Monte Carlo study of electron-beam penetration and backscattering in multi-walled carbon nanotube materials: The effect of different scattering models

A systematic study of electron-beam penetration and backscattering in multi-walled carbon nanotube (MWCNT) materials for beam energies of ∼0.3 to 30 keV is presented based on event-by-event Monte Carlo simulation of electron trajectories using state-of-the-art scattering cross sections. The importance of different analytic approximations for computing the elastic and inelastic electron-scattering cross sections for MWCNTs is emphasized. We offer a simple parameterization for the total and differential elastic-scattering Mott cross section, using appropriate modifications to the Browning formula and the Thomas-Fermi screening parameter. A discrete-energy-loss approach to inelastic scattering based on dielectric theory is adopted using different descriptions of the differential cross section. The sensitivity of electron penetration and backscattering parameters to the underlying scattering models is examined. Our simulations confirm the recent experimental backscattering data on MWCNT forests and, in particular, the steep increase of the backscattering yield at sub-keV energies as well as the sidewalls escape effect at high-beam energies.