The authors investigated the annealing effects on atomic structures and elemental compositions in a stacking structure, Si capping layer on Ge1−xSnx nanodots on Si substrate covered with ultrathin SiO2 film, to clarify the origin of intense photoluminescence at ∼0.8 eV from the structure, using transmission electron microscopy. After the annealing, it was found that decay of Ge1−xSnx nanodots, formation of SiOx precipitates embedded in Si-rich Si1−xGex layer at the Si cap/Si substrate interface, formation of SnO2 nanoparticles on the oxidized surface of the Si capping layer, and morphological change of dislocations in the Si capping layer occur. Reaction products that appear as a result of the movement of dislocations can be related to the origin of intense photoluminescence.

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