Removal of metals and ceramics by combined effects of micro liquid jet and laser pulse

In this work, we analyze a hybrid laser/liquid jet micromachining process for several metals and ceramics based on the optical breakdown of a microdroplet. In the process, materials are removed by the combined effects of a laser pulse and a high-speed pulsed microjet ejected from the microdroplet. The opto-hydrodynamic phenomena occurring during this process and the interaction of the laser/liquid jet with various materials, including copper, aluminum, stainless steel, alumina, and boron nitride, are investigated experimentally. The results show that the laser/liquid jet can remove the materials with substantially increased removal rates and reduced thermal side effects compared with the conventional pulsed laser ablation process. Visualization of the process reveals that the materials are partially ablated and melted by the laser pulse during the early stage of the process and that the molten material is subsequently eliminated by the hydrodynamic impact of the liquid jet.