Plasma temperature and density diagnostics are crucial for lithographic applications of extreme ultraviolet light sources. One widely used technique employs line intensity ratios of successively charged ion states to determine the ion temperature . This work comprises a detailed “stress-test” of the applied technique, where space and time resolved emission in laser-produced plasmas were studied, using a Nd:yttrium aluminum garnet laser pulse incident on an aluminum target in the 26.5–32.5 nm range. Detailed hydrodynamic simulations also investigate the dependency of ion temperature on electron density and the charge states for various line combinations (Al VI/V, Al VII/VI, Al VIII/VII, Al IX/VIII, and Al X/IX).
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