Laser-induced transient grating measurements and ultrafast optical pump-probe imaging of surface acoustic waves near a linear boundary between copper and silica films on a silicon substrate indicate the presence of a boundary-localized mode with a phase velocity slightly below the Rayleigh wave velocity on the copper film. We analyze in detail the dispersion of this localized mode in comparison with that of the Rayleigh waves in the surrounding materials. The existence of the localized mode is ascribed to the nonuniformity of the copper film thickness near its edge resulting from polishing during fabrication.
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The following values of density and elastic constants of the constituent materials were used in the calculations: , , ; , , ; , , ; , , ; , , , . Thin film materials were modeled as elastically isotropic and their elastic properties are listed above in terms of the Young’s modulus and the Poisson’s ratio , whereas for the single crystal silicon substrate three independent terms of the elastic constant tensor are listed.
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.© 2010 American Institute of Physics.
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American Institute of Physics
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