
, and X.
Jiang
, Vacuum
85
, 887
(2011
).30.
I.
Caretti
, J. M.
Albella
, and I.
Jimenez
, Diamond Relat. Mater.
16
, 1445
(2007
).31.
T.
Tavsanoglu
, O.
Yucel
, O.
Addemir
, and M.
Jeandi
, in Supplemental Proceedings: TMS2008—Materials Processing and Properties
(2008
), Vol. 1, p. 279
.32.
J. R.
Sandercock
, Light Scattering in Solids III
, Applied Physics Vol. 51, edited by M.
Cardona
and G.
Güntherodt
(Springer-Verlag
, Berlin
, 1989
).33.
R. J.
Jiménez-Riobóo
, M.
García-Hernández
, C.
Prieto
, J. J.
Fuentes-Gallego
, E.
Blanco
, and R.
Ramírez del Solar
, J. Appl. Phys.
81
, 7739
(1997
).34.
E.
Salas
, R. J.
Jiménez-Riobóo
, C.
Prieto
, and A. G.
Every
, J. Appl. Phys.
110
, 023503
(2011
).35.
36.
E.
Salas
, R. J. J.
Riobóo
, A.
de Andrés
, and C.
Prieto
, Eur. Phys. J. B
75
, 151
(2010
).37.
V.
Kulikovsky
, V.
Vorlicek
, P.
Bohac
, R.
Ctvrtlik
, M.
Stranyanek
, A.
Dejneka
, and L.
Jastrabik
, Diamond Relat. Mater.
18
, 27
(2009
).38.
G. A. D.
Briggs
, Advances in Acoustic Microscopy
(Plenum Press
, New York
, 1995
), Vol. 1.39.
R. J. J.
Riobóo
, E.
Rodríguez-Cañas
, M.
Vila
, C.
Prieto
, F.
Calle
, T.
Palacios
, M. A.
Sánchez
, F.
Omnès
, B.
Assouar
, and O.
Elmazria
, J. Appl. Phys.
92
, 6868
(2002
).40.
C.
Sumanya
, J. D.
Comins
, and A. G.
Every
, J. Phys.: Conf. Ser.
92
, 012103
(2007
).41.
X.
Zhang
, J. D.
Comins
, A. G.
Every
, P. R.
Stoddart
, W.
Pang
, and T. E.
Derry
, Phys. Rev. B
58
, 13677
(1998
).42.
G.
Grimvall
, in Thermophysical Properties of Materials
, edited by E. P.
Wohlfarth
(North-Holland
, Amsterdam
, 1986
).43.
K. J.
McClellan
, F.
Chu
, J. M.
Roper
, and I.
Shindo
, J. Mater. Sci.
36
, 3403
(2001
).44.
V. M.
Mathew
, C. S.
Menon
, and K. P.
Jayachandran
, J. Mater. Sci.
37
, 5237
(2002
).45.
M. A.
Ramos
, J. A.
Moreno
, S.
Vieira
, C.
Prieto
, and J. F.
Fernández
, J. Non-Cryst. Solids
221
, 170
(1997
).46.
A.
de Bernabé
, C.
Prieto
, D.
Cáceres
, I.
Vergara
, A. G.
Every
, and H. E.
Fischer
, Phys. Status Solidi A
188
, 1023
(2001
).47.
R. J.
Arenz
, in Proceedings of the 2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics—Experimental Mechanics Applied to Advanced Materials Systems
, SEM, Orlando, 2005
.48.
B. A.
Auld
, Acoustic Fields and Waves in Solids
(Krieger Publishing Comp.
, Florida
, 1990
), Vol. 1.49.
J.
Birch
, J. C.
Buffet
, J.
Correa
, P.
van Esch
, B.
Guérard
, R.
Hall-Wilton
, C.
Höglund
, L.
Hultman
, A.
Khaplanov
, and F.
Piscitelli
, IEEE Trans. Nucl. Sci.
60
, 871
(2013
).© 2013 AIP Publishing LLC.
2013
AIP Publishing LLC
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