The influence of oxygen precipitation on copper precipitation in Czochralski silicon was investigated by means of defect etching, optical microscopy, and Fourier transform infrared spectrometer. It was found that the density, distribution, and morphology of copper precipitation can be influenced by oxygen precipitate sequence significantly. The spherelike copper precipitates uniformly distributed along the whole cross section were generated only in the specimens oxygen precipitation at the very beginning of the heating treatment. While in the specimens, copper precipitation firstly, the large star-like precipitate colonies was generated due to the repeated nucleation mechanism. Additionally, the bulk microdefects (BMDs) density of the latter was higher than the former. The influence of oxygen precipitation nuclei, which was formed during 750 °C for 8 h annealing, on copper precipitation was similar to that of oxygen precipitation, indicated that the initial density and distribution of oxygen precipitation nuclei were the main factors to decided copper precipitation.

Topics
Thermodynamic states and processes, Crystalline solids, Optical microscopy, Transition metals, Chemical elements, Crystallographic defects, Crystallography, Infrared spectroscopy, Supersaturation, Potential energy barrier
1.
C.
 
Flink
,
H.
 
Feick
,
S. A.
 
McHugo
,
W.
 
Seifert
,
H.
 
Hieslmair
,
T.
 
Heiser
,
A. A.
 
Istratov
, and
E. R.
 
Weber
,
Phys. Rev. Lett.
 
85
,
4900
(
2000
).
https://doi.org/10.1103/PhysRevLett.85.4900
Google Scholar
Crossref
Search ADS
PubMed
 
2.
A. A.
 
Istratov
,
C.
 
Flink
,
H.
 
Hieslmair
,
S. A.
 
McHugo
, and
E. R.
 
Weber
,
Mater. Sci. Eng., B
 
B72
,
99
(
2000
).
https://doi.org/10.1016/S0921-5107(99)00514-0
Google Scholar
Crossref
Search ADS
 
3.
R.
 
Sachdeva
,
A. A.
 
Istratov
, and
E. R.
 
Weber
,
Appl. Phys. Lett.
 
79
,
2937
(
2001
).
https://doi.org/10.1063/1.1415350
Google Scholar
Crossref
Search ADS
 
4.
B.
 
Shen
,
T.
 
Sekiguchi
,
R.
 
Zhang
,
Y.
 
Shi
,
H.
 
Shi
,
K.
 
Yang
,
Y.
 
Zheng
, and
K.
 
Sumino
,
Jpn. J. Appl. Phys., Part 1
 
35
,
3301
(
1996
).
https://doi.org/10.1143/JJAP.35.3301
Google Scholar
Crossref
Search ADS
 
5.
H.
 
Gotischalk
,
Phys. Status Solidi A
 
137
,
447
(
1993
).
https://doi.org/10.1002/pssa.2211370217
Google Scholar
Crossref
Search ADS
 
6.
B.
 
Shen
,
T.
 
Sekiguchi
,
R.
 
Zhang
,
Y.
 
Shi
,
Y. D.
 
Zheng
, and
K.
 
Sumino
,
Phys. Status Solidi A
 
155
,
321
(
1996
).
https://doi.org/10.1002/pssa.2211550205
Google Scholar
Crossref
Search ADS
 
7.
J. L.
 
Maurice
 and
C.
 
Colliex
,
Appl. Phys. Lett.
 
55
(
3
),
241
–
243
(
1989
).
https://doi.org/10.1063/1.101919
Google Scholar
Crossref
Search ADS
 
8.
J. F.
 
Hamet
,
R.
 
Abdelaoui
, and
G.
 
Nouet
,
J. Appl. Phys.
 
68
(
2
),
638
–
645
(
1990
).
https://doi.org/10.1063/1.346792
Google Scholar
Crossref
Search ADS
 
9.
R.
 
Rizk
,
X.
 
Portier
,
G.
 
Allais
, and
G.
 
Nouet
,
J. Appl. Phys.
 
76
(
2
),
952
–
958
(
1994
).
https://doi.org/10.1063/1.357773
Google Scholar
Crossref
Search ADS
 
10.
K.
 
Ryoo
,
R.
 
Drosd
, and
W.
 
Wood
,
J. Appl. Phys.
 
63
(
9
),
4440
–
4443
(
1988
).
https://doi.org/10.1063/1.340163
Google Scholar
Crossref
Search ADS
 
11.
V.
 
Higgs
,
M.
 
Goulding
,
A.
 
Brinklow
, and
P.
 
Kightley
,
Appl. Phys. Lett.
 
60
(
11
),
1369
–
1371
(
1992
).
https://doi.org/10.1063/1.107293
Google Scholar
Crossref
Search ADS
 
12.
A.
 
Borghesi
,
B.
 
Pivac
,
A.
 
Sassella
, and
A.
 
Stella
,
J. Appl. Phys.
 
77
,
4196
(
1995
).
https://doi.org/10.1063/1.359479
Google Scholar
Crossref
Search ADS
 
13.
T. Y.
 
Tan
,
E. E.
 
Gardner
, and
W. K.
 
Tice
,
Appl. Phys. Lett.
 
30
(
4
),
175
(
1977
).
https://doi.org/10.1063/1.89340
Google Scholar
Crossref
Search ADS
 
14.
M. L.
 
Polignano
,
G. F.
 
Cerofolini
,
H.
 
Bender
, and
C.
 
Claeys
,
J. Appl. Phys.
 
64
(
2
),
869
(
1988
).
https://doi.org/10.1063/1.341939
Google Scholar
Crossref
Search ADS
 
15.
S. M.
 
Hu
 and
W. J.
 
Patrick
,
J. Appl. Phys.
 
46
(
5
),
1869
(
1975
).
https://doi.org/10.1063/1.321883
Google Scholar
Crossref
Search ADS
 
16.
S. M.
 
Hu
,
Appl. Phys. Lett.
 
31
(
2
),
53
(
1977
).
https://doi.org/10.1063/1.89580
Google Scholar
Crossref
Search ADS
 
17.
Z. Q.
 
Xi
,
D. R.
 
Yang
,
J.
 
Chen
,
J.
 
Xu
,
Y. J.
 
Ji
,
D. L.
 
Que
, and
H. J.
 
Moeller
,
Semicond. Sci. Technol.
 
19
,
299
(
2004
).
https://doi.org/10.1088/0268-1242/19/3/002
Google Scholar
Crossref
Search ADS
 
18.
A. A.
 
Istratova
 and
E. R.
 
Weber
,
J. Electrochem. Soc.
 
149
,
G21
(
2002
).
https://doi.org/10.1149/1.1421348
Google Scholar
Crossref
Search ADS
 
19.
Z. Q.
 
Xi
,
D. R.
 
Yang
,
J.
 
Xu
,
Y. J.
 
Ji
,
D. L.
 
Que
, and
H. J.
 
Moeller
,
Appl. Phys. Lett.
 
83
,
3048
(
2003
).
https://doi.org/10.1063/1.1617377
Google Scholar
Crossref
Search ADS
 
20.
S. A.
 
McHugo
,
A.
 
Mohammed
,
A. C.
 
Thompson
,
B.
 
Lai
, and
Z.
 
Cai
,
J. Appl. Phys.
 
91
,
6396
(
2002
).
https://doi.org/10.1063/1.1471944
Google Scholar
Crossref
Search ADS
 
21.
A. A.
 
Istratova
 and
E. R.
 
Weber
,
Appl. Phys. A: Mater. Sci. Process.
 
A66
,
123
(
1998
)
https://doi.org/10.1007/s003390050649
.
Google Scholar
Crossref
Search ADS
 
22.
J.
 
Xu
,
D. R.
 
Yang
, and
H. J.
 
Moeller
,
J. Appl. Phys.
 
102
,
114506
(
2007
).
https://doi.org/10.1063/1.2821311
Google Scholar
Crossref
Search ADS
 
23.
J.
 
Xu
,
W. Q.
 
Wang
,
D. R.
 
Yang
, and
H. J.
 
Moeller
,
J. Alloys Compd.
 
478
,
758
–
762
(
2009
).
https://doi.org/10.1016/j.jallcom.2008.11.148
Google Scholar
Crossref
Search ADS
 
24.
K.
 
Sueoka
,
N.
 
Ikeda
,
T.
 
Yamamoto
, and
S.
 
Kobayashi
,
Jpn. J. Appl. Phys. Part 1
 
33
,
1507
(
1994
).
https://doi.org/10.1143/JJAP.33.L1507
Google Scholar
Crossref
Search ADS
 
© 2012 American Institute of Physics.
2012
American Institute of Physics
You do not currently have access to this content.