The formation and expansion of recombination-induced stacking faults (SFs) within 4H–SiC bipolar and unipolar devices is known to induce a drift in the forward voltage during forward bias operation. This drift renders devices unsuitable for commercial applications. While the expansion of SFs in 4H–SiC occurs by the recombination-enhanced dislocation glide mechanism, why SF expansion occurs, i.e., the energetic driving force, remains unclear. Recent experiments have revealed that SF contraction and a recovery of the forward voltage drift can be induced under many conditions, including forward bias operation. Such observations have enabled the identification of SF-related degradation in devices where imaging methods are not possible and are inconsistent with the previously reported energetic driving force models. We present a model that qualitatively explains these recent experimental observations, which is based on the quasi-Fermi energy of the electron population during forward bias operation. Device simulation results and further experiments are also reported in support of this model.

1.
M. A.
Capano
and
R. J.
Trew
,
Mater. Res. Bull.
22
,
19
(
1997
).
2.
M.
Skowronski
and
S.
Ha
,
J. Appl. Phys.
99
,
011101
(
2006
).
3.
K.
Maeda
and
S.
Takeuchi
, in
Dislocations in Solids
, edited by
F. R. N.
Nabarro
and
M. S.
Duesbery
(
North-Holland
,
Amsterdam
,
1996
), Vol.
10
, p.
443
.
4.
A.
Galeckas
,
J.
Linnros
, and
P.
Pirouz
,
Phys. Rev. Lett.
96
,
025502
(
2006
).
5.
S.
Ha
,
M.
Skowronski
,
J. J.
Sumakeris
,
M. J.
Paisley
, and
M. K.
Das
,
Phys. Rev. Lett.
92
,
175504
(
2004
).
6.
W. R. L.
Lambrecht
and
M. S.
Miao
,
Phys. Rev. B
73
,
155312
(
2006
).
7.
J. Q.
Liu
,
M.
Skowronski
,
C.
Hallin
,
R.
Soderholm
, and
H.
Lendenmann
,
Appl. Phys. Lett.
80
,
749
(
2002
).
8.
M. S.
Miao
,
S.
Limpijumnong
, and
W. R. L.
Lambrecht
,
Appl. Phys. Lett.
79
,
4360
(
2001
).
9.
P. O. A.
Persson
,
L.
Hultman
,
H.
Jacobson
,
J. P.
Bergman
,
E.
Janzen
,
J. M.
Molina-Aldareguia
,
W. J.
Clegg
, and
T.
Tuomi
,
Appl. Phys. Lett.
80
,
4852
(
2002
).
10.
M. E.
Twigg
,
R. E.
Stahlbush
,
M.
Fatemi
,
S. D.
Arthur
,
J. B.
Fedison
,
J. B.
Tucker
, and
S.
Wang
,
Mater. Sci. Forum
457–460
,
537
(
2004
).
11.
T.
Miyanagi
,
H.
Tsuchida
,
I. S.
Kamata
,
T.
Nakamura
,
K.
Nkayama
,
R.
Ishii
, and
Y.
Sugawara
,
Appl. Phys. Lett.
89
,
062104
(
2006
).
12.
J. D.
Caldwell
,
R. E.
Stahlbush
,
K. D.
Hobart
,
O. J.
Glembocki
, and
K. X.
Liu
,
Appl. Phys. Lett.
90
,
143519
(
2007
).
13.
J. D.
Caldwell
,
O. J.
Glembocki
,
R. E.
Stahlbush
, and
K. D.
Hobart
,
Appl. Phys. Lett.
91
,
243509
(
2007
).
14.
J. D.
Caldwell
,
O. J.
Glembocki
,
R. E.
Stahlbush
, and
K. D.
Hobart
,
J. Electron. Mater.
37
,
699
(
2008
).
15.
J. D.
Caldwell
,
R. E.
Stahlbush
,
O. J.
Glembocki
,
K. D.
Hobart
,
K. X.
Liu
, and
M. J.
Tadjer
,
Mater. Sci. Forum
600–603
,
273
(
2008
).
16.
J. D.
Caldwell
,
R. E.
Stahlbush
,
E. A.
Imhoff
,
K. D.
Hobart
,
M. J.
Tadjer
,
Q.
Zhang
, and
A.
Agarwal
,
J. Appl. Phys.
106
,
044504
(
2009
).
17.
J. D.
Caldwell
,
K. X.
Liu
,
M. J.
Tadjer
,
O. J.
Glembocki
,
R. E.
Stahlbush
,
K. D.
Hobart
, and
F.
Kub
,
J. Electron. Mater.
36
,
318
(
2007
).
18.
M.
Skowronski
and
X.
Zhang
(private communication,
2006
).
19.
K. M.
Speer
,
P. G.
Neudeck
,
D. J.
Spry
,
A. J.
Trunek
, and
P.
Pirouz
, ,
J. Electron. Mater.
37
,
672
(
2008
).
20.
K. -B.
Park
,
Y.
Ding
,
J. P.
Pelz
,
M. K.
Mikhov
,
Y.
Wang
, and
B. J.
Skromme
,
Appl. Phys. Lett.
86
,
222109
(
2005
).
21.
P. B.
Klein
,
J. Appl. Phys.
103
,
033702
(
2008
).
22.
S. G.
Sridhara
,
F. H. C.
Carlsson
,
J. P.
Bergman
, and
E.
Janzen
,
Appl. Phys. Lett.
79
,
3944
(
2001
).
23.
K.
Maeda
and
S.
Takeuchi
,
Appl. Phys. Lett.
42
,
664
(
1983
).
24.
K.
Maeda
,
K.
Suzuki
,
M.
Ichihara
,
S.
Nishiguchi
,
K.
Ono
,
Y.
Mera
, and
S.
Takeuchi
,
Physica B
273–274
,
134
(
1999
).
25.
K.
Maeda
and
S.
Takeuchi
,
Jpn. J. Appl. Phys., Part 2
20
,
L165
(
1981
).
26.
K.
Maeda
,
M.
Sato
,
A.
Kubo
, and
S.
Takeuchi
,
J. Appl. Phys.
54
,
161
(
1983
).
27.
P.
Pirouz
,
M.
Zhang
,
J. -L.
Demenet
, and
H. M.
Hobgood
,
J. Appl. Phys.
93
,
3279
(
2003
).
28.
A.
Galeckas
,
A.
Hallen
,
S.
Majdi
,
J.
Linnros
, and
P.
Pirouz
,
Phys. Rev. B
74
,
233203
(
2006
).
29.
M. S.
Miao
and
W. R. L.
Lambrecht
,
J. Appl. Phys.
101
,
103711
(
2007
).
30.
G.
Savini
,
Phys. Status Solidi C
4
,
2883
(
2007
).
31.
G.
Grasso
,
F.
Grilli
,
A. S.
Siri
,
F.
Marti
,
Y.
Huangand
, and
R.
Flükiger
,
Philos. Mag. A
80
,
991
(
2000
).
32.
M. E.
Twigg
,
R. E.
Stahlbush
,
M.
Fatemi
,
S. D.
Arthur
,
J. B.
Fedison
,
J. B.
Tucker
, and
S.
Wang
,
Appl. Phys. Lett.
82
,
2410
(
2003
).
33.
X.
Zhang
and
M.
Skowronski
, (private communication).
34.
http://www.ioffe.ru/SVA/NSM/Semicond/SiC/ebasic.html, (last accessed 7/27/
2010
)
35.
J. D.
Caldwell
,
A. J.
Giles
,
R. E.
Stahlbush
,
M. G.
Ancona
,
O. J.
Glembocki
,
K. D.
Hobart
,
B. A.
Hull
, and
K. X.
Liu
,
Mater. Sci. Forum
645–648
,
277
(
2010
).
36.
U.
Lindefelt
,
H.
Iwata
,
S.
Oberg
, and
P. R.
Briddon
,
Phys. Rev. B
67
,
155204
(
2003
).
37.
J. D.
Caldwell
,
R. E.
Stahlbush
,
O. J.
Glembocki
,
K. D.
Hobart
,
E. A.
Imhoff
,
M. J.
Tadjer
, and
K. X.
Liu
,
International Semiconductor Device Research Symposium
(
IEEE
,
College Park, MD
,
2007
), p.
284
.
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