In this work, we present a nickel assisted electroless deposition and etching method for significant reduction of reflectivity of silicon by creating two-scale structured silicon surface. As the first step, the nano-texturization process was applied on planar Si wafers in order to optimize the process. Next, we applied this method for silicon surface with chemically prepared pyramids in order to produce a hierarchical (micron/nano) structure. We found that silicon wafers with hierarchical structure shown very low about 2.2% weighted reflection over broad wavelength range from 300 to 1100 nm, which is related with changes in surface morphology.

1.
K. Q.
Peng
and
S. T.
Lee
,
Adv. Mater.
23
,
198
(
2011
).
2.
R. B.
Stephens
and
G. D.
Cody
,
Thin Solid Films
45
,
19
(
1977
).
3.
J. I.
Gittleman
,
E. K.
Sichel
,
H. W.
Lehmann
, and
R.
Widmer
,
Appl. Phys. Lett.
35
,
742
(
1979
).
4.
J. S.
Yoo
,
I. O.
Parm
,
U.
Gangopadhyay
,
K.
Kim
,
S. K.
Dhungel
,
D.
Man-galaraj
, and
S. J.
Yi
,
Sol. Energy Mater. Sol. Cells
90
,
3085
(
2006
).
5.
D.
Qi
,
N.
Lu
,
H.
Xu
,
B.
Yang
,
C.
Huang
,
M.
Xu
,
L.
Gao
,
Z.
Wang
, and
L.
Chi
,
Langmuir
25
,
7769
(
2009
).
6.
Y.
Xiu
,
Y.
Liu
,
D. W.
Hess
, and
C. P.
Wong
,
Nanotechnology
21
,
155705
(
2010
).
7.
S.
Mokkapati
and
K. R.
Catchpole
,
J. Appl. Phys.
112
,
101101
(
2012
).
8.
Z.
Huang
,
N.
Geyer
,
P.
Werner
,
J.
de Boor
, and
U.
Gösele
,
Adv. Mater.
23
,
285
(
2011
).
9.
X.
Li
and
P. W.
Bohn
,
Appl. Phys. Lett.
77
,
2572
(
2000
).
10.
D. Z.
Dimitrova
and
C. H.
Du
,
Appl. Surf. Sci.
266
,
1
(
2013
).
11.
X.
Li
,
Curr. Opin. Solid State Mater. Sci.
16
,
71
(
2012
).
12.
J.
Ulbikas
,
J.
Boženko
,
J.
Paulauskas
,
V.
Čyras
,
L.
Jaraminė
,
T.
Lukštaraupis
,
D.
Andrijauskas
, and
V.
Juzumas
, “
p-n junction formation from sol-gel based source
,” in
Proceedings of the 27th European Photovoltaic Solar Energy Conference, Frankfurt, Germany, 24–28 September 2012
, pp.
1831
1834
.
13.
S.
Strehlke
,
S.
Bastide
,
J.
Guillet
, and
C.
Levy-Clement
,
Mater. Sci. Eng., B
69–70
,
81
(
2000
).
14.
B. S.
Richards
,
Sol. Energy Mater. Sol. Cells
79
,
369
(
2003
).
15.
H. M.
Branz
,
V. E.
Yost
,
S.
Ward
,
K. M.
Jones
,
B.
To
, and
P.
Stradins
,
Appl. Phys. Lett.
94
,
231121
(
2009
).
16.
M. J.
Huang
and
C. R.
Yang
,
Sol. Energy Mater. Sol. Cells
92
,
1352
(
2008
).
17.
T.
Dzhafarov
,
Silicon Solar Cells With Nanoporous Silicon Layer, Solar Cells-Research and Application Perspectives
, edited by
Professor Arturo
Morales-Acevedo
(
InTech
,
2013
), p.
42
.
18.
Y. R.
Lin
,
K. Y.
Lai
,
H. P.
Wang
, and
J. H.
He
,
Nanoscale
2
,
2765
(
2010
).
You do not currently have access to this content.