Passive and remote sensing technology has many potential applications in implantable devices, automation, or structural monitoring. In this paper, a tri-layer thin film giant magnetoimpedance (GMI) sensor with the maximum sensitivity of 16%/Oe and GMI ratio of 44% was combined with a two-port surface acoustic wave (SAW) transponder on a common substrate using standard microfabrication technology resulting in a fully integrated sensor for passive and remote operation. The implementation of the two devices has been optimized by on-chip matching circuits. The measurement results clearly show a magnetic field response at the input port of the SAW transponder that reflects the impedance change of the GMI sensor.

1.
E.
Sardini
and
M.
Serpelloni
,
Sensors
9
,
943
(
2009
).
2.
E. L.
Tan
,
B. D.
Pereles
,
R.
Shao
,
J.
Ong
, and
K. G.
Ong
,
Smart Mater. Struct.
17
,
025015
(
2008
).
3.
S.
Traxler
,
J.
Kosel
,
H.
Pfützner
,
E.
Kaniusas
,
L.
Mehnen
, and
I.
Giouroudi
,
Sens. Actuators, A
142
,
491
(
2008
).
4.
J.
Kosel
,
H.
Pfützner
,
L.
Mehnen
,
E.
Kaniusas
,
T.
Meydan
,
M.
Vázquez
,
M.
Rohn
,
A. M.
Merlo
, and
B.
Marquardt
,
Sens. Actuators, A
123
,
349
(
2005
).
5.
L. V.
Paninaand
and
K.
Mohri
,
Appl. Phys. Lett.
65
,
1189
(
1994
).
6.
L. V.
Panina
,
K.
Mohri
,
K.
Bushida
,
M.
Noda
, and
T.
Uchiyama
,
IEEE Trans. Magn.
31
,
1249
(
1995
).
7.
L.
Chen
,
Y.
Zhou
,
C.
Lei
, and
Z.-M.
Zhou
,
Mater. Sci. Eng., B
172
,
101
(
2010
).
8.
B.
Li
and
J.
Kosel
,
J. Appl. Phys.
109
,
07E519
(
2011
).
9.
I.
Giouroudi
,
H.
Hauser
,
G.
Daalmans
,
G.
Rieger
, and
J.
Wecker
,
J. Electr. Eng
.
55
,
11
(
2004
).
10.
I.
Giouroudi
,
H.
Hauser
,
L.
Musiejovsky
, and
J.
Steurer
,
J. Appl. Phys.
97
,
10M109
(
2005
).
11.
F.
Blanc-Béguin
,
S.
Nabily
,
J.
Gieraltowski
,
A.
Turzo
,
S.
Querellou
, and
P. Y.
Salaun
,
J. Magn. Magn. Mater.
321
,
192
(
2009
).
12.
H.
Yang
,
L.
Chen
,
C.
Lei
,
J.
Zhang
,
D.
Li
,
Z.-M.
Zhou
,
C.-C.
Bao
,
H.-Y.
Hu
,
X.
Chen
,
F.
Cui
,
S.-X.
Zhang
,
Y.
Zhou
, and
D.-X.
Cui
,
Appl. Phys. Lett.
97
,
043702
(
2010
).
13.
I.
Giouroudi
,
H.
Hauser
,
L.
Musiejovsky
, and
J.
Steurer
,
J. Appl. Phys.
99
,
08D906
(
2006
).
14.
I.
Giouroudi
,
H.
Hauser
,
L.
Musiejovsky
, and
J.
Steurer
,
IEEE Sens. J.
6
,
970
(
2006
).
15.
T. M.
Reeder
and
D. E.
Cullen
,
Proc. IEEE
64
,
754
(
1976
).
16.
K.
Lee
,
W.
Wang
,
G.
Kim
, and
S.
Yang
,
Jpn. J. Appl. Phys., Part 1
45
,
5974
(
2006
).
17.
A.
Pohl
,
IEEE Trans. Instrum. Meas.
46
,
1031
(
1997
).
18.
G. S.
Calabrese
,
H.
Wohltjen
, and
M. K.
Roy
,
Anal. Chem.
59
,
833
(
1987
).
19.
M.
Kadota
,
S.
Ito
,
Y.
Ito
,
T.
Hada
, and
K.
Okaguchi
,
Jpn. J. Appl. Phys.
50
,
07HD07
(
2011
).
20.
S. M.
Hanna
,
IEEE Trans. Ultrason. Ferroelectr. Freq. Control
34
,
191
(
1987
).
21.
H.
Hauser
,
R.
Steindl
,
C.
Hausleitner
,
A.
Pohl
, and
J.
Nicolics
,
IEEE Trans. Instrum. Meas.
49
,
648
(
2000
).
22.
H.
Hauser
,
J.
Steurer
,
J.
Nicolics
,
L.
Musiejovsky
, and
I.
Giouroudi
,
J. Electr. Eng.
57
,
9
(
2006
).
23.
H.
Al Rowais
,
B.
Li
,
C.
Liang
,
S.
Green
,
Y.
Gianchandani
, and
J.
Kosel
,
J. Appl. Phys.
109
,
07E524
(
2011
).
24.
L. V.
Panina
,
K.
Mohri
, and
T.
Uchiyama
,
Physica A
241
,
429
(
1997
).
You do not currently have access to this content.