This paper reports the development of integrated micro-sensors consisting of 1 -µm-thick magnetostrictive cantilevers or bridges with 500 µm in length and conducting interrogation elements. The thin films are fabricated by sputter deposition of NiFe doped with B and Mo, and the magnetic properties are enhanced by field annealing, resulting in a coercivity of 2.4 Oe. In operation, an alternating current applied to the interrogation elements magnetizes the magnetostrictive structures. The longitudinal resonant frequency is detected as an impedance change of the interrogation elements. The magnetostrictive micro-beams provide high resonant frequencies—2.95 MHz for the cantilever and 5.46 MHz for the bridge—which can be exploited to develop sensors of high sensitivity.
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1 April 2012
PROCEEDINGS OF THE 55TH ANNUAL CONFERENCE ON MAGNETISM AND MAGNETIC MATERIALS
14-18 November 2010
Atlanta, Georgia
Research Article|
Magnetism and Magnetic Materials|
March 09 2012
Microfabrication of magnetostrictive beams based on NiFe film doped with B and Mo for integrated sensor systems
A. Alfadhel;
A. Alfadhel
a)
1
Division of Physical Sciences and Engineering, King Abdullah University of Science and Technology
, Thuwal 23955, Saudi Arabia
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Y. Gianchandani;
Y. Gianchandani
2
Department of Electrical Engineering and Computer Science, University of Michigan
, Ann Arbor, Michigan 48109, USA
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J. Kosel
J. Kosel
1
Division of Physical Sciences and Engineering, King Abdullah University of Science and Technology
, Thuwal 23955, Saudi Arabia
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A. Alfadhel
1,a)
Y. Gianchandani
2
J. Kosel
1
1
Division of Physical Sciences and Engineering, King Abdullah University of Science and Technology
, Thuwal 23955, Saudi Arabia
2
Department of Electrical Engineering and Computer Science, University of Michigan
, Ann Arbor, Michigan 48109, USA
a)
Electronic mail: [email protected].
J. Appl. Phys. 111, 07E515 (2012)
Article history
Received:
October 11 2011
Accepted:
November 30 2011
Citation
A. Alfadhel, Y. Gianchandani, J. Kosel; Microfabrication of magnetostrictive beams based on NiFe film doped with B and Mo for integrated sensor systems. J. Appl. Phys. 1 April 2012; 111 (7): 07E515. https://doi.org/10.1063/1.3679016
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