Effect of nano-patterned composite electrode and backswitching poling technique on dielectric and piezoelectric properties of 0.7 Pb(Mg1/3Nb2/3)O3-0.3 PbTiO3 was studied in this paper. Composite electrode consists of Mn nano-patterns with pitch size of 200 nm, and a blanket layer of Ti/Au was fabricated using a nanolithography based lift-off process, heat treatment, and metal film sputtering. Composite electrode and backswitching poling resulted in 27% increase of d33 and 25% increase of dielectric constant, and we believe that this is attributed to regularly defined nano-domains and irreversible rhombohedral to monoclinic phase transition in crystal. The results indicate that nano-patterned composite electrode and backswitching poling has a great potential in domain engineering of relaxor single crystals for advanced devices.
REFERENCES
1.
J.
Chen
and R.
Panda
, Proc.-IEEE Ultrason. Symp.
1
, 235
–240
(2005
).2.
W.
Hackenberger
, J.
Luo
, X. N.
Jiang
, K. A.
Snook
, P. W.
Rehrig
, S. J.
Zhang
, and T. R.
Shrout
, “Recent developments and applications of piezoelectric crystals
,” in Handbook of Advanced Dielectric, Piezoelectric and Ferroelectric Materials – Synthesis, Characterization and Applications
, edited by Z. G.
Ye
(Woodhead
, Cambridge, England
, 2008
), pp. 73
–100
.3.
S. E.
Park
and T. R.
Shrout
, IEEE Trans. Ultrason. Ferroelectr. Freq. Control
44
, 1140
(1997
).4.
P.
Sun
, Q.
Zhou
, B.
Zhu
, D.
Wu
, C.
Hu
, J. M.
Cannata
, J.
Tian
, P.
Han
, G.
Wang
, and K. K.
Shung
, IEEE Trans. Ultrason. Ferroelectr. Freq. Control
56
(12
), 2760
(2009
).5.
6.
S. C.
Woody
, S. T.
Smith
, X.
Jiang
, and P. W.
Rehrig
, Rev. Sci. Instrum.
76
, 075112
(2005
).7.
X.
Jiang
, P. W.
Rehrig
, W. S.
Hackenberger
, E.
Smith
, S.
Dong
, D.
Viehland
, J.
Moore
, Jr., and B.
Patrick
, Advanced Piezoelectric Single Crystal Based Actuators
(International Society for Optics and Photonics
, 2005
), pp. 253
–262
.8.
D.
Damjanovic
, J. Am. Ceram. Soc.
88
, 2663
(2005
).9.
S.
Zhang
and F.
Li
, J. Appl. Phys.
111
, 031301
(2012
).10.
Y.
Cho
, S.
Hashimoto
, N.
Odagawa
, K.
Tanaka
, and Y.
Hiranaga
, Nanotechnology
17
(7
), S137
(2006
).11.
Y.
Lu
, D. Y.
Jeong
, Z. Y.
Cheng
, Q.
Zhang
, H. S.
Luo
, Z. W.
Yin
, and D.
Viehland
, Appl. Phys. Lett.
78
(20
), 3109
(2001
).12.
S.
Wada
, S. E.
Park
, L. E.
Cross
, and T. R.
Shrout
, Ferroelectrics
221
(1
), 147
(1999
).13.
P.
Zubko
, N.
Stucki
, C.
Lichtensteiger
, and J. M.
Triscone
, Phys. Rev. Lett.
104
(18
), 187601
(2010
).14.
R.
Zhang
, B.
Jiang
, and W.
Cao
, J. Appl. Phys.
90
(7
), 3471
(2001
).15.
J.
Tian
, P.
Han
, X.
Huang
, H.
Pan
, J. F.
Carroll
, and D. A.
Payne
, Appl. Phys. Lett.
91
(22
), 222903
(2007
).16.
S. E.
Park
and T. R.
Shrout
, J. Appl. Phys.
82
, 1804
(1997
).17.
D.
Lin
, S.
Zhang
, Z.
Li
, F.
Li
, Z.
Xu
, S.
Wada
, J.
Luo
, and T. R.
Shrout
, J. Appl. Phys.
110
(8
), 084110
(2011
).18.
P.
Urenski
, M.
Lesnykh
, Y.
Rosenwaks
, G.
Rosenman
, and M.
Molotskii
, J. Appl. Phys.
90
, 1950
(2001
).19.
S.
Wada
, K.
Yako
, T.
Muraishi
, K.
Yokoh
, S. M.
Nam
, H.
Kakemoto
, and T.
Tsurumi
, Ferroelectrics
340
, 17
(2006
).20.
Y. J.
Yamashita
, N.
Yamamoto
, K.
Itsumi
, and Y.
Hosono
, Jpn. J. Appl. Phys.
50
, 09NC05
(2011
).21.
L. H.
Peng
, Y. C.
Fang
, and Y. C.
Lin
, Appl. Phys. Lett.
74
, 2070
(1999
).22.
V.
Shur
, E.
Rumyantsev
, R.
Batchko
, G.
Miller
, M.
Fejer
, and R.
Byer
, Ferroelectrics
221
, 157
(1999
).23.
R. G.
Batchko
, V. Y.
Shur
, M. M.
Fejer
, and R. L.
Byer
, Appl. Phys. Lett.
75
, 1673
(1999
).24.
V. Y.
Shur
, E.
Rumyantsev
, E.
Nikolaeva
, E.
Shishkin
, D.
Fursov
, R.
Batchko
, L.
Eyres
, M.
Fejer
, and R.
Byer
, Appl. Phys. Lett.
76
(2
), 143
(2000
).25.
H. I.
Smith
, Physica E (Amsterdam)
11
(2
), 104
(2001
).26.
Q.
Xie
, M.
Hong
, H.
Tan
, G.
Chen
, L.
Shi
, and T.
Chong
, J. Alloys Compd.
449
(1
), 261
(2008
).27.
S.
Zhang
, S. M.
Lee
, D. H.
Kim
, H. Y.
Lee
, and T. R.
Shrout
, J. Am. Ceram. Soc.
91
(2
), 683
(2008
).28.
V. Y.
Shur
, Frontiers of Ferroelectricity
(Springer
, 2007
), pp. 199
–210
.29.
M.
Kohli
, P.
Muralt
, and N.
Setter
, Appl. Phys. Lett.
72
(24
), 3217
(1998
).30.
Y.
Guo
, H.
Luo
, K.
Chen
, H.
Xu
, X.
Zhang
, and Z.
Yin
, J. Appl. Phys.
92
(10
), 6134
(2002
).31.
D.
Viehland
and Y. H.
Chen
, J. Appl. Phys.
88
(11
), 6696
(2000
).32.
Z.
Li
, Z.
Xu
, X.
Yao
, and Z.-Y.
Cheng
, J. Appl. Phys.
104
, 024112
(2008
).33.
Y.
Jin
, Y.
Wang
, A.
Khachaturyan
, J.
Li
, and D.
Viehland
, Phys. Rev. Lett.
91
(19
), 197601
(2003
).© 2013 AIP Publishing LLC.
2013
AIP Publishing LLC
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