Carbon diffusion is observed in single crystal α-Al2O3 substrates from carbon and Ti2AlC thin films synthesized via pulsed cathodic arc deposition. Diffusion was found to occur at substrate temperatures of 570 °C and above. The diffusion coefficient of carbon in α-Al2O3 is estimated to be of the order 3×10-13cm2/s for deposition temperatures in the 570–770C range by examining elastic recoil detection analysis (ERDA) elemental depth profiles. It is suggested that an appropriate diffusion barrier may be useful when depositing carbon containing thin films on α-Al2O3 substrates at high temperatures.

1.
W.
Kingery
,
H.
Bowen
, and
D.
Uhlmann
,
Introduction to Ceramics, 2nd edition
(
Wiley Interscience
,
New York
,
1976
).
2.
R.
Doremus
,
J. Appl. Phys.
100
,
101301
(
2006
).
3.
J.
Orwa
,
D.
Jamieson
,
S.
Prawer
, and
J. C.
McCallum
,
Nucl. Inst. Methods Phys. Res. B
175
,
554
(
2001
).
4.
J. O.
Orwa
,
J. L.
Peng
,
J. C.
McCallum
,
D. N.
Jamieson
,
S.
Rubanov
, and
S.
Prawer
,
J. Appl. Phys.
107
,
023508
(
2010
).
5.
E.
Alves
,
C.
Marques
,
G.
Safran
, and
C.
McHargue
,
Nucl. Inst. Methods Phys. Res. B
267
,
1464
(
2009
).
6.
W.
Zdaniewski
and
H.
Kirchner
,
J. Am. Ceram. Soc.
70
,
C4
(
1987
).
7.
P.
Eklund
,
M.
Beckers
,
U.
Jansson
,
H.
Hogberg
, and
L.
Hultman
,
Thin Solid Films
518
,
1851
(
2010
).
8.
O.
Wilhelmsson
,
J.
Palmquist
,
T.
Nyberg
, and
U.
Jansson
,
Appl. Phys Lett.
85
,
1066
(
2004
).
9.
H.
Hogberg
,
L.
Hultman
,
J.
Emmerlich
,
T.
Joelsson
,
P.
Eklund
,
J.
Molina-Aldareguia
,
J.
Palmquist
,
O.
Wilhelmsson
, and
U.
Jansson
,
Surf. Coat. Technol.
194
,
6
(
2005
).
10.
O.
Wilhelmsson
,
J.
Palmquist
,
E.
Lewin
,
J.
Emmerlich
,
P.
Eklund
,
P.
Persson
,
H. H. S.
Li
,
R.
Ahuja
,
O.
Eriksson
,
L.
Hultman
, and
U.
Jansson
,
J. Cryst. Growth.
291
,
290
(
2006
).
11.
J.
Rosén
,
L.
Ryves
,
P.
Persson
, and
M.
Bilek
,
J. Appl. Phys.
101
,
056101
(
2007
).
12.
T. W. H.
Oates
,
J.
Pigott
,
D. R.
McKenzie
, and
M. M. M.
Bilek
,
Rev. Sci. Inst.
74
,
4750
(
2003
).
13.
M.
Guenette
,
M.
Tucker
,
M.
Ionescu
,
M.
Bilek
, and
D.
McKenzie
,
Thin Solid Films
519
,
766
(
2010
).
14.
W.
Chu
,
J.
Mayer
, and
M.
Nicolet
,
Backscattering Spectrometry
(
Academic Press
,
New York
,
1979
).
15.
J.
Ziegler
,
The Stopping and Ranges of Ions in Matter
, vol.
4
(
Pergamon Press
,
Elmsford, NY
,
1977
).
16.
N. P. Laboratory, “Kaye and laby online,” available at (
2009
).
17.
D.
Lide
,
CRC Handbook of Chemistry and Physics, 90th edition, Internet Version 2010
(
CRC Press
,
Boca Raton, FL
,
2010
).
18.
A.
Anders
and
G.
Yushkov
,
J. Appl. Phys.
91
,
4824
(
2002
).
19.
P.
Eklund
,
M.
Beckers
,
J.
Frodelius
,
H.
Hogberg
, and
L.
Hultman
,
J. Vac. Sci. Technol. A
25
,
1381
(
2007
).
20.
I.
Brown
,
Annu. Rev. Mater. Sci.
28
,
24369
(
1998
).
21.
P.
Martin
and
A.
Bendavid
,
Thin Solid Films
394
,
1
(
2001
).
22.
D.
McKenzie
,
Rep. Prog. Phys.
59
,
1611
(
1996
).
You do not currently have access to this content.