We report on suspended single-layer graphene deposition by a transfer-printing approach based on polydimethylsiloxane stamps. The transfer printing method allows the exfoliation of graphite flakes from a bulk graphite sample and their residue-free deposition on a silicon dioxide substrate. This deposition system creates a “blistered” graphene surface due to strain induced by the transfer process itself. Single-layer-graphene deposition and its blistering on the substrate are demonstrated by a combination of Raman spectroscopy, scanning electron microscopy, and atomic-force microscopy measurements. Finally, we demonstrate that blister-like suspended graphene are self-supporting single-layer structures and can be flattened by employing a spatially resolved direct-lithography technique based on electron-beam induced etching.
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15 September 2011
Research Article|
September 19 2011
Self-assembly and electron-beam-induced direct etching of suspended graphene nanostructures
Sarah Goler;
Sarah Goler
1Laboratorio NEST - Scuola Normale Superiore, and
Istituto Nanoscienze - CNR
, Piazza San Silvestro 12, I-56127 Pisa, Italy
2Center for Nanotechnology Innovation @ NEST,
Istituto Italiano di Tecnologia
, Piazza San Silvestro 12, 56127 Pisa, Italy
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Vincenzo Piazza;
Vincenzo Piazza
2Center for Nanotechnology Innovation @ NEST,
Istituto Italiano di Tecnologia
, Piazza San Silvestro 12, 56127 Pisa, Italy
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Stefano Roddaro;
Stefano Roddaro
1Laboratorio NEST - Scuola Normale Superiore, and
Istituto Nanoscienze - CNR
, Piazza San Silvestro 12, I-56127 Pisa, Italy
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Vittorio Pellegrini;
Vittorio Pellegrini
1Laboratorio NEST - Scuola Normale Superiore, and
Istituto Nanoscienze - CNR
, Piazza San Silvestro 12, I-56127 Pisa, Italy
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Fabio Beltram;
Fabio Beltram
1Laboratorio NEST - Scuola Normale Superiore, and
Istituto Nanoscienze - CNR
, Piazza San Silvestro 12, I-56127 Pisa, Italy
2Center for Nanotechnology Innovation @ NEST,
Istituto Italiano di Tecnologia
, Piazza San Silvestro 12, 56127 Pisa, Italy
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Pasqualantonio Pingue
Pasqualantonio Pingue
a)
1Laboratorio NEST - Scuola Normale Superiore, and
Istituto Nanoscienze - CNR
, Piazza San Silvestro 12, I-56127 Pisa, Italy
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a)
Electronic mail: pingue@sns.it.
J. Appl. Phys. 110, 064308 (2011)
Article history
Received:
July 08 2011
Accepted:
August 05 2011
Citation
Sarah Goler, Vincenzo Piazza, Stefano Roddaro, Vittorio Pellegrini, Fabio Beltram, Pasqualantonio Pingue; Self-assembly and electron-beam-induced direct etching of suspended graphene nanostructures. J. Appl. Phys. 15 September 2011; 110 (6): 064308. https://doi.org/10.1063/1.3633260
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