GaP-layers on Si(001) can serve as pseudo-substrates for a variety of novel optoelectronic devices. The quality of the GaP nucleation layer is a crucial parameter for the performance of such devices. Especially, anti-phase domains (APDs) evolving at mono-atomic steps on the Si-surface can affect the quality of a layer adversely. The size, shape, and possible charge of the APDs and their boundaries depend on the polarity of the surrounding crystal. The observed polarity of the GaP is caused by the A-type double step configuration of the Si-surface reconstruction prior to GaP growth and the prevalent binding of Ga to Si under optimized growth conditions. The polarity of the GaP-layer and hence the atomic configuration at the Si-III/V interface can be changed by altering the growth conditions. With this knowledge, defect-free GaP/Si(001) templates for III/V device integration on Si-substrates can be grown.
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15 April 2012
Research Article|
April 30 2012
GaP heteroepitaxy on Si(001): Correlation of Si-surface structure, GaP growth conditions, and Si-III/V interface structure
A. Beyer;
A. Beyer
a)
Material Sciences Center and Faculty of physics,
Philipps-Universität
, Hans-Meerwein Strasse, D-35032 Marburg, Germany
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J. Ohlmann;
J. Ohlmann
Material Sciences Center and Faculty of physics,
Philipps-Universität
, Hans-Meerwein Strasse, D-35032 Marburg, Germany
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S. Liebich;
S. Liebich
Material Sciences Center and Faculty of physics,
Philipps-Universität
, Hans-Meerwein Strasse, D-35032 Marburg, Germany
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H. Heim;
H. Heim
Material Sciences Center and Faculty of physics,
Philipps-Universität
, Hans-Meerwein Strasse, D-35032 Marburg, Germany
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G. Witte;
G. Witte
Material Sciences Center and Faculty of physics,
Philipps-Universität
, Hans-Meerwein Strasse, D-35032 Marburg, Germany
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W. Stolz;
W. Stolz
Material Sciences Center and Faculty of physics,
Philipps-Universität
, Hans-Meerwein Strasse, D-35032 Marburg, Germany
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K. Volz
K. Volz
Material Sciences Center and Faculty of physics,
Philipps-Universität
, Hans-Meerwein Strasse, D-35032 Marburg, Germany
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a)
Author to whom correspondence should be addressed. Electronic mail: andreas.beyer@physik.uni-marburg.de. Telephone: (49) 6421-28-22297. Fax: (49) 6421-28-28935.
J. Appl. Phys. 111, 083534 (2012)
Article history
Received:
December 21 2011
Accepted:
March 23 2012
Citation
A. Beyer, J. Ohlmann, S. Liebich, H. Heim, G. Witte, W. Stolz, K. Volz; GaP heteroepitaxy on Si(001): Correlation of Si-surface structure, GaP growth conditions, and Si-III/V interface structure. J. Appl. Phys. 15 April 2012; 111 (8): 083534. https://doi.org/10.1063/1.4706573
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