Mass analysis was carried out on neutral species in the downstream region of Ar/CH4 plasmas. The ionization of the neutral species by Li+ attachment, which can inhibit the fragmentation accompanied by ionization in most cases, successfully led to the observation of high-mass neutral hydrocarbons containing up to twenty-seven carbon atoms. Pure Ar and Ar/H2 plasmas were also used to investigate the influence of sputtering of an amorphous hydrocarbon (a-C:H) film deposited during the generation of the Ar/CH4 plasmas. In addition, time dependence of intensity in several neutral species accompanied by the growth of the a-C:H film and its CH4 partial pressure dependence were observed for the first time. On the basis of the present experimental results, the desorption of high-mass neutral molecules from the film to the gas phase is concluded.
REFERENCES
1.
J.-M.
Liu
, W.-T.
Juan
, J.-W.
Hsu
, Z.-H.
Huang
, and L.
I
, Plasma Phys. Control. Fusion
41
, A47
(1999
).2.
Ch.
Hollenstein
, Plasma Phys. Control. Fusion
42
, R93
(2000
).3.
Y.
Watanabe
, J. Phys. D: Appl. Phys.
39
, R329
(2006
).4.
J.
Berndt
, E.
Kovačević
, I.
Stefanović
, O.
Stepanović
, S. H.
Hong
, L.
Boufendi
, and J.
Winter
, Contrib. Plasma Phys.
49
, 107
(2009
).5.
F.
Verheest
, Plasma Phys. Control. Fusion
41
, A445
(1999
).6.
K.
Ostrikov
, Rev. Mod. Phys.
77
, 489
(2005
).7.
H.
Hahn
and R.
Averback
, J. Appl. Phys.
67
, 1113
(1990
).8.
T.
Kakeya
, K.
Koga
, M.
Shiratani
, Y.
Watanabe
, and M.
Kondo
, Thin Solid Films
506–607
, 288
(2006
).9.
K.
Furuya
, Y.
Hirowatari
, T.
Ishioka
, and A.
Harata
, Chem. Lett.
36
, 1088
(2007
).10.
D. A.
Jefferson
, Phil. Trans. Royal Soc. London A
358
, 2683
(2000
).11.
N.
Collings
and B. R.
Graskow
, Phil. Trans. Royal Soc. London A
358
, 2611
(2000
).12.
N. S
Holmes
, Atmos. Environ.
41
, 2183
(2007
).13.
R. K.
Janev
, in Atomic and Molecular Processes in Fusion Edge Plasmas
, edited by R. K.
Janev
(Plenum
, New York
, 1995
), p. 1
.14.
J.
Winter
, Phys. Plasmas
7
, 3862
(2000
).15.
M.
Rubel
, M.
Cecconello
, J. A.
Malmberg
, G.
Sergienko
, W.
Biel
, J. R.
Drake
, A.
Hedqvist
, A.
Huber
, and V.
Philipps
, Nucl. Fusion
41
, 1087
(2001
).16.
N.
Ohno
, Y.
Kobayashi
, T.
Sugimoto
, and S.
Takamura
, J. Nucl. Mater.
337–339
, 35
(2005
).17.
G.
Smolinsky
and M. J.
Vasile
, Int. J. Mass Spectrom. Ion Phys.
16
, 137
(1975
).18.
M. J.
Vasile
and G.
Smolinsky
, Int. J. Mass Spectrom. Ion Phys.
18
, 179
(1975
).19.
R. N.
Rudolph
and J. H.
Moore
, Plasma Chem. Plasma Process.
10
, 451
(1990
).20.
C.
Hollenstein
, W.
Schwarzenbach
, A. A.
Howling
, C.
Courteille
, J.-L.
Dorier
, and L.
Sansonnens
, J. Vac. Sci. Technol. A
14
, 535
(1996
).21.
C.
Deschenaux
, A.
Affolter
, D.
Magni
, C.
Hollenstein
, and P.
Fayet
, J. Phys. D: Appl. Phys.
32
, 1876
(1999
).22.
H. T.
Do
, G.
Thieme
, M.
Fröhlich
, H.
Kersten
, and R.
Hippler
, Contrib. Plasma Phys.
45
, 378
(2005
).23.
J.
Benedikt
, A.
Consoli
, M.
Schulze
, and A.
von Keudell
, J. Phys. Chem. A
111
, 10453
(2007
).24.
K.
De Bleecker
, A.
Bogaerts
, and W.
Goedheer
, Phys. Rev. E
73
, 026405
(2006
).25.
M.
Mao
, J.
Benedikt
, A.
Consoli
, and A.
Bogaerts
, J. Phys. D: Appl. Phys.
41
, 225201
(2008
).26.
T.
Nagai
, Z.
Feng
, A.
Kono
, and F.
Shoji
, Phys. Plasmas
15
, 050702
(2008
).27.
D. A.
Ariskin
, I. V.
Schweigert
, A. L.
Alexandrov
, A.
Bogaerts
, and F. M.
Peeters
, J. Appl. Phys.
105
, 063305
(2009
).28.
Y.
Shiokawa
, M.
Nakamura
, H.
Maruyama
, Y.
Hirano
, Y.
Taneda
, M.
Inoue
, and T.
Fujii
, Bunseki Kagaku
53
, 475
(2004
) [in Japanese].29.
H.
Okumura
, K.
Furuya
, and A.
Harata
, J. Phys. D: Appl. Phys.
42
, 065205
(2009
).30.
M.
Sabidó
, J. M.
Lucas
, J.
de Andrés
, J.
Sogas
, M.
Albertí
, A.
Aguilar
, D.
Bassi
, D.
Ascenzi
, P.
Franceschi
, P.
Tosi
, and F.
Pirani
, Chem. Phys. Lett.
442
, 28
(2007
).31.
J. M.
Lucas
, J.
de Andrés
, E.
López
, M.
Albertí
, J. M.
Bofill
, D.
Bassi
, D.
Ascenzi
, P.
Tosi
, and A.
Aguilar
, J. Phys. Chem. A
113
, 14766
(2009
).32.
J. M.
Lucas
, J.
de Andrés
, J.
Sogas
, M.
Albertí
, J. M.
Bofill
, D.
Bassi
, D.
Ascenzi
, P.
Tosi
, and A.
Aguilar
, J. Chem. Phys.
131
, 024306
(2009
).33.
J. M.
Lucas
, J.
de Andrés
, M.
Albertí
, J. M.
Bofill
, D.
Bassi
, and A.
Aguilar
, Phys. Chem. Chem. Phys.
12
, 13646
(2010
).34.
P. C.
Selvin
and T.
Fujii
, Rev. Sci. Instrum.
72
, 2248
(2001
).35.
M.
Nakamura
, Y.
Hirano
, Y.
Shiokawa
, M.
Takayanagi
, and M.
Nakata
, J. Vac. Sci. Tech. A
24
, 385
(2006
).36.
K.
Furuya
, S.
Yukita
, H.
Okumura
, and A.
Harata
, Chem. Lett.
34
, 224
(2005
).37.
K.
Furuya
, A.
Ide
, H.
Okumura
, and A.
Harata
, Phys. Chem. Chem. Phys.
11
, 934
(2009
).38.
K.
Furuya
, S.
Yukita
, and A.
Harata
, Jpn. J. Appl. Phys.
45
, 5219
(2006
).39.
I.
Watanabe
and T.
Okumura
, Jpn. J. Appl. Phys.
25
, 1851
(1986
).40.
A. E.
Gorodetsky
, R. K.
Zalavutdinov
, I. I.
Arkhipov
, V. K.
Alimov
, A. P.
Zakharov
, S. P.
Vnukov
, V. L.
Bukhovets
, and I. G.
Varshavskaya
, J. Nucl. Mater.
313–316
, 460
(2003
).41.
M. J.
Frisch
, G. W.
Trucks
, H. B.
Schlegel
, G. E.
Scuseria
, M. A.
Robb
, J. R.
Cheeseman
, J. A.
Montgomery
, Jr., T.
Vreven
, K. N.
Kudin
, J. C.
Burant
, J. M.
Millam
, S. S.
Iyengar
, J.
Tomasi
, V.
Barone
, B.
Mennucci
, M.
Cossi
, G.
Scalmani
, N.
Rega
, G. A.
Petersson
, H.
Nakatsuji
, M.
Hada
, M.
Ehara
, K.
Toyota
, R.
Fukuda
, J.
Hasegawa
, M.
Ishida
, T.
Nakajima
, Y.
Honda
, O.
Kitao
, H.
Nakai
, M.
Klene
, X.
Li
, J. E.
Knox
, H. P.
Hratchian
, J. B.
Cross
, V.
Bakken
, C.
Adamo
, J.
Jaramillo
, R.
Gomperts
, R. E.
Stratmann
, O.
Yazyev
, A. J.
Austin
, R.
Cammi
, C.
Pomelli
, J. W.
Ochterski
, P. Y.
Ayala
, K.
Morokuma
, G. A.
Voth
, P.
Salvador
, J. J.
Dannenberg
, V. G.
Zakrzewski
, S.
Dapprich
, A. D.
Daniels
, M. C.
Strain
, O.
Farkas
, D. K.
Malick
, A. D.
Rabuck
, K.
Raghavachari
, J. B.
Foresman
, J. V.
Ortiz
, Q.
Cui
, A. G.
Baboul
, S.
Clifford
, J.
Cioslowski
, B. B.
Stefanov
, G.
Liu
, A.
Liashenko
, P.
Piskorz
, I.
Komaromi
, R. L.
Martin
, D. J.
Fox
, T.
Keith
, M. A.
Al-Laham
, C. Y.
Peng
, A.
Nanayakkara
, M.
Challacombe
, P. M. W.
Gill
, B.
Johnson
, W.
Chen
, M. W.
Wong
, C.
Gonzalez
, and J. A.
Pople
, Gaussian 03 (Revision E. 01)
(Gaussian, Inc.
, Wallingford CT
, 2004
).42.
C. W.
Bauschlicher
, Jr. and H.
Partridge
, J. Chem. Phys.
103
, 1788
(1995
).43.
J. W.
Ochterski
, Thermochemistry in Gaussian, in White Papers and Technical Notes
(The Official Gaussian Website
, 2000
).44.
T.
Fujii
and K.
Shouji
, J. Appl. Phys.
74
, 3009
(1993
).45.
K. M.
Ervin
and P. B.
Armentrout
, J. Chem. Phys.
83
, 166
(1985
).46.
M.
Tsuji
, H.
Kouno
, K.
Matsumura
, T.
Funatsu
, Y.
Nishimura
, H.
Obase
, H.
Kugishima
, and K.
Yoshida
, J. Chem. Phys.
98
, 2011
(1993
).47.
P.
Tosi
, D.
Cappelletti
, O.
Dmitriev
, S.
Giordani
, D.
Bassi
, D. R.
Latimer
, and M. A.
Smith
, J. Phys. Chem.
99
, 15538
(1995
).48.
M. A.
Lieberman
and A. J.
Lichtenberg
, Principles of Plasma Discharges and Materials Processing
, 2nd ed. (Wiley-Interscience
, New Jersey
, 2005
), p. 290
.49.
R. L.
Woodin
and J. L.
Beauchamp
, J. Am. Chem. Soc.
100
, 501
(1978
).50.
J.
Amicangero
and P.
Armentrout
, J. Phys. Chem. A
104
, 11420
(2000
).51.
E.
Vietzke
, K.
Flaskamp
, V.
Philipps
, G.
Esser
, P.
Wienhold
, and J.
Winter
, J. Nucl. Mater.
145–147
, 443
(1987
), and references therein.52.
E.
Salonen
, K.
Nordlund
, J.
Keinonen
, and C. H.
Wu
, Phys. Rev. B
63
, 195415
(2001
).53.
E. D.
de Rooij
, U.
von Toussaint
, A. W.
Keyn
, and W. J.
Goedheer
, Phys. Chem. Chem. Phys.
11
, 9823
(2009
).54.
J.
Hong
, S.
Lee
, C.
Cardinaud
, and G.
Turban
, J. Non-Cryst. Solids
265
, 125
(2000
).© 2011 American Institute of Physics.
2011
American Institute of Physics
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