An end-Hall ion source is a cylindrical magnetized device of few centimeters in length able to generate an ion beam with a current of typically 1 A and ion energies in the range of 100 eV. This ion source does not use acceleration grids, has a relatively large ion beam divergence, and is well suited for ion assisted deposition processes. In this paper, a self-consistent two-dimensional quasi-neutral model of an end-Hall ion source is used to understand the parameters controlling the characteristics of the extracted. The model results underline the role of charge exchange collisions on beam properties. The calculated energy distribution functions reveal the existence of groups of slow ions and fast neutrals. Ion mean energy corresponds to roughly 60% of the discharge voltage, while the root mean square deviation from the mean energy corresponds to about 33% of the discharge voltage, as in experiments. The influence of the position of the electron emitting source on the ion angular distribution is also shown.
Skip Nav Destination
,
,
,
Article navigation
15 October 2012
Research Article|
October 19 2012
Numerical study of the characteristics of the ion and fast atom beams in an end-Hall ion source
N. Oudini;
N. Oudini
a)
1
Université de Toulouse, UPS, INPT, LAPLACE (Laboratoire Plasma et Conversion d'Energie)
, 118 route de Narbonne, F-31062 Toulouse Cedex 9, France
Search for other works by this author on:
L. Garrigues;
L. Garrigues
b)
1
Université de Toulouse, UPS, INPT, LAPLACE (Laboratoire Plasma et Conversion d'Energie)
, 118 route de Narbonne, F-31062 Toulouse Cedex 9, France
2
CNRS, LAPLACE
, F-31062 Toulouse, France
Search for other works by this author on:
G. J. M. Hagelaar;
G. J. M. Hagelaar
1
Université de Toulouse, UPS, INPT, LAPLACE (Laboratoire Plasma et Conversion d'Energie)
, 118 route de Narbonne, F-31062 Toulouse Cedex 9, France
2
CNRS, LAPLACE
, F-31062 Toulouse, France
Search for other works by this author on:
J. P. Boeuf
J. P. Boeuf
1
Université de Toulouse, UPS, INPT, LAPLACE (Laboratoire Plasma et Conversion d'Energie)
, 118 route de Narbonne, F-31062 Toulouse Cedex 9, France
2
CNRS, LAPLACE
, F-31062 Toulouse, France
Search for other works by this author on:
N. Oudini
1,a)
L. Garrigues
1,2,b)
G. J. M. Hagelaar
1,2
J. P. Boeuf
1,2
1
Université de Toulouse, UPS, INPT, LAPLACE (Laboratoire Plasma et Conversion d'Energie)
, 118 route de Narbonne, F-31062 Toulouse Cedex 9, France
2
CNRS, LAPLACE
, F-31062 Toulouse, France
a)
Present address: Laboratoire de Physique des Plasmas (LPP), Ecole Polytechnique, Palaiseau, France.
b)
E-mail address: [email protected].
J. Appl. Phys. 112, 083301 (2012)
Article history
Received:
July 04 2012
Accepted:
September 25 2012
Citation
N. Oudini, L. Garrigues, G. J. M. Hagelaar, J. P. Boeuf; Numerical study of the characteristics of the ion and fast atom beams in an end-Hall ion source. J. Appl. Phys. 15 October 2012; 112 (8): 083301. https://doi.org/10.1063/1.4759314
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
A step-by-step guide to perform x-ray photoelectron spectroscopy
Grzegorz Greczynski, Lars Hultman
Phase-change materials and their applications
Nelson Sepúlveda, Yunqi Cao
Decoding diffraction and spectroscopy data with machine learning: A tutorial
D. Vizoso, R. Dingreville
Related Content
Physics and modeling of an end-Hall (gridless) ion source
J. Appl. Phys. (April 2011)
Development of magnetostrictive inkjet head for liquid droplet formation
J. Appl. Phys. (March 2012)
The Langmuir probe system in the Wendelstein 7-X test divertor
Rev. Sci. Instrum. (June 2020)
Reactive HiPIMS deposition of SiO2/Ta2O5 optical interference filters
J. Appl. Phys. (December 2014)
Low-temperature supersonic boundary layer control using repetitively pulsed magnetohydrodynamic forcing
Physics of Fluids (October 2005)