Surface and interface morphology of cerium oxide/carbon bilayers used as thin-film catalysts is studied by grazing-incidence small-angle x-ray scattering, scanning electron microscopy, and atomic-force microscopy, and the dependence of the structural parameters on the thicknesses of the constituting layers is investigated. The applicability of x-ray scattering and its advantages over standard analytical methods are discussed.
X-ray small-angle scattering from sputtered bilayers
S. Haviar, M. Dubau, I. Khalakhan, M. Vorokhta, I. Matolínová, V. Matolín, V. Valeš, J. Endres, V. Holý, M. Buljan, S. Bernstorff; X-ray small-angle scattering from sputtered bilayers. J. Appl. Phys. 14 January 2013; 113 (2): 024301. https://doi.org/10.1063/1.4773446
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