Overdamped NbTiN Josephson junctions with Ti–TiN bilayered normal-metal barrier are proposed for metrological applications. Binary arrays consisting of 32 768 NbTiN/Ti–TiN/NbTiN junctions were fabricated for quantum voltage standards, and a Shapiro step at 1 V with the step height of about 0.5 mA was generated at around 8 K. The Ti layer was added to protect the base NbTiN electrode from nitrogen plasma during the deposition of the TiN layer. While the critical current and the junction resistance are mainly dominated by the thickness of the TiN barrier, can be also adjusted by changing the thickness of the Ti barrier to maximize the operating margin for voltage standard circuits. An optimization of the NbTiN film in terms of film stress is also described for fabrication of circuits containing such a large number of junctions.
REFERENCES
1.
K. H.
Gundlach
and M.
Schicke
, Supercond. Sci. Technol.
13
, R171
(2000
).2.
B. D.
Jackson
, N. N.
Iosad
, G.
de Lange
, A. M.
Baryshev
, W. M.
Laauwen
, J. -R.
Gao
, and T. M.
Klapwijk
, IEEE Trans. Appl. Supercond.
11
, 653
(2001
).3.
C. E.
Tong
, J.
Stern
, K.
Megerian
, H.
LeDuc
, T. K.
Sridharan
, H.
Gibson
, and R.
Blundell
, Proceedings of the 12th International Symposium on Space Terahertz Technology
, San Diego, CA, 2001
, p. 253
.4.
J. W.
Kooi
, J. A.
Stern
, G.
Chattopadhyay
, H. G.
LeDuc
, B.
Bumble
, and J.
Zmuidzinas
, Int. J. Infrared Millim. Waves
19
, 373
(1998
).5.
J.
Zmuidzinas
, J. W.
Kooi
, J.
Kawamura
, G.
Chattopadhyay
, B.
Bumble
, H. G.
LeDuc
, and J. A.
Stern
, Proc. SPIE
3357
, 53
(1998
).6.
J. A.
Stern
, B.
Bumble
, H. G.
LeDuc
, J. W.
Kooi
, and J.
Zmuidzinas
, Proceedings of the 9th International Symposium on Space Terahertz Technology
, Pasadena, CA, 1998
, p. 305
.7.
J.
Kawamura
, J.
Chen
, D.
Miller
, J.
Kooi
, J.
Zmuidzinas
, B.
Bumble
, H. G.
LeDuc
, and J. A.
Stern
, Appl. Phys. Lett.
75
, 4013
(1999
).8.
B.
Bumble
, H. G.
LeDuc
, J. A.
Stern
, and K. G.
Megerian
, IEEE Trans. Appl. Supercond.
11
, 76
(2001
).9.
M.
Takeda
, W.
Shan
, T.
Kojima
, Y.
Uzawa
, M.
Kroug
, J.
Li
, S.
Shi
, and Z.
Wang
, IEEE Trans. Appl. Supercond.
19
, 436
(2009
).10.
H.
Sasaki
, H.
Yamamori
, T.
Yamada
, A.
Shoji
, and S.
Kohjiro
, Proceedings of the Conference on Precision Electromagnetic Measurement 2010 Conference Digest
, Daejeon, Korea, 2010
, p. 159
.11.
S. P.
Benz
, Appl. Phys. Lett.
67
, 2714
(1995
).12.
S. P.
Benz
and C. J.
Burroughs
, IEEE Trans. Appl. Supercond.
7
, 2434
(1997
).13.
Q.
Wang
, T.
Kikuchi
, S.
Kohjiro
, and A.
Shoji
, IEEE Trans. Appl. Supercond.
7
, 2801
(1997
).14.
Y.
Chong
, P. D.
Dresselhaus
, S. P.
Benz
, and J. E.
Bonevich
, Appl. Phys. Lett.
82
, 2467
(2003
).15.
O. F.
Kieler
, J.
Kohlmann
, and F.
Müller
, Supercond. Sci. Technol.
20
, S318
(2007
).16.
B.
Baek
, P. D.
Dresselhaus
, and S. P.
Benz
, IEEE Trans. Appl. Supercond.
16
, 1966
(2006
).17.
H.
Yamamori
, M.
Ishizaki
, A.
Shoji
, P. D.
Dresselhaus
, and S. P.
Benz
, Appl. Phys. Lett.
88
, 042503
(2006
).18.
J. C.
Villegier
, S.
Bouat
, M.
Aurino
, M.
Heitzman
, and D.
Renaud
, Proceedings of the Applied Superconductivity Conference (ASC 2010)
, Washington D.C., 1–6 August 2010
, p. 1EY
–01
.19.
L.
Yu
, Y.
Shen
, R.
Gandikota
, R.
Singh
, N.
Newman
, and J.
Rowell
, Proceedings of the 11th International Superconductive Electronics Conference (ISEC’07)
, Washington D.C., 10–14 June 2010
, p. O
–K03
.20.
G. C.
Stoney
, Proc. R. Soc. London, Ser. A
82
, 172
(1909
).21.
N. N.
Iosad
, A. V.
Mijiritskii
, V. V.
Roddatis
, N. M.
van der Pers
, B. D.
Jackson
, J. R.
Gao
, S. N.
Polyakov
, P. N.
Dmitriev
, and T. M.
Klapwijk
, J. Appl. Phys.
88
, 5756
(2000
).22.
S.
Kiryu
, A.
Shoji
, S.
Kohjiro
, and S.
Kodaira
, Jpn. J. Appl. Phys., Part 2
32
, L834
(1993
).23.
N. N.
Iosad
, D. V.
Balashov
, M. Yu.
Kupriyanov
, S. N.
Polyakov
, and V. V.
Roddatis
, IEEE Trans. Appl. Supercond.
7
, 2805
(1997
).24.
N. N.
Iosad
, T. M.
Klapwijk
, S. N.
Polyakov
, V. V.
Roddatis
, E. K.
Kov’ev
, and P. N.
Dmitriev
, IEEE Trans. Appl. Supercond.
9
, 1720
(1999
).25.
N. N.
Iosad
, B. D.
Jackson
, T. M.
Klapwijk
, S. N.
Polyakov
, P. N.
Dmitriev
, and J. R.
Gao
, IEEE Trans. Appl. Supercond.
9
, 1716
(1999
).26.
S.
Kohjiro
, A.
Shoji
, and S.
Kiryu
, Jpn. J. Appl. Phys., Part 2
31
, L239
(1992
).27.
T. P.
Orlando
, E. J.
McNiff
, Jr., S.
Foner
, and M. R.
Beasley
, Phys. Rev. B
19
, 4545
(1979
).28.
A.
Shoji
, S.
Kiryu
, and S.
Kohjiro
, Appl. Phys. Lett.
60
, 1624
(1992
).29.
M.
Weihnacht
, Phys. Status Solidi
32
, K169
(1969
).30.
R. L.
Kautz
, J. Appl. Phys.
78
, 5811
(1995
).31.
32.
K. A.
Delin
and A. W.
Kleinsasser
, Supercond. Sci. Technol.
9
, 227
(1996
).33.
Y.
Chong
, N.
Hadacek
, P. D.
Dresselhaus
, C. J.
Burroughs
, B.
Baek
, and S. P.
Benz
, Appl. Phys. Lett.
87
, 222511
(2005
).34.
R. L.
Kautz
, J. Appl. Phys.
76
, 5538
(1994
).© 2010 American Institute of Physics.
2010
American Institute of Physics
You do not currently have access to this content.
