A composition gradient sputtering method was employed to deposit a series of (FexCo1-x)1-yHfy alloy films with different Fe/Co atomic ratios and Hf-doping. At Fe/Co = 70/30, the magnetically annealed (Fe0.7Co0.3)1-yHfy films with y = 0.087 – 0.124 showed a very high uniaxial anisotropy and an ultrahigh ferromagnetic resonance frequency over 7 GHz after the films were annealed at 350 °C, while at Fe/Co = 50/50, the as-deposited (Fe0.5Co0.5)1-yHfy films with y = 0.074 – 0.168 showed an excellent in-plane uniaxial anisotropy and high ferromagnetic resonance frequency over 3 GHz. These Fe-Co-Hf films deposited by the composition gradient sputtering method exhibited ahigh saturation magnetization of 1.8 – 2.2 T, a large uniaxial anisotropy field of 200 – 500 Oe, and a high ferromagnetic resonance frequency over 7 GHz, which provides great opportunities for integrated magnetic devices.
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1 April 2011
PROCEEDINGS OF THE 55TH ANNUAL CONFERENCE ON MAGNETISM AND MAGNETIC MATERIALS
14-18 November 2010
Atlanta, Georgia
Research Article|
Magnetism and Magnetic Materials|
March 28 2011
Soft magnetism and microwave magnetic properties of Fe-Co-Hf films deposited by composition gradient sputtering
Shandong Li;
Shandong Li
a)
1
Department of Physics, Fujian Normal University
, Fuzhou 350007, China
2
Electrical and Computer Engineering Department, Northeastern University
, Boston, MA 02115, USA
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Ming Liu;
Ming Liu
2
Electrical and Computer Engineering Department, Northeastern University
, Boston, MA 02115, USA
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Feng Xu;
Feng Xu
3
Department of Materials Science and Technology, Nanjing University of Science and Technology
, Nanjing 210094, China
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J. Lou;
J. Lou
2
Electrical and Computer Engineering Department, Northeastern University
, Boston, MA 02115, USA
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Zongjun Tian;
Zongjun Tian
4
College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics
, Nanjing 210016, China
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Jianpeng Wu;
Jianpeng Wu
1
Department of Physics, Fujian Normal University
, Fuzhou 350007, China
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Yi Hu;
Yi Hu
1
Department of Physics, Fujian Normal University
, Fuzhou 350007, China
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Xinle Cai;
Xinle Cai
1
Department of Physics, Fujian Normal University
, Fuzhou 350007, China
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Jenq-Gong Duh;
Jenq-Gong Duh
5
Department of Material Science and Engineering, National Tsing Hua University
, Hsinchu 30013, Taiwan
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Nian X. Sun
Nian X. Sun
b)
2
Electrical and Computer Engineering Department, Northeastern University
, Boston, MA 02115, USA
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a)
Author to whom correspondence should be addressed. Electronic mail: [email protected].
b)
Electronic mail: [email protected].
J. Appl. Phys. 109, 07A315 (2011)
Article history
Received:
September 21 2010
Accepted:
November 12 2010
Citation
Shandong Li, Ming Liu, Feng Xu, J. Lou, Zongjun Tian, Jianpeng Wu, Yi Hu, Xinle Cai, Jenq-Gong Duh, Nian X. Sun; Soft magnetism and microwave magnetic properties of Fe-Co-Hf films deposited by composition gradient sputtering. J. Appl. Phys. 1 April 2011; 109 (7): 07A315. https://doi.org/10.1063/1.3549584
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