The operation of a MEMS-based micro heat engine at resonant and off-resonant conditions is presented. Both model and experiment are used to investigate resonant and off-resonant operation of the engine. In this work, we look at the pressure-volume (PV) diagrams of an engine operated at resonance and off-resonance. Model predictions of the PV diagram are in favorable agreement with measured data. The results show that resonant operation is beneficial. At resonance, the pressure and volume in the engine cavity are decoupled and more mechanical work is observed. The PV diagram describes an elliptical shape. However, for an off-resonant operation the pressure and volume become more coupled and less mechanical work is observed. The PV diagram is described by a sigmoidal shape.

1.
S.
Jacobson
and
A.
Epstein
,
Proceedings of the ISMME2003
, Tsuchiura, Japan,
2003
.
2.
A.
Epstein
 et al,
Proceedings of the 28th AIAA Fluid Dynamics Conference
, Snowmass, CO,
1997
.
3.
L.
Frechette
,
C.
Lee
, and
S.
Arslan
,
Fourth international Workshop on Micro and Nano Technology for Power Generation and Energy Conversion
, Kyoto, Japan,
2004
, (unpublished).
4.
K.
Fu
,
A. J.
Knobloch
,
F. C.
Martines
,
D. C.
Walther
,
C.
Fernandez-Pello
,
A. P.
Pisano
, and
D.
Liepmann
,
Proceedings of the ASME IMECE
, paper No. MEMS-23925, New York,
2001
.
5.
T.
Toriyama
,
K.
Hashimoto
, and
S.
Sugiyama
,
Proceedings of the Transducers’03
, Boston, MA,
2003
(unpublished).
6.
A. H.
Epstein
,
ASME J. Eng. Gas Turbines Power
126
,
205
(
2004
).
7.
C.
Lee
,
M.
Liamini
, and
L.
Fréchette
,
Proceedings of the Solid State Sensor, Actuator and Microsystem Workshop
, Hilton Head Island, South Carolina,
2006
(unpublished).
8.
K.
Isomura
,
M.
Murayama
,
S.
Teramoto
,
K.
Hikichi
,
Y.
Endo
,
S.
Togo
, and
S.
Tanaka
,
J. Micromech. Microeng.
16
,
S254
(
2006
).
9.
J.
Peirs
,
D.
Reynaerts
, and
F.
Verplaetsen
,
Sens. Actuators, A
113
,
86
(
2004
).
10.
F.
Herrault
,
T.
Crittenden
,
S.
Yorish
,
E.
Birdsell
,
A.
Glezer
, and
M.
Allen
,
Proceedings of the Solid-State Sensors, Actuators and Microsystems Workshop
, Hilton Head Island, South Carolina,
2008
(unpublished).
11.
O.
Symko
,
E.
Abdel-Rahman
,
Y.
Kwon
,
M.
Emmi
, and
R.
Behunin
,
Microelectron. J.
35
,
185
(
2004
).
12.
T.
Geng
,
M.
Schoen
,
A.
Kuzentsov
, and
W.
Reberts
,
Flow, Turbul. Combust.
78
,
17
(
2006
).
13.
H.
Bardaweel
,
M.
Anderson
,
R.
Richards
, and
C.
Richards
,
J. Micromech. Microeng.
18
,
104014
(
2008
).
14.
S.
Whalen
,
M.
Thompson
,
D.
Bahr
,
C.
Richards
, and
R.
Richards
,
Sens. Actuators, A
104
,
290
(
2003
).
15.
J.
Cho
,
L.
Weiss
,
D.
Bahr
,
C.
Richards
, and
R.
Richards
,
J. Micromech. Microeng.
17
,
S217
(
2007
).
16.
L.
Weiss
,
J.
Cho
,
K.
McNeil
,
D.
Bahr
,
C.
Richards
, and
R.
Richards
,
J. Micromech. Microeng.
16
,
S262
(
2006
).
17.
J.
Cho
,
C.
Lin
,
C.
Richards
,
R.
Richards
,
J.
Ahn
, and
P.
Ronney
,
Thirty-second International Symposium on Combustion
, Montreal, Canada,
2008
(unpublished).
18.
J.
Cho
,
T.
Wiser
,
C.
Richards
,
D.
Bahr
, and
R.
Richards
,
Sens. Actuators, A
133
,
55
(
2007
).
19.
J.
Cho
,
C.
Richards
,
J.
Jiao
,
D.
Bahr
, and
R.
Richards
,
Proeedings of the Solid-State Sensors, Actuators and Microsystems Workshop
, Hilton Head Island, South Carolina,
2006
(unpublished).
20.
J.
Cho
,
C.
Richards
, and
R.
Richards
,
Rev. Sci. Instrum.
79
,
1
(
2008
).
21.
R.
Schrage
,
A Theoretical Study of Interphase Mass Transfer
(
Columbia University Press
,
New York
,
1953
).
22.
S.
Boethling
and
D.
MacKay
,
Handbook of Property Estimation Methods for Chemicals: Environmental and Health Sciences
(
CRC
,
Boca Raton, FL
,
2000
).
23.
D.
Landau
and
M.
Lifshitz
,
Statistical Physics
(
Addison-Wesley
,
Reading, MA
,
1958
).
24.
J.
Vlassak
and
W.
Nix
,
J. Mater. Res.
7
,
3242
(
1992
).
25.
F.
Kinsler
,
A.
Frey
,
A.
Coppens
, and
J.
Sanders
,
Fundamentals of Acoustics
(
Wiley
,
New York
,
2000
).
You do not currently have access to this content.