A multi-layered metal-insulator-metal plasmonic Mach-Zehnder interferometer (MZI) is proposed to work as an array for multiplexed sensing. The interference patterns based on wavelength modulation and intensity modulation are modeled analytically and numerically, showing a high figure of merit over 170 for intensity-interrogated sensing. The proposed structure can overcome the one-slit illumination limitation of previously reported single-layered double-slit plasmonic MZI and will enable portable, high-throughput and sensitive biosensing applications.
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