The epitaxial growth of β-Sic nanocrystals at the SiO162/Si(100) interface under CO annealing has been studied using C13O18 and isotopically sensitive nuclear reaction analysis and secondary ion mass spectrometry analysis. The results show that the amount of SiC increases linearly with the CO pressure and the annealing time. We demonstrate that the CO diffuses as a molecule in the silica and that for each C atom reacting to form SiC, an oxygen atom is incorporated in the vicinity of the interface. The linear and the parabolic rate constants corresponding to an adapted Deal and Grove model are also determined.

1.
J. A.
Cooper
, Jr.
,
Mater. Sci. Forum
389–393
,
15
(
2002
).
2.
S. A.
Kukushkin
and
A. V.
Osipov
,
Phys. Solid State
50
,
1238
(
2008
).
3.
R.
Scholz
,
U.
Gosele
,
E.
Niemann
, and
F.
Wischmeyer
,
Appl. Phys. A: Mater. Sci. Process.
64
,
115
(
1997
).
4.
A.
Severino
,
G.
D’Arrigo
,
C.
Bongiorno
,
S.
Scalese
,
F.
La Via
, and
G.
Foti
,
J. Appl. Phys.
102
,
023518
(
2007
).
5.
R.
Scholz
,
U.
Gosele
,
F.
Wischmeyer
, and
E.
Niemann
,
Appl. Phys. A: Mater. Sci. Process.
66
,
59
(
1998
).
6.
O. H.
Krafcsik
,
K. V.
Josepovits
,
L.
Tóth
,
B.
Pécz
, and
P.
Deák
,
J. Electrochem. Soc.
149
,
G297
(
2002
).
7.
O. H.
Krafcsik
,
G.
Vida
,
I.
Pócsik
,
K. V.
Josepovits
, and
P.
Deák
,
Jpn. J. Appl. Phys., Part 1
40
,
2197
(
2001
).
8.
Z.
Makkai
,
B.
Pecz
,
I.
Barsony
,
G.
Vida
,
A.
Pongracz
,
K. V.
Josepovits
, and
P.
Deak
,
Appl. Phys. Lett.
86
,
253109
(
2005
).
9.
A.
Pongrácz
,
G.
Battistig
,
C.
Dücso
,
K. V.
Josepovits
, and
P.
Deák
,
Mater. Sci. Eng., C
27
,
1444
(
2007
).
10.
C. D.
Cavellin
,
I.
Trimaille
,
J. -J.
Ganem
,
M. D.
D’Angelo
,
I.
Vickridge
,
A.
Pongrácz
, and
G.
Battistig
,
J. Appl. Phys.
105
,
033501
(
2009
).
11.
D.
Schmaus
and
I.
Vickridge
,
Analytical Methods for Corrosion Science and Engineering
(
Dekker
,
New York
/
Taylor & Francis
,
London
,
2006
), Chap. 4.
12.
G.
Amsel
,
J. P.
Nadai
,
C.
Ortega
,
S.
Rigo
, and
J.
Siejka
,
Nucl. Instrum. Methods
149
,
705
(
1978
).
13.
I.
Bársony
and
J.
Giber
,
Appl. Surf. Sci.
4
,
1
(
1980
).
14.
I.
Bársony
,
D.
Marton
, and
J.
Giber
,
Thin Solid Films
51
,
275
(
1978
).
15.
B.
Pécz
,
Z.
Makkai
,
A.
Pongrácz
,
I.
Bársony
,
P.
Deák
, and
K. V.
Josepovits
,
Surf. Sci.
601
,
2671
(
2007
).
16.
B. E.
Deal
and
A. S.
Grove
,
J. Appl. Phys.
36
,
3770
(
1965
).
17.
R. H.
Doremus
,
Diffusion of Reactive Molecules in Solids and Melts
, Illustrated ed. (
Wiley-IEEE
,
New York
,
2002
).
18.
O. H.
Krafcsik
, Ph.D. thesis,
Budapest University of Technology and Economics
,
2002
.
19.
F. J.
Norton
,
Nature (London)
171
,
701
(
1961
).
20.
K.
Kajihara
,
M.
Hirano
,
Y.
Takimoto
,
L.
Skuja
, and
H.
Hosono
,
Appl. Phys. Lett.
91
,
071904
(
2007
).
You do not currently have access to this content.