Although lateral thermal conduction in Ge2Sb2Te5 (GST) films can influence the performance of phase change memory (PCM), there are no data available for the in-plane thermal conductivity. This work measures both the in-plane and the out-of-plane thermal conductivities for the amorphous, face-centered-cubic, and hexagonal-close-packed phases of GST using two independent techniques. For crystalline GST, we report anisotropy favoring out-of-plane conduction by up to 54%, which varies with annealing time. Scaling arguments indicate that the anisotropy may be due to the thermal resistance of amorphous regions near grain boundaries. This explanation is consistent with transmission electron microscopy images showing columnar grains and amorphous phase at grain boundaries.
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15 April 2011
Research Article|
April 19 2011
Thermal conductivity anisotropy and grain structure in Ge2Sb2Te5 films
Jaeho Lee;
Jaeho Lee
a)
1
Department of Mechanical Engineering, Stanford University
, Stanford, California 94305, USA
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Zijian Li;
Zijian Li
1
Department of Mechanical Engineering, Stanford University
, Stanford, California 94305, USA
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John P. Reifenberg;
John P. Reifenberg
1
Department of Mechanical Engineering, Stanford University
, Stanford, California 94305, USA
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Sangchul Lee;
Sangchul Lee
2Department of Material Science Engineering,
Stanford University
, Stanford, California 94305, USA
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Robert Sinclair;
Robert Sinclair
2Department of Material Science Engineering,
Stanford University
, Stanford, California 94305, USA
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Mehdi Asheghi;
Mehdi Asheghi
1
Department of Mechanical Engineering, Stanford University
, Stanford, California 94305, USA
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Kenneth E. Goodson
Kenneth E. Goodson
1
Department of Mechanical Engineering, Stanford University
, Stanford, California 94305, USA
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Jaeho Lee
1,a)
Zijian Li
1
John P. Reifenberg
1
Sangchul Lee
2
Robert Sinclair
2
Mehdi Asheghi
1
Kenneth E. Goodson
1
1
Department of Mechanical Engineering, Stanford University
, Stanford, California 94305, USA
2Department of Material Science Engineering,
Stanford University
, Stanford, California 94305, USA
a)
Electronic mail: [email protected]. FAX: (650) 723-7657.
J. Appl. Phys. 109, 084902 (2011)
Article history
Received:
January 18 2011
Accepted:
March 05 2011
Citation
Jaeho Lee, Zijian Li, John P. Reifenberg, Sangchul Lee, Robert Sinclair, Mehdi Asheghi, Kenneth E. Goodson; Thermal conductivity anisotropy and grain structure in Ge2Sb2Te5 films. J. Appl. Phys. 15 April 2011; 109 (8): 084902. https://doi.org/10.1063/1.3573505
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